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高精度プラズマプロセスのためのオンウェハーモニタリングシステムに関する研究
Research Project
All
Fiscal Year 2004
grantAwardInfo
Project/Area Number
04F04143
Research Category
Grant-in-Aid for JSPS Fellows
Allocation Type
Single-year Grants
Section
外国
Research Field
Thin film/Surface and interfacial physical properties
Research Institution
Tohoku University
Host Researcher
寒川 誠二
Foreign Research Fellow
HONG S. J.
Project Period (FY)
2004
Project Status
Completed (Fiscal Year 2004)
Budget Amount
*help
¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 2004: ¥1,200,000 (Direct Cost: ¥1,200,000)