エピタキシャル配向制御によるITO薄膜の結晶成長およびドーピング機構の解明

• Project/Area Number: 11750723
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: 無機工業化学
• Research Institution: The University of Tokyo
• Principal Investigator: 亀井 雅之 東大, 生産技術研究所, 講師 (90266916)
• Project Period (FY): 1999
• Project Status: Completed (Fiscal Year 1999)
• Budget Amount: ¥1,200,000 (Direct Cost: ¥1,200,000); Fiscal Year 1999: ¥1,200,000 (Direct Cost: ¥1,200,000)