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半導体ディバイスにおけるカソードルミネッセンス効果

Research Project

Project/Area Number 08F08784
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section外国
Research Field Inorganic materials/Physical properties
Research InstitutionKyoto Institute of Technology

Principal Investigator

PEZZOTTI Giuseppe (2009)  Kyoto Institute of Technology, 工芸科学研究科, 教授

PEZZOTT G (2008)  Kyoto Institute of Technology, 工芸科学研究科, 教授

Co-Investigator(Kenkyū-buntansha) PORPORATI A.Alan  京都工芸繊維大学, 工芸科学研究科, 外国人特別研究員
PORPORATI A. Alan  京都工芸繊維大学, 工芸科学研究科, 外国人特別研究員
Project Period (FY) 2008 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 2009: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2008: ¥1,200,000 (Direct Cost: ¥1,200,000)
Keywords半導体材料 / カソードルミネッセンス / 残留応力 / 歪みポテンシャル / 電子プローブ
Research Abstract

半導体材料における応力/歪みに関するサブミクロンスケールの定量的解析を海外の様々な研究グループと協力体制のもと研究を実施した。この研究では、応力/歪み印可に伴い、スペクトルバンドの波数変化が生じる現象に基づく、ピエゾ分光法を利用して応力/歪み解析を高空間分解で行った。
異なるドーピングレベルを持つ既知の系列である、一連のIII-V族半導体(GaAs,AlGaAs等)の試料におけるカソードルミネッセンスによるバンドギャップ発光は、厳密に分析される必要に応え、発光バンドの形態論におけるキャリア濃度の寄与を研究した。発光スペクトルの特性(半値幅、ピーク位置、強度等)からキャリア濃度及び歪みのそれぞれの測定を行うことに成功した。AlGaAs及びInGaP結晶における応力とカソードルミネッセンス発光を繋ぐケース(歪みポテンシャル)を正確に測定し、発光における歪みの影響を及ぼす電子ディバイスを分析する道を開いた。一方、GaN物質に同じような測定する目的でまず吸収の影響を解明する必要があり、カソードルミネッセンス分光にGaNの独特な吸収現象を定める式を発表した。

Report

(2 results)
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (15 results)

All 2010 2009 2008

All Journal Article (12 results) (of which Peer Reviewed: 12 results) Presentation (3 results)

  • [Journal Article] Absorption effect on the cathodoluminescence spectrum of n-GaN2009

    • Author(s)
      A.A.Porporati, G.Pezzotti
    • Journal Title

      Journal of Raman Spectroscopy 41

      Pages: 84-87

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Raman tensor elements for multiferroic BiFeO3 with rhombohedral R3c symmetry2009

    • Author(s)
      A.A.Porporati, K.Tsuji, M.Valant, A.-K.Axelsson, G.Pezzotti
    • Journal Title

      J.Raman Spectrosc DOI : 10.1002

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spatially and tensor resolved Raman analysis for the determination of phonon deformation potentials on the microscopic scale in Si single-crystal2009

    • Author(s)
      T.Miyatake, A.A.Porporati, G.Pezzotti
    • Journal Title

      J.Appl.Phys. 105

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fracture Toughness Analysis of Advanced Ceramic Composite for Hip Prosthesis2009

    • Author(s)
      G.Pezzotti, K.Yamada, A.A.Porporati, M.Kuntz, K.Yamamoto
    • Journal Title

      J.Am.Ceram.Soc. 92(8)

      Pages: 1817-1822

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Challenging nano-scale stress evaluation in glassy and crystalline semiconductor heterostructures2008

    • Author(s)
      G. PEZZOTTI, A. LETO, A. A. PORPORATI, M. DELUCA, G. RIGHINI
    • Journal Title

      Proceeding of SPIE 6996(CD-ROM)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Experimental nanomechanics of electronic materials and devices in the scanning electron microscope2008

    • Author(s)
      G. PEZZOTTI, A. LETO, A. A. PORPORATI, M. DELUCA, A. MATSUTANI, M. C. MUNISSO, W. ZHU
    • Journal Title

      Proceeding of SPIE 6996(CD-ROM)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Stress dependence of paramagnetic point defects in amorphous silicon oxide2008

    • Author(s)
      A. LETO, M. C. MUNISSO, A. A. PORPORATI, W. ZHU, G. PEZZOTTI
    • Journal Title

      J. Phys. Chem. A 112

      Pages: 3927-3934

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Deformation potentials of the direct band gap of Al_<0. 25>Ga_<0. 75>As from controlled microscopic stress fields2008

    • Author(s)
      A. A. PORPORATI, N. FURUK AWA, W. ZHU, G. PEZZOTTI
    • Journal Title

      J. Appl. Phys. 103(9)

      Pages: 96109-96109

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct determination of intrinsic In_xGa_<1-x>P(x=0. 49) banda-gap deformation potentials by cathodoluminescence piezo-spectroscopy2008

    • Author(s)
      A. A. PORPORATI, N. FURUKAWA, W. ZHU, G. PEZZOTTI
    • Journal Title

      Phys. Stat. Sol. (b) 1-4/DOI10

      Pages: 1002-1002

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spatially resolved residual stress assessments of GaN film on sapphire substrate by cathodoluminescence piezospectroscopy2008

    • Author(s)
      G. PEZZOTTI, A. A. PORPORATI, A. LETO, W. ZHU
    • Journal Title

      J. Appl. Phys. 104(2)

      Pages: 23514-23514

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Visualization of microscopic stress fields in silica glass in the scanning electron microscope2008

    • Author(s)
      G. PEZZOTTI, A. LETO, A. A, PORPORATI
    • Journal Title

      J. Ceram. Soc. Jpn. 116(1356)

      Pages: 869-874

    • NAID

      110006862031

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical and structural characterization of Erbium-doped ion-implanted tellurite glasses for active integrated optical devices2008

    • Author(s)
      S. BERNESCHI, M. BRENCI, G. NUNZI CONTI, S. PELLI, G. C. RIGHINI, M. BETTINELLI, A. SPEGHINI, I. BANYASZ, M. FRIED, N. Q. KHANH, F. PASZTI, A. WATTERICH, A. LETO, G. PEZZOTTI, A. A. PORPORATI
    • Journal Title

      Advances in Science and Technology 55

      Pages: 68-73

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Stoichiometry and surface stress analyses in advanced alumina/zirconia composites for hip arthroplasty applications2010

    • Author(s)
      A.A.Porporati, G.Pezzotti, M.C.Munisso, K.Lessnau
    • Organizer
      International Conferences on Modern Materials and Technologies (CIMTEC) 2010, 5th Forum on New Materials
    • Place of Presentation
      Montecatini Terme, Italy
    • Year and Date
      2010-06-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] Challenging nano-scale stress evaluation in glassy and crystalline semi conductor heterostructures2008

    • Author(s)
      G. PEZZOTTI, A. LETO, A. A. PORPORATI, M. DELUCA, G. RIGHINI
    • Organizer
      SPIE Photonics Europe
    • Place of Presentation
      Strasbourg, France
    • Related Report
      2008 Annual Research Report
  • [Presentation] Experimental nanomechanics of electronic materials and devices in the scanning electron microscope2008

    • Author(s)
      G. PEZZOTTI, A. LETO, A. A. PORPORATI, M. DELUCA, A. MATSUTANI, M. C. MUNISSO, W. ZHU
    • Organizer
      SPIE Photonics Europe
    • Place of Presentation
      Strasbourg, France
    • Related Report
      2008 Annual Research Report

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Published: 2008-04-01   Modified: 2024-03-26  

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