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EVALUATION OF FRICTION-WEAR PROPERTIES OF DLC FILMS PRODUCED BY PLASMA CVD

Research Project

Project/Area Number 07650105
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionTHE UNIVERSITY OF TOKUSHIMA

Principal Investigator

MURAKAMI Ri-ichi  FACULTY OF ENGINEERING,THE UNIVERSITY OF TOKUSHIMA,PROFESSOR, 工学部, 教授 (00112235)

Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥2,400,000 (Direct Cost: ¥2,400,000)
Fiscal Year 1996: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1995: ¥1,500,000 (Direct Cost: ¥1,500,000)
KeywordsPLASMA CVD / ION PLATING / CERAMIC THIN FILMS / DIAMOND LIKE CARBON FILMS / COEFFICIENT OF FRICTION / WEAR BEHAVIOR / ADHESIVE STRENGTH / 摩耗 / ダイヤモンド状炭素膜
Research Abstract

TiN thin films, diamond like carbon films and diamond films were deposited by using plasma CVD and ion plating methods on the stainless steel, mild steel, high speed tool steel and pure titanium. The adhesion, hardness, friction and wear properties of ceramic thin films, DLC films and diamond films were discussed with the deposition condition and nucreation. The obtained results were as follows.
1) Adhesion and friction-wear behavior of laminated TiN films strongly depended on the microstructure of TiN,the laminated number, the order of lamination.
2) The nucreation of diamond on pure titanium was discussed by using plasma CVD.The nucreation of diamond was affected by the geometry of substrate which changed the gas flow. Then, the diamond crystal was grown with diamond like carbon on pure titanium.
3) The diamon like carbon films were deposited on stainless steel with silicon film by using radio frequency plasma CVD.The adhesion of DLC films was strongly effected by the interlayr between DLC film and substrate. The wear behavior of DLC films depended on the adhesion of films.
4) The deamond like carbon films was directly deposited on high speed tool steel using ion plating method. The wear properties of substrate were improved by the coating DLC films. But, the improvement of wear was different with the opposite materials.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (5 results)

All Other

All Publications (5 results)

  • [Publications] R.Murakami: "On Adhesion and Friction-Wear Behavior of Thin Film TiN Laminated Layers Produced by Dynamic Mixing Method" JSME International Journal Ser.C. 39. 332-339 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] R.MURAKAMI: "ON ADHESION AND FRICTION-WEAR BEHAVIOR OF THIN FILM TiN LAMINATED LAYERS PRODUCED BY DYNAMIC MIXING METHOD" JSME INTERNATIONAL JOUNAL SER.C. Vol.39, No.2. 332-339 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] R.Murakami: "On adhesion and friction-wear behavior of thin film TiN Laminatex Layers produced by dynamic mixing method" JSME International Journal Ser.C. Vol.39,No.2. 332-339 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] R.murakami: "Trihological praperties of DLC films Coated Steels" Advanoed Materials Penelapment and Performame. (発表予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 村上理一: "DLC膜の摩擦・摩耗特性と密着強度" 日本機械学会M8M´96. (発表予定). (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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