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Development of New Measuring Method of thin film thickness using Sound Frequency

Research Project

Project/Area Number 07555039
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section試験
Research Field 機械工作・生産工学
Research InstitutionNiigata university

Principal Investigator

ICHIMIYA Ryoichi  Niigata University, Mechanical Engineering, Professor, 工学部, 教授 (10035595)

Co-Investigator(Kenkyū-buntansha) SAKAMOTO Shuichi  Niigata University, Mechanical Engineering, Assistant, 工学部, 助手 (40211932)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥5,400,000 (Direct Cost: ¥5,400,000)
Fiscal Year 1996: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 1995: ¥3,900,000 (Direct Cost: ¥3,900,000)
KeywordsResonance / Frequency / Measurement / Thickness / Thin film / Non-contact
Research Abstract

When the sound wave is radiated upon a thin film mounted on a rigid box containing a air-layr, the thin film and air-layr resonate under a certain frequency. The resonant frequency depends upon the thickness of the film. The resonant frequency varies almost linearly with the thickness of the film. The experiments were conducted under various conditions in order to find important factors affecting on the frequency. The experiments for the plate to measure its thickness were also conducted. Following conclusions were introduced.
** The position of the sound source upon the film does not give an affect on the resonant frequency.
** From the experiments not only for the polyethylene, vinyl chloride, acryle and nylon, it was clear that the thickness of the thin film can be measured from the resonant frequency.
** Similar resonant frequencies were obtained in both experiments, one is to use wide range white noise and another one is to sweep the pure tone.
** This measuring method is not applicable for the hard materials such as a hard plate because the hard plate does not resonate by the sound wave from a speaker.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report

Research Products

(9 results)

All Other

All Publications

  • [Publications] 一宮亮一・坂本秀一等: "音響信号を利用した液面レベルと傾斜角度の測定" 日本機械学会論文集(C編). 62巻595号. 949-955 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 一宮亮一・坂本秀一等: "音響信号の位相遅れを利用したひずみ円形状の測定" 日本機械学会論文集(C編). 62巻603号. 4250-4256 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Ryoichi Ichimiya Shuichi Sakamoto etc.: "Measurement of Water Level and Slant Angle using Sound Signal" Transaction of JSME. Vol.62, no, 506. 949-955

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Ryoichi Ichimiya Shuichi Sakamoto etc.: "Measurement of Cylinder Configuration using Sound Phase Delay" Transaction of JSME. Vol.62, no, 603. 4250-4256

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 一宮亮一・坂本秀一等: "音響信号を利用した液面レベルと傾斜角度の測定" 日本機械学会論文集 (C編). 62巻595号. 949-955 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 一宮亮一・坂本秀一等: "音響信号の位相遅れを利用したひずみ円形状の測定" 日本機械学会論文集 (C編). 62巻603号. 4250-4256 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 坂本秀一・一宮亮一 等: "音響を利用したシートの枚数検出法(第3報、伝達関数の位相による紙および布の検出)" 日本機械学会論文集(C編). 61巻584号. 1516-1521 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 一宮亮一・坂本秀一 等: "New Method of Measuring Film Thickness by means of Sound Signal" Proc.of Int.Sympo.Industrial Robots.26. 545-549 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 一宮亮一・坂本秀一 等: "音響を利用した液面レベルと傾斜角度の測定" 日本機械学会論文集(C編). 62巻595号(掲載決定). 949-955 (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-03-31   Modified: 2016-04-21  

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