高精度プラズマプロセスのためのオンウェハーモニタリングシステムに関する研究

• Project/Area Number: 04F04143
• Research Category: Grant-in-Aid for JSPS Fellows
• Allocation Type: Single-year Grants
• Section: 外国
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Tohoku University
• Host Researcher: 寒川 誠二
• Foreign Research Fellow: HONG S. J.
• Project Period (FY): 2004
• Project Status: Completed(Fiscal Year 2004)
• Budget Amount: ¥1,200,000 (Direct Cost : ¥1,200,000); Fiscal Year 2004 : ¥1,200,000 (Direct Cost : ¥1,200,000)