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スパッタ法により作成した非晶質酸化タングステン薄膜の構造と物性に関する研究
Research Project
All
Fiscal Year 1992
grantAwardInfo
Project/Area Number
04750674
Research Category
Grant-in-Aid for Encouragement of Young Scientists (A)
Allocation Type
Single-year Grants
Research Field
無機工業化学・無機材料工学
Research Institution
Okayama University
Principal Investigator
難波 徳郎
岡山大学, 工学部, 助手
Project Period (FY)
1992
Project Status
Completed (Fiscal Year 1992)
Budget Amount
*help
¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1992: ¥900,000 (Direct Cost: ¥900,000)