• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

見守りモニタリングシステム用ワイヤレス超小型集積多軸MEMS加速度センサの開発

Research Project

Project/Area Number 08F08063
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section外国
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionRitsumeikan University

Principal Investigator

杉山 進  Ritsumeikan University, 立命館グローバル・イノベーション研究機構, 教授

Co-Investigator(Kenkyū-buntansha) YATTOWIA Withanage Ranjith Amarsinghe  総合理工学研究機構, 外国人特別研究員
AMARASINGHE Yattowita Withanage Ranjith  立命館グローバル, イノベーション研究機構, 外国人特別研究員
Project Period (FY) 2008 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 2009: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2008: ¥800,000 (Direct Cost: ¥800,000)
KeywordsMEMS / Piezoresistive / Accelerometer / Wireless / Wearable / Tele-care System / 間隙水圧
Research Abstract

MEMSセンサ技術と情報・通信技術の融合技術の開発を狙いとして、ウエアラブル遠隔医療システムを想定し、4種の超小型MEMS加速度センサの設計、試作とそれらを組み込んだワイヤレス集積MEMSセンサの開発実験を行い、有用性を評価した。
センサの設計:有限要素法構造解析を行い、最適な検出用シリコンビームの形状・構成、ピエゾ抵抗素子の配置を導出し、ブリッジ配線し、三軸の加速度が検出できる構成を決定した。この結果を基に、レイアウトCADを用い、具体的なフォトマスクデーターを作成した。
製作プロセス開発:3μmのデバイス層を有するn型SOIウエハを用いた半導体プロセスを主体としたMEMSプロセス技術で製作した。センサチップの外形寸法は縦500μm×横500μm×高さ550μmとなった。加速度センサの検出素子として線幅500nmのナノスケールピエゾ抵抗素子を紫外線ステッパによるリソグラフィとボロンのイオン注入法によるp型不純物層によって形成した。また、電極配線はAl-Siのスパッタリングによって製膜し厚さ200nm×幅800nmに形成した。検出用シリコンビームとおもりは深堀反応性イオンエッチングによって形成した。センサチップの裏面には150μm厚のガラス基板を接合した。
センサ特性評価:製作した超小型加速度センサのプロセス評価および特性評価にはSEM,FE-SEM,AFM,振動試験装置システムおよび電気計測器などを用いて行った。
ワイヤレス集積MEMS加速度センサの実装・性能評価:ウエアラブル遠隔医療システムを想定し、三軸加速度センサに処理回路、高周波ワイヤレス送受信回路を実装したセンサモジュールを製作した。通信プロトロルはZigbee(IEEE802.15.4-2003)方式を用いPCによってリアルタイム測定処理を行い、人の姿勢や運動などを検出・評価した。

Report

(2 results)
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (13 results)

All 2010 2009 2008

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (9 results)

  • [Journal Article] Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure2010

    • Author(s)
      R.Amarasinghe, D.VDao, S.Sugiyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines Vol.130 No6, SecE(未定(掲載決定))

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring2009

    • Author(s)
      R.Amarasinghe, D.VDao, S.Sugiyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines Vol.129 No5, SecE

      Pages: 142-147

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring2009

    • Author(s)
      R. Amarasinghe, D. VDao, S. Sugiyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines Vol.129 No5,SecE

      Pages: 142-147

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of a 3-DOF Micro Accelerometer with Wireless Readout2008

    • Author(s)
      B. T. Tung, D. V. Dao, R. Amarasinghe, N. Wada, H. Tokunaga, S. Sugiyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines Vol.128,No.5

      Pages: 235-239

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Ultra Miniature Novel Three-Axis Micro Accelerometer2009

    • Author(s)
      R.Amarasinghe, D.V.Dao, VT.Dau, S.Sugiyama
    • Organizer
      IEEE SENSORS 2009, The 8th Annual IEEE Conference on Sensors
    • Place of Presentation
      Christchurch Convention Centre, Christchurch New Zealand
    • Related Report
      2009 Annual Research Report
  • [Presentation] MICROFLUIDIC VALVELESS PUMP ACTUATED BY ELECTROMAGNETIC FORCE2009

    • Author(s)
      V.T.Dau, T.X.Dinh, Q.D.Nguyen, K.Tanaka, R.Amarasinghe, S.Sugiyama
    • Organizer
      IEEE SENSORS 2009, The 8th Annual IEEE Conference on Sensors
    • Place of Presentation
      Christchurch Convention Centre, Christchurch New Zealand
    • Related Report
      2009 Annual Research Report
  • [Presentation] Ultra Miniature μ-Accelerometer for Wearable Physical Activity Monitoring Systems2009

    • Author(s)
      Ranjith Amarashinge, Dzung Vieat Dao, Susumu Sugiyama
    • Organizer
      International Symposium on Micro-Nano Mechatronics and Human Science MHS2009
    • Place of Presentation
      Nagoya University, Nagoya Japan
    • Related Report
      2009 Annual Research Report
  • [Presentation] Development of Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure2009

    • Author(s)
      R.Amarasinghe, D.V.Dao, S.Sugiyama
    • Organizer
      26th Sensor Symposium on Sensors, Micromachines and Applied Systems
    • Place of Presentation
      Tower Hall Funabori, Tokyo Japan
    • Related Report
      2009 Annual Research Report
  • [Presentation] SENSITIVITY ENHANCEMENT OF PIEZORESISTIVE MICRO ACCELERATION SENSORS WITH NANOMETER STRESS CONCENTRATION REGIONS ON SENSING ELEMENTS2009

    • Author(s)
      R.Amarasinghe, D.V.Dao, V.T.Dau, B.T.Tung, S.Sugiyama
    • Organizer
      The 15th International Conference on Solid-State Sensors, Actuators and Microsystems(Transducers 2009)
    • Place of Presentation
      Sheraton Denver Downtown Hotel, Denver USA
    • Related Report
      2009 Annual Research Report
  • [Presentation] A CROSS-JUNCTION CHANNEL VALVELESS-MICROPUMP WITH INTEGRATED HOTWIRES FOR FLUIDIC APPLICATION2009

    • Author(s)
      V.T.Dau, T.Otake, T.X.Dinh, K.Tanaka, R.Amarasinghe, S.Sugiyama
    • Organizer
      The 15th International Conference on Solid-State Sensors, Actuators and Microsystems(Transducers 2009)
    • Place of Presentation
      Sheraton Denver Downtown Hotel, Denver USA
    • Related Report
      2009 Annual Research Report
  • [Presentation] Design and Simulation of Piezoresistive Micro Accelerometers for Wearable Sensing Application2008

    • Author(s)
      R. Amarashinge, K. Inaba, V. T. Dau, D. V. Dao, S. Sugiyama
    • Organizer
      International Symposium on Micro-Nano Mechatronics and Human Science MHS2008
    • Place of Presentation
      Nagoya Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Design and Simulation of Convective Inertial Sensor2008

    • Author(s)
      V. T. Dau, T. X. Dinh, D. V. Dao, R. Amarashinghe, B. T. Tung, S. Susumu
    • Organizer
      International Symposium on Micro-Nano Mechatronics and Human Science MHS2008
    • Place of Presentation
      Nagoya Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring2008

    • Author(s)
      R. Amarasinghe, D. V. Dao, S. Sugiyama
    • Organizer
      25th Sensor Symposium on Sensors, Micromachines and Applied Systems
    • Place of Presentation
      Okinawa, Japan
    • Related Report
      2008 Annual Research Report

URL: 

Published: 2008-04-01   Modified: 2024-03-26  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi