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CONTRIBUTION OF FLOATING BONDS TO LIGHT-INDUCED DEGRADATION OF HYDROGENATED AMORPHOUS SILICON

Research Project

Project/Area Number 09650010
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKanazawa University

Principal Investigator

KUMEDA Minoru  Kanazawa Univ., Fac.of Eng., Professor, 工学部, 教授 (30019773)

Co-Investigator(Kenkyū-buntansha) MORIMOTO Akiharu  Kanazawa Univ., Fac.of Eng., Associate Professor, 工学部, 助教授 (60143880)
SHIMIZU Tatsuo  Kanazawa Univ., Fac.of Eng., Professor, 工学部, 教授 (30019715)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 1998: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1997: ¥2,600,000 (Direct Cost: ¥2,600,000)
Keywordshydrogenated amorphous silicon / light-induced degradation / dangling bonds / floating bonds / randomness / electron spin resonance / light-induced electron spin resonance / spin-lattice relaxation time / 欠陥生成
Research Abstract

Relation between the randomeness of amorphous network and the creation of defects was first investigated in an amorphous system of a-Ge_<1-x> C_x : H films which contains constituent atoms with largely different covalent radii, and compared the results with those in a-Ge_<1-x>Si_x, : H films which contains constituent atoms with close covalent radii. It. was found that the addition of C atoms makes the films stricture more random and increase the Ge dangling bonds per Ge atoms.
Next we measured the spin-lattice relaxation time T_1 of Si dangling bonds and its dependence on the light-soaking time in a-Si : H.It was found that T_1 has a fairly good correlation with the randomness of the amorphous network estimated from the Urbach energy. It was also found that T_1's for the broad and narrow component signals of the light-induced ESR decreases by light-soaking, in contrast to that for the dark component. This might be an important clue to judge whether the origin of the broad component of the light-induced ESR comes from the floating bonds.
Finally we tried to explain the defect creation processes by the light-soaking and electron-beam irradiation, using rate equations based on a model in which the floating bonds contribute to create dangling bonds.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (10 results)

All Other

All Publications (10 results)

  • [Publications] M.KUMEDA,A.MASUDA and T.SHIMIZU: "Structural Studies on Hydrogenated Amorphous Germanium-Carbon. Films Prepared by RF Sputtering" Jpn.J.Appl.Phys.37.4. 1754-1759 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.SHIMIZU,K.KATA,M.HITANI and M.KUMEDA: "Change of Spin-Lattice Relaxation Time with Light Soaking for Detects in Hydrogenated Amorphous Silicon" Jpn.J.Appl.Phys.37・10. 5470-5473 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kumeda, A.Masuda and T.Shimizu: "Structural studies on hydrogenatedred amorphous germanium-carbon films prepa by rf sputtering" Jpn.J.Appl.Phys.Vol.34, No.4. 1754-1759 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Shimizu, K.Kata, M.Mitani and M.Kumeda: "Change of spin-lattice relaxation time with light soaking for defects in hydrogenated amorphous silicon" Jpn.J.Appl.Phys.Vol.34, No.4. 1754-1759 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Ryuda, S.Honda, Y.Takehashi, M.Kumeda and T.Shimizu: "The defect creation by electron-beam irradiation in a-Si : H (2) (in Japanese)" Proc.Annual Meet.Hokuriku Branch of Jpn.Soc.Appl.Phys., Toyama, Dec.3-23 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kumeda, T.Ryuda and T.Shimizu: "Rate equation for creation and annihilation of metastable defects in a-Si : H (in Japanese)" Proc.Annual Meet.of Jpn.Soc.Appl.Phys., Noda, March. 29p-YD-2 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.KUMEDA,A.MASUDA and T.SHIMIZU: "Structural Studies on Hydrogenated Amorphous Germanium-Carbon Films Prepared by RF Sputtering" Jpn.J.,Appl.Phys.37・4. 1754-1759 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.SHIMIZU,K.KATA,M.MITANI and M.KUMEDA: "Change of Spin-Lattice Relaxation Time with Light Soaking for Detects in Hydrogenated Amorphous Silicon" Jpn.J.Appl.Phys.37・10. 5470-5473 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 立田哲夫,本田 聡,竹橋由浩,久米田 稔,清水立生: "電子線照射による水素化アモルファス シリコンの欠陥生成(II)" 平成10年度日本物理学会・応用物理学会北陸・信越支部合同講演会 講演予稿集. 43-43 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.KUMEDA, A.MASUDA and T.SHIMIZU: "Structural Studies on Hydrogenated Amorphaus Germanium-Carbon Films Prepared by RF Sputtering" Jpn.J.Appl.Phys.37・4(発表予定). (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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