スパッタ法により作成した非晶質酸化タングステン薄膜の構造と物性に関する研究

Research Project

Project/Area Number	04750674
Research Category	Grant-in-Aid for Encouragement of Young Scientists (A)
Allocation Type	Single-year Grants
Research Field	無機工業化学・無機材料工学
Research Institution	Okayama University
Principal Investigator	難波徳郎岡山大学, 工学部, 助手
Project Period (FY)	1992
Project Status	Completed (Fiscal Year 1992)
Budget Amount *help	¥900,000 (Direct Cost: ¥900,000) Fiscal Year 1992: ¥900,000 (Direct Cost: ¥900,000)