反応性イオンビームエッチによる面発光レーザ用極微共振器の低損傷加工に関する研究

Research Project

Project/Area Number	04919059
Research Category	Grant-in-Aid for Encouragement of Young Scientists (B)
Allocation Type	Single-year Grants
Research Field	工業
Research Institution	東京工業大
Principal Investigator	松谷晃宏東京工業大, 文部技官
Project Period (FY)	1992
Project Status	Completed (Fiscal Year 1992)
Budget Amount *help	¥180,000 (Direct Cost: ¥180,000) Fiscal Year 1992: ¥180,000 (Direct Cost: ¥180,000)