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高精度プラズマプロセスのためのオンウェハーモニタリングシステムに関する研究

Research Project

Project/Area Number 04F04143
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section外国
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionTohoku University

Principal Investigator

寒川 誠二  

Co-Investigator(Kenkyū-buntansha) HONG S. J.  
Project Period (FY) 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 2004: ¥1,200,000 (Direct Cost: ¥1,200,000)

URL: 

Published: 2004-04-01   Modified: 2024-03-26  

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