表面吸着に注目した原子層酸化膜の研究

• Project/Area Number: 04855054
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: 電子材料工学
• Research Institution: The Institute of Physical and Chemical Research
• Principal Investigator: 尾笹 一成 理化学研究所, 研究員
• Project Period (FY): 1992
• Project Status: Completed (Fiscal Year 1992)
• Budget Amount: ¥900,000 (Direct Cost: ¥900,000); Fiscal Year 1992: ¥900,000 (Direct Cost: ¥900,000)