| Project/Area Number |
07455063
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Osaka University |
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Principal Investigator |
MORI Yuzo Osaka, Univ.Faculty of Eng.Prof., 工学部, 教授 (00029125)
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| Co-Investigator(Kenkyū-buntansha) |
SANO Yasuhisa Osaka, Univ.Faculty of Eng.Research Asst., 工学部, 助手 (40252598)
YAMAMURA Kazuya Osaka, Univ.Faculty of Eng.Research Asst., 工学部, 助手 (60240074)
YAMAUCHI Kazuto Osaka, Univ.Faculty of Eng.Assoc.Prof., 工学部, 助教授 (10174575)
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| Project Period (FY) |
1995 – 1996
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| Project Status |
Completed (Fiscal Year 1996)
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| Budget Amount *help |
¥7,800,000 (Direct Cost: ¥7,800,000)
Fiscal Year 1996: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1995: ¥7,300,000 (Direct Cost: ¥7,300,000)
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| Keywords | Atmospheric plasma / Radical / Pulse modulation / Spatial resolution / SF6 / プラズマCVM / プラズマCVD / 大気圧プラズマ / ラジカル / 分解過程 |
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| Research Abstract |
In the atmospheric plasma etching, the stronger electric field is required for generating radiacals efficiently because of a short mean free path. But, the stronger electric field brings about spreading of a plasma and getting worse of machining resolution. Although the atmospheric plasma is doing very well as both a machining rate and a spatial resolution, it is difficult to combine them on the high level.
In this study, a pulse modulated R.F.power is suggested to realize both a high machining rate and a fine spatial resolution. To modulate a continuous R.F.power to a pulse, an extremely strong electric field is generated in a moment. Then it is expected to generate radicals efficiently in a R.F.-ON cycle. And it is expected to these radicals are disappear before diffusing in a R.F.-OFF cycle.
We gave the existence R.F.power supply a function of a pulse modulation, and made several experiments changing a pulse width and a peak R.F.power. As a result, we found relationship between these parameters and a density of radials, and understood a process of decomposition of reactive gases. Specially in the case of using SF6 as a reactive gas, it was found that both a high machining rate and a fine spatial resolution are realized.
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