|Budget Amount *help
¥7,600,000 (Direct Cost : ¥7,600,000)
Fiscal Year 1995 : ¥1,000,000 (Direct Cost : ¥1,000,000)
Fiscal Year 1994 : ¥6,600,000 (Direct Cost : ¥6,600,000)
This project deals with the fundamental characteristics and applications of a micro-abrasive jet machining (micro-AJM). The micro-AJM device, which is for micro-machining of ceramics, was developed. It has advantages that the pressure of carrier gas is 3-4 times higher than that of a normal device, and that the mixing of abrasives and carrier gas is uniform.
First, the velocity of abrasive particles, which are accelerated with a gas stream, was measured with laser Doppler velocimeter. It is clear that the abrasive particles were accelerated to a velocity of between 100 and 200 m/s, which is approximately 60% of sound speed. Second, a distribution measuring method of attacking abrasive onto the workpiece was developed. Sheet laser light source and CCD camera unit were used. The principle of this method is based on the diffraction light intensity method and image processing technique is applied to get the distribution. It was clear that the abrasives were spread over larger area than the cross section of the nozzle. Information of the velocity and the abrasive distribution is useful in selecting the optimal AJM conditions and in the designing the nozzle shape.
Machining tests of ceramics (AlN,SiC,Si_3N_4, glassy carbon, ZiO_2 and glass) were performed and the machining characteristics were revealed. Furthermore, for micro-AJM applications, micro-drilling, pattern machining, and in-process dressing were tried. Micro-AJM technology demonstrated the excellent performance in the micro-machining of brittle materials.