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近接場チップ増強赤外分光法による半導体デバイスの局所領域応力分布評価に関する研究

Research Project

Project/Area Number 11J09705
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section国内
Research Field Electronic materials/Electric materials
Research InstitutionNational Institute for Materials Science
Research Fellow 小瀬村 大亮  National Institute for Materials Science, 特別研究員(PD)
Project Period (FY) 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2011: ¥800,000 (Direct Cost: ¥800,000)

URL: 

Published: 2011-12-11   Modified: 2016-04-21  

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