Grant-in-Aid for international Scientific Research
|Allocation Type||Single-year Grants|
|Research Institution||Keio University|
MAKABE Toshiaki Keio University, Dept.of Elec.Eng., Prefessor, 理工学部, 教授 (60095651)
PETROVIC Zoran lj Univ. of Belgrad, Inst. of Phys., Professor, of Belgrade・Institute of Phys, Research Professor
NESS Kevin f James Cook Univ., Phys. Department, Lecturer, ・Physics Department, Lecturer
ROBSON Robert e James Cook Univ., Phys. Department, Reader, ・Physics Department, Reader
NAKANO Nobuhiko Keio University, Dept. of Elec. Eng., Instructor, 理工学部, 助手 (40286638)
PETROVIC Zor Univ. of Belgrade, Institute of Phys., Research P
NESS Kevin F James Cook Univ. Physics Department, Lecturer
ROBSON Rober James Cook Univ. Physics Department, Reader
PETROVIC Zo Institute of Phys. Univ. of Belgrade, Research P
NESS Kevin Physics Department, James Cook Univ., Reader
ROBSON Robe Physics Department, James Cook Univ., Reader
|Project Period (FY)
1996 – 1997
Completed(Fiscal Year 1997)
|Budget Amount *help
¥4,600,000 (Direct Cost : ¥4,600,000)
Fiscal Year 1997 : ¥2,200,000 (Direct Cost : ¥2,200,000)
Fiscal Year 1996 : ¥2,400,000 (Direct Cost : ¥2,400,000)
|Keywords||rf electron transport theory / anomarous electron diffusion in rf field / Boltzmann equation / ICP / Electron-heating in ICP / Electron transport in E×B / Tomographic diagnostics / Plasma modeling / 電子rf異常拡散 / ICPモデリング|
(1). Development of electron transport in an radiofrequency field.
Makabe and Petrovic ; Phys. Rev. E55 5901 (1997)
(2). Development of electron transport in crossed electric and magnetic fields, and analysis in Ar.
Ness and Makabe ; submitted to J. Phys. D.
(3). Theoretical verification of our Relaxation ConTinuum (RCT) model by the Boltzmann equation.
Robson and Makabe ; Annals of Physics 261, 74 (1997)
(4). Development of electron/ion transport in phase space by using RCT/Boltzmann equation
Makabe and Nakano ; J. Vac. Sci. Technol. A16, 294 (1998)
(5). Experimental evidence of the additional heating mechanism of electrons in ICP by using 2D CT.
Makabe and Petrovic ; Phys. Rev. E57, R43 (1998)
(6). Etched particle transport from the substrate exposed to the plasma.
Makabe and Nakano ; submitted