高精度プラズマプロセスのためのオンウェハーモニタリングシステムに関する研究

Research Project

Project/Area Number	04F04143
Research Category	Grant-in-Aid for JSPS Fellows
Allocation Type	Single-year Grants
Section	外国
Research Field	Thin film/Surface and interfacial physical properties
Research Institution	Tohoku University
Principal Investigator	寒川誠二
Co-Investigator(Kenkyū-buntansha)	HONG S. J.
Project Period (FY)	2004
Project Status	Completed (Fiscal Year 2004)
Budget Amount *help	¥1,200,000 (Direct Cost: ¥1,200,000) Fiscal Year 2004: ¥1,200,000 (Direct Cost: ¥1,200,000)