MARUYAMA Naoki Mie Univ., Faculty of Engineering, Research Associate, 工学部, 助手 (20209703)
USAMI Masaru Mie Univ., Faculty of Engineering, Associate Professor, 工学部, 助教授 (10106974)
|Budget Amount *help
¥7,000,000 (Direct Cost : ¥7,000,000)
Fiscal Year 1995 : ¥600,000 (Direct Cost : ¥600,000)
Fiscal Year 1994 : ¥2,600,000 (Direct Cost : ¥2,600,000)
Fiscal Year 1993 : ¥3,800,000 (Direct Cost : ¥3,800,000)
It seems to be a very reasonable application of plasma resctivity to thin film processing, because the ionized plasma particles are able to be well controlled by extenal electric and/or magnetic fields. The objectives of this project is to essentially understand the microscopic mechanism of inter-particles' energy exchanges and chemical reactions from the molecular level pointview, and to practically propose a designing plan for fabrication machines with the optimum condition to uniform thickness, high yield, good quality, speedy productivity, etc-
In 1993, we mainly analyzed the rarefied gas flows discharged through nozzles into an expansion chamber evacuated by vacuum pumps, the flight behaviors of ionized particles in plasma fields, and the ionization process of thin film particles for higher reaction promotion. A plasma diagnosis system compensating the time-dependent seath generated around probes was completed, and this technique is widely applied to measurements of plasma paramete
In 1994, we promoted the analysis of chemical reactions on the substrate. Its key point was to introduce chemical reaction processes into the molecular dynamics simulation and to optimize the reaction model with real phenomena. Here, not only the activation energy but also the geometrical configuration were took into account, and this model results in fairly good simulations verified by experiments using the TOF and mass-spectrometer technique.
In 1995, we carried out the experimental and theoretical approaches, showing that multinozzles' discharge scheme is attractive for thickness uniformity, that additionally ionized particles like argon molecules promote also significantly the activation of gaseous chemical reactions, and that inter-particles' collisions and inter-energy exchange for the optimum control are clarified using the quantum molecular orbital simulation.
As a result, the initial objectives were almost attained and so the present project was successfully completed. Such results are not only available to thin film processing but also extended fields like direct mass conversion of carbon dioxide into fuel species with the aid of plasma assisted reaction. However, molecular thermo-fluid-dynamics approach becomes much more important in developing highly advanced techniques for functional thin film formation, new material process, ultra-micro machine, space technology, alternative energy and environmental issues, etc. in the 21st century. Less