Research on Micromachine Using Anodic Oxidized Metal Films
Grant-in-Aid for Scientific Research (C)
|Research Institution||Tokai University Junior College|
SATO Yoichi Tokai University Junior College, Professor, 教授 (20215867)
CHOE Il Yong Tokai University Junior College, Associate Professor, 助教授 (20171928)
|Project Fiscal Year
1995 – 1996
Completed(Fiscal Year 1996)
|Budget Amount *help
¥1,900,000 (Direct Cost : ¥1,900,000)
Fiscal Year 1996 : ¥800,000 (Direct Cost : ¥800,000)
Fiscal Year 1995 : ¥1,100,000 (Direct Cost : ¥1,100,000)
|Keywords||Micromachine / Aluminum / Anodic Oxidation / Porous Alumina / Cantilever Beam / マイクロマシン / アルミニウム / 陽極酸化 / 多孔質アルミナ / 片持ち梁 / アルミナ / 多孔質|
Our research results are as follows.
1. Physical properties of anodic oxidized aluminum film (Porous alumina film)
The microstructure of alumina films prepared by the anodic oxidation of the sputtered-Aluminum films investigated using microscopic techniques (SEM,TEM)
-The microstructure of alumina film changed depending on the temperature of substrate during the sputtering of aluminum film. The random structure of porous alumina was formed from the prepared aluminum at high temperature. Pore size of alumina was 20nm.The surface flatness of alnmina film was kept macroscopically.
-Porous alumina film prepared in dilute fulfuric acid was graywish and showed 10 % of ultraviolet absorption.
-The index of refraction of porous almina film sputtered at room temperature was about 1.6, whereas that sputtered at 300 ﾟC was 3.2.
2. Mechanical properties of porous alumina film.
-A cantilever beams were fabricated using porous alumina film.
-The Yong's modulus was determined from the frequency of the beams, E=327GPa.
-The deflection characteristics of the beams was measured. Spring constant of the beam was obtained to be 5.62*10^<-2> N/m.
3. Humidity sensor using porous alumina film.
-A new type of planar humidity sensor was developed using porous alumina film.
-Sensor showed a large current response at high humidity (>50%)
Research Output (6results)