|Budget Amount *help
¥1,800,000 (Direct Cost : ¥1,800,000)
Fiscal Year 1998 : ¥500,000 (Direct Cost : ¥500,000)
Fiscal Year 1997 : ¥1,300,000 (Direct Cost : ¥1,300,000)
Long time has passed since the method of the gas-phase diamond growth began to be practically used, but the detail of the growth mechanism has not been clarified even now. This is partially because the growth process contains many elementary processes such as the gas dissociation, adsorption, diffusion and etc. which are all influenced each ohter in the complicated manner. However it will be necessary to control the diamond growth in atomic scale, for example, in the case of fabrication of the dimamond semiconductor device. In this study, therefore, it is aimed to investigate the simple carbon-hydrogen reaction process by using selevtive exitation by laser irradiation in the gas-phase diamond growth.
First of all, In order to trace the variation of the partial pressure of source gases in the reactor, Farvitron type mass spectrometer was newly designed. Interested gas species are methanol and its fragments, and the mass resolving power of about 40 is enough for analysis of these gas species. Favitron type spectrometer is very adequate for this purpose because of its simple structure and high sensitivity for lower mass species. More simplified Favitron than conventional type was newly developed. The V-shaped potential for oscilation of ion was employed, and the post deaccelerated-type electron gun for ionzation of gas species was atached normal to the ion path. The electron beam was chopped by modulate the Whenelt baias potentail using radio frequency transformer. As a result, 1.4 mA of electron beam current, which is enough for our purpose, was obtained, and stable beam chopping upto about 100 kHz was confirmed.