• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Research on New Control Technology for Fabrication of Semiconductor Low Dimensional Structures

Research Project

Project/Area Number 08455013
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

FUJITA Shizuo  Kyoto Univ., Fac.Engineering, Associate Professor, 工学研究科, 助教授 (20135536)

Co-Investigator(Kenkyū-buntansha) KAWAKAMI Yoichi  Kyoto Univ., Fac.Engineering, Associate Professor, 工学研究科, 助教授 (30214604)
FUJITA Shigeo  Kyoto Univ., Fac.Engineering, Professor, 工学研究科, 教授 (30026231)
Project Period (FY) 1996 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥6,900,000 (Direct Cost: ¥6,900,000)
Fiscal Year 1997: ¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 1996: ¥4,200,000 (Direct Cost: ¥4,200,000)
Keywordsphotoassisted growth / growth selectivity for photoirradiation / growth selectivity with photon energy / growth selectivity with temperature / ZnCdSSe / low dimensional structure / structure control / quantum structure
Research Abstract

This research was carried out aimed at developing a new technology for controlling fabrication of semiconductor low dimensional structures utilizing selective growth characteristics with photoassisted processes, which had been explored by our group. The results are summarized as follows ;
1.Growth processes with photoirradiation were investigated by means of mass spectroscopy during the growth, and we found that the growth proceeded with thermal decomposition of alkylzinc, its adsorption to the growth surface, and photocatalytic reaction.
2.The decomposition characteristics of alkylzinc and alkylcadmium were found to be different under photoirradiation, and this result allowed successful growth control of ZnCdSe and ZnCdS multilayr structures with turning on and off the irradiation. The well-defined structure of them was confirmed by x-ray diffraction, photoluminescence, and exciton-related optical properties.
3.The selectivity of growth on different underlying layr was investigated, and the result suggested that the growth was dominated both by thermal energy and photon energy. At a lower temperature the growth did not occur if the irradiation energy was lower than the bandgap, but it did at a higher temperaturu because a thin layr could be formed by the thermal energy which can cause the successive photocatalytic reactions.
The selective growth that the growth occured on ZnSe but not on ZnS was demonstrated with appropriate choose of the substrate temperature and the irradiation energy. This result showed that thelow dimentional structures with in-plane patterns could actually

Report

(3 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • Research Products

    (14 results)

All Other

All Publications (14 results)

  • [Publications] 藤田 静雄: "Effects of photoirradiation energy and of underlying layers on ZnSe grown by photoassisted MOVPE" Journal of Crystal Growth. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 藤田 静雄: "Growth of p-type Zn(S)Se layers by MOVPE" Journal of Crystal Growth. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 藤田 静雄: "Fabrication of ZnSe-based laser diode structures by photoassisted MOVPE" Journal of Crystal Growth. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 藤田 静雄: "Semiconductor and Semimetals 44" Academic Press(分担執筆), 338 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUJITA Shizuo, et al.: "Effects of photoirradiation energy and of underlying layrs on ZnSe growht by phoptoassisted MOVPE" Journal of Crystal Growth. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUJITA Shizuo, et al.: "Growth of p-type Zn(S)Se layrs by MOVPE" Journal of Crystal Growth. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUJITA Shizuo, et al.: "Fabrication of ZnSe-based laser diode structures by photoassisted MOVPE" Journal of Crystal Growth. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUJITA Shizuo, et al.: Semiconductor and Semimetals44. Academic Press, 338 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 藤田 静雄: "Effects of photoirradiation energy and of underlying layers on ZnSe grown by photoassisted MOVPE" Journal of Crystal Growth. (印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] 藤田 静雄: "Growth of p-type Zn(S)Se layers by MOVPE" Journal of Crystal Growth. (印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] 藤田 静雄: "Fabrication of ZnSe-based laser diode structures by photoassisted MOVPE" Journal of Crystal Growth. (印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] 藤田 静雄: "Semiconductor and Semimetals 44(分担執筆)" Academic Press, 338 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 藤田静雄: "Defect states in p-ZnSe grown by MOVPE" Mat.Res.Soc.Proceedings. (発表予定).

    • Related Report
      1996 Annual Research Report
  • [Publications] 藤田静雄: "Semiconductor and Semimetals 44(分担執筆)" Academic Press, 338 (1997)

    • Related Report
      1996 Annual Research Report

URL: 

Published: 1996-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi