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コンビナトリアル手法による強相関磁性薄膜・超格子の高速合成と高速物性評価

Research Project

Project/Area Number 12046233
Research Category

Grant-in-Aid for Scientific Research on Priority Areas (A)

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionTohoku University (2001)
Tokyo Institute of Technology (2000)

Principal Investigator

川崎 雅司  東北大学, 金属材料研究所, 教授 (90211862)

Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2001: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 2000: ¥1,900,000 (Direct Cost: ¥1,900,000)
Keywordsコンビナトリアル手法 / 薄膜・超格子 / 強相関 / 磁性 / コンポジションスプレッド薄膜 / 酸化物 / 高速合成 / 高速評価 / 磁性薄膜 / レーザーMBE / マンガン酸化物 / レーザー基盤加熱 / 一括X線回折装置 / コンポジションスプレッド / 走査型スクイッド顕微鏡
Research Abstract

本研究では、酸化物薄膜技術をフルに生かしたコンビナトリアルレーザーMBE法を用いて高速にかつ系統的に磁性薄膜および超格子を作製してその構造評価や物性評価を行うことにより、遷移金属酸化物の薄膜・物性研究に対するガイドラインを提案し、新規物性を探索することを目的としている。
薄膜作製に関して、(1)基板温度傾斜法(薄膜作製の最適化や成長モードの温度制御を高速に行う)、(2)コンポジションスプレッド薄膜作製(単一基板上に組成を連続的に変化させた化合物薄膜を作製)、(3)パラレル超格子作製(単一基板上に周期が異なる超格子群を作製)、といったコンビナトリアル手法の要素技術を開発し、Mn酸化物、Ti酸化物、Cu酸化物といった強相関材料に適用した。特に、巨大な第三次非線形光学効果を示すSr_2CuO_3薄膜とCa_2CuO_3薄膜のコンポジションスプレッド薄膜の作製に対しては、基板温度傾斜法を用いて、各組成での最適温度に合うように薄膜作製温度に傾斜をつけ、さらに、格子定数の異なる全ての組成域においてCu-O鎖が薄膜面内に配列しているエピタキシャル配向が実現するように、格子定数を連続的に変化させたバッファー層を開発し、実際に全組成域でのエピタキシャル成長に成功した。その結果、全組成領域で巨大な非線形光学効果を発現させることに成功した。
物性評価法に関しては、磁性評価には磁場感度が非常に高く空間分解能も高い走査型スクイッド顕微鏡を適用し、非線形光学特性評価には第三次非線形光学効果を局所的に評価できる非線形光学効果テスターを理研と共同で開発し、上述のCu酸化物のコンポジションスプレッド薄膜の非線形光学効果の組成依存性を高速評価することに成功した。また、一括XRD装置の開発により、結晶構造評価を高速に行い、電気特性評価では、各試料の電気的絶縁をとるためのリソグラフィー技術や高速ボンディング技術を確立して、試料の測定速度を高速化した。

Report

(2 results)
  • 2001 Annual Research Report
  • 2000 Annual Research Report

Research Products

(38 results)

All Other

All Publications

  • [Publications] M.Ohtani, T.Fukumura, M.Kawasaki, K.Omote, T.Kikuchi, J.Harada, H.Koinuma: "Concurrent evaluation of strain in heteroepitaxial thin films with continuous lattice mismatch spread"Appl.Phys.Lett.. (in press).

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Okimoto, Y.Ogimoto, M Matsubara, Y.Tomioka, T.Kageyama, T.Hasegawa, H.Koinuma, M.Kawasaki, Y.Tokura: "Direct observation of photoinduced magnetization in a relaxor ferromagnet"Appl.Phys.Lett.. 80. 1031-1032 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Yamada, M.Kawasaki, Y.Tokura: "Epitaxial Growth and Valence Control of Strained Perovskite SrFeO_3 Films"Appl.Phys.Lett.. 80. 622-624 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Shinomori, M.Kawasaki, Y.Tokura: "Orientation-controlled epitaxy and anisotropic properties of La_<2-X>Sr_xNiO_4 with 0.5<x< 1.5 covering the doping-induced insulator-metal transition"Appl.Phys.Lett.. 80. 574-576 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Koida, D.Komiyama, H.Koinuma, M.Ohtani, M.Lippmaa, M.Kawasaki: "Temperature-Gradient Epitaxy Under in situ Growth Mode Diagnostics by Scanning Reflection High-Energy Electron Diffraction"Appl.Phys.Lett.. 80. 565-567 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Shinomori, Y.Okimoto, M.Kawasaki, Y.Tokura: "Insulator-Metal Transition in La_<2-X>Sr_XNiO_4"J.Phys.Soc.Jpn.. 71. 705-708 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Okimoto, Y.Konishi, M.Izuini, T.Manako, M.Kawasaki, Y.Tokura: "Orbital-driven Variation of Electronic Structures in Tetragonal La_<1/2>Sr_<1/2>MnO_3 as Investigated by Optical Spectroscopy"J.Phys.Soc.Jpn.. 71. 613-617 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Nakagawa, M.Lippmaa, K.Shibuya, H.Koinuma, M.Kawasaki: "Magnetic and Transport Properties of Mn-Based Fractional-layer Oxide Superlattices"Jpn.J.Appl.Phys.. Pt-2Vol.41. L302-L304 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Kishida, M.Ono, K.Miura, H.Okamoto, M.Izumi, T.Manako, M.Kawasaki, Y.Taguchi, Y.Tokura, T.Tohyama, K.Tsutsui, S.Maekawa: "Large Third-Order Optical Nonlinearity of Cu-O Chains Investigated by Third-Harmonic Generation Spectroscopy"Phys.Rev.Lett.. 87. 177401 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Ohtani, T.Fukumura, M.Kawasaki, K.Omote, T.Kikuchi, J.Harada, A.Ohtomo, M.Lippmaa, T.Ohnishi, D.Komiyama, R.Takahashi, Y Matsumoto, H.Koinuma: "Concurrent x-ray diffractometer for high throughput structural diagnosis of epitaxial thin films"Appl.Phys.Lett.. 79. 3594-3596 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Manako, Y.Okimoto, M.Izumi, S.Shinomori, M.Kawasaki, H.Kishida, H.Okamoto, T.Fukumura, M.Ohtani, Y.Tokura: "Orientation-controlled epitaxy of A_2CuO_3 (A : Sr, Ca) films with large optical nonlinearity"Appl.Phys.Lett.. 79. 1754-1756 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.S.Takahashi, M.Kawasaki, Y.Tokura: "Interface ferromagnetism in oxide superlattices of CaMnO_3/CaRuO_3"Appl.Phys.Lett.. 79. 1324-1326 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Ohnishi, D.Komiyama, T.Koida, S.Ohashi, C.Stauter, H.Koinuma, A.Ohtomo, M.Lippmaa, N.Nakagawa, M.Kawasaki, T.Kikuchi, K.Omote: "Parallel integration and characterization of nanoscaled epitaxial lattices by concurrent molecular layer epitaxy and diffractometry"Appl.Phys.Lett.. 79. 536-538 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Izurni, Y.Ogimoto, Y.Okimoto, T.Manako, P.Ahmet, K.Nakajima, T.Chikyow, M.Kawasaki, Y.Tokura: "Insulator-metal transition induced by interlayer coupling in La_<0.6>Sr_<0.4>MnO_3/SrTiO_3 superlattices"Phys.Rev.B. 64. 064429 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.K.Yoo, F.Duewer, T.Fukumura, H.Yang, D.Yi, S.Liu, H.Chang, T.Hasegawa, M.Kawasaki, H.Koinuma, X.-D.Xiang: "Strong correlation between high -temperature electronic and low -temperature magnetic ordering in La_<1-x>Ca_xMnO_3 continuous phase diagram"Phys.Rev.B. 63. 224421 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Kageyama, T.Hasegawa, T.Koida, M.Ohtani, T.Fukumura, M.Kawasaki, H.Koinuma: "Local magnetic measurements of composition-spread manganese oxide thin films with a scanning SQUID microscope"Appl. Phys. A. 72. S273-S276 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Fukumura, M.Ohtani, J.Nishimura, T.Kageyama, T.Koida, M.Lippmaa, M.Kawasaki, T.Hasegawa, H.Koinuma: "Temperature-gradient and composition-spread deposition of epitaxial oxide films and high throughput characterization"Proc.SPIE. 4281. 17-26 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 川崎雅司, 牧野哲征, 瀬川勇三郎, 鯉沼秀臣: "コンビナトリアル酸化亜鉛超格子研究"応用物理. 70. 523-529 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 福村知昭, 川崎雅司, 鯉沼秀臣: "透明希薄磁性酸化物:コンビナトリアル技術による探索"応用磁気学会誌. 5. 1573-1579 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 川崎雅司(分担執筆): "酸化物エレクトロニクス"培風館. 64 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Matsumoto: "Room-Temperature Ferromagnetism in Transparent Transition Metal-Doped Titanium Dioxide"Science. 291. 854-856 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] X.G.Qui: "Josephson plasma observed in underdoped (110) YBa_2Cu_3O_<7-δ> films"Appl.Phys.Lett.. 78. 506-508 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Sarin Kumar A.K.: "Fabrication of carrier controlled Y_<1-X>Ca_XBa_2Cu_3O_<7-δ> films on SrTiO_3(100) substrate by Pulsed Laser Deposition"Physica C. 349. 83-88 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 川崎雅司: "酸化物のコンビナトリアルエピタキシーと新機能"機能材料. 21[1]. 57-62 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Lippmaa: "Growth Mode Mapping of SrTiO_3 Epitaxy"Appl.Phys.Lett.. 76. 2439-2441 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Fukumura: "Rapid construction of phase diagram for doped Mott insulators with a composition-spread approach"Appl.Phys.Lett.. 77. 3426-3428 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] R.M.V.Rao: "Quantum paraelectric La_<1/2>Na_<1/2>TiO_3 films as capacitor dielectrics for temperature and electric field insensitive applications"J.Appl.Phys.. 88. 3756-3758 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Izumi: "La_<1-x>Sr_xMnO_3 superlattices composed of ferromagnetic x=0.4 and antiferromagnetic x=0.55.layers"Phys.Rev.B. 61. 12187-12195 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Lippmaa: "Growth dynamics of oxide thin films at temperature above 1000℃"Physica C. 335. 196-200 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Koinuma: "Concept and Development of Combinatorial Laser MBE for Oxide Electronics"Physica C. 335. 245-250 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Z.W.Jin: "Combinatorial laser MBE synthesis of 3d ion doped epitaxial ZnO thin films"J.Cryst.Growth. 214/215. 55-58 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Lippmaa: "Dielectric properties of Homoepitaxial SrTiO_3 Thin Films Grown in the Step-Flow Mode"J.Electroceramics. 4. 210-212 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] B.Rodion: "Combinatorial computational chemistry approach to the design of metal oxide electronics materials"SPIE Proc.. 3941. 2-10 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Matsumoto: "Combinatorial synthesis and high throughput evaluation of doped TiO_2 thin films for the development of photocatalysts"SPIE Proc.. 3941. 19-27 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Omote: "A convergent-beam parallel detection x-ray diffraction system for characterizing combinatorial epitaxial thin films"SPIE Proc.. 3941. 84-91 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 和泉真: "界面のスピンが新しいデバイスを生み出す"パリティ. 15[3]. 26-29 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 川崎雅司: "完全エピタキシーを目指した金属酸化物基板の原子レベル表面制御"表面化学. 21. 702-709 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 川崎雅司: "酸化物の次元制御エピテキシーと新機能デバイス"日本結晶成長学会誌. 27. 203-214 (2000)

    • Related Report
      2000 Annual Research Report

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Published: 2000-03-31   Modified: 2018-03-28  

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