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微小機械技術に基づく光プローブ法の開発と物理的極限加工技術への応用

Research Project

Project/Area Number 12131207
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionOsaka University

Principal Investigator

菅原 康弘  大阪大学, 大学院・工学研究科, 教授 (40206404)

Co-Investigator(Kenkyū-buntansha) 西 竜治  大阪大学, 大学院・工学研究科, 助手 (40243183)
Project Period (FY) 2000 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥20,600,000 (Direct Cost: ¥20,600,000)
Fiscal Year 2003: ¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 2002: ¥7,900,000 (Direct Cost: ¥7,900,000)
Fiscal Year 2001: ¥10,000,000 (Direct Cost: ¥10,000,000)
Keywords近接場 / エバネセント場 / )原子間力 / 力 / 半導体探針 / 光学顕微鏡 / 散乱光 / 表面ポテンシャル / 原子間力
Research Abstract

本年度は、主に、新たに開発に成功した装置の空間分解能を、さらに一桁向上させ、原子分解能観察を実現することをめざした。また、原子レベルでの物理的極限加工の評価と機構の解明を行った。具体的な研究課題は下記のようになっている。
(1)原子レベルで平坦な自己組織化分子膜の作製
物質表面の構造、局在する近接場光の強度分布を原子・分子スケールで観察できることを実証するため、標準試料として原子的に平坦な金(Au)表面上に吸着したアルカンチオールの自己組織化分子を取り上げ、その作製方法を確立した。
(2)高分解能な近接場光測定の実現
上記(1)で作製した標準試料を用いて、物質表面の構造、局在する近接場光の強度分布を原子・分子スケールで観察することをめざした。6Åいう世界最高の水平空間分解能を実現した。将来的には、物質表面の原子・分子レベルの構造と光学的性質を完全分離して同時測定することができるようになると期待される。
(3)物理的極限加工の評価と機構の解明、新規加工法の探索
ナノメートル領域での物理的極限加工の評価と機構の解明、新規加工法の探索を行った。具体的には、非接触原子間力顕微鏡を用いて、原子種を同定しながら力学的に原子を操作できるかどうかを検討した。その結果、非接触原子間力顕微鏡を用いて、力学的に表面の原子を引き抜いたり、付与させたりすることが可能であることが分かった。しかし、現在のところ、様々な測定パラメーター依存性を系統的に調べていないため、原子操作の機構は不明である。今後の研究に期待したい。

Report

(4 results)
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (68 results)

All Other

All Publications (68 results)

  • [Publications] R.Nishi et al.: "Atom Selective Imaging by NC-AFM : Case of Oxygen Adsorbed on a Si(111)7×7 Surface"Appl.Surf.Sci.. 210・1-2. 90-92 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Okamoto et al.: "KPFM Imaging of Si(111)5√<3>×5√<3>-Sb Surface for Atom Distinction Using NC-AFM"Appl.Surf.Sci.. 210・1-2. 128-133 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] N.Oyabu et al.: "Mechanical Vertical Manipulation of Selected Single Atoms by Soft Nanoindentation Using Near Contact Atomic Force Microscopy"Phys.Rev.Lett.. 90・17. 176102-1-176102-4 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Okamoto et al.: "The Imaging Mechanism of the Atomic-Scale Kelvin Probe Force Microscopy and Its Application to Atomic-Scale Force Mapping"Jpn.J.Appl.Phys.. 41・11. 7163-7168 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Morita, Y.Sugawara: "Noncontact Atomic Force Microscopy on Semiconductor Surfaces"Surface and Interface Analysis. (In press). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 菅原康弘: "原子間力近接場光学顕微鏡によるニア原子分解能の達成"精密工学会誌. 69・2. 154-157 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 菅原康弘: "STMおよびAFM、原理と応用"電子顕微鏡. 38・1. 13-18 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 森田清三他: "原子間力顕微鏡を使った電荷の原子レベル観察"静電気学会誌. 27・2. 64-68 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 菅原康弘, 清野宜秀: "原子間力近接場光学顕微鏡によるニア原子分解能の達成"応用物理. 72・8. 1020-1026 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 菅原康弘: "イオン工学ハンドブック"イオン工学研究所. 4 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 菅原康弘: "ナノテクノロジーハンドブック"オーム社. 4 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Sugawara, S.Morita: "Springer Handbook of Nanotechnology"Springer. 7 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Morita, Y.Sugawara: "Mapping and Control of Atomic Force on Si(111)√3×√3-Ag Surface Using Noncontact Atomic Force Microscope"Ultramicroscopy. 91. 89-96 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Araragi et al.: "Atomic resolution imaging of Si(100)1x1:2H dihydride surface with noncontact atomic force microscopy(NC-AFM)"Appl.Surf.Sci.. 188・3-4. 272-278 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Uozumi et al.: "Observation of Si(100) surface with noncontact atomic force microscope at 5 K"Appl.Surf.Sci.. 188・3-4. 279-284 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Sugawara et al.: "Atom manipulation and image artifact on Si(111)7x7 surface using a low temperature noncontact atomic force microscope"Appl.Surf.Sci.. 188・3-4. 285-291 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Okamoto et al.: "The elimination of the 'artifact' in the electrostatic force measurement using a novel noncontact atomic force microscope/electrostatic force microscope"Appl.Surf.Sci.. 188・3-4. 381-385 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Morita, Y.Sugawara: "Atomically Resolved Imaging of Si(100)2x1, 2x1:H and 1x1:2H Surfaces with Noncontact Atomic Force Microscopy"Jpn.J.Appl.Phys. 41・7B. 4857-4862 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Okamoto et al.: "KPFM Imaging of Si(111)5√3x5√3-Sb Surface for Atom Distinction Using NC-AFM"Appl. Surf. Sci. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] R.Nishi et al.: "Atom Selective Imaging by NGAFM : Case of Oxygen Adsorbed on a Si(111)7x7 Surface"Appl. Surf. Sci. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 森田清三, 菅原康弘: "非接触原子間力顕微鏡で半導体の何がどこまで見えるか?"表面科学. 23・3. 132-140 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 森田清三, 菅原康弘: "走査プローブ顕微鏡による複合極限場での原子イメージング"まてりあ. 41・9. 604-609 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 森田清三, 菅原康弘: "走査プローブ顕微鏡によるナノ加工と評価"電子情報通信学会誌. 85・11. 858-865 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 森田清三, 菅原康弘: "非接触原子間力顕微鏡による静電気力観察"まてりあ. 41・12. 840-841 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 森田清三: "原子間力顕微鏡を使った電荷の原子レベル観察"静電気学会誌. 27・2(印刷中). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Sugawara: "Noncontact Atomic Force Microscopy"Springer. 8 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 菅原康弘: "ナノテクノロジーのための走査プローブ顕微鏡"丸善. 25 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Sugawara: "Nano-Optics"Springer. 5 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Sugawara et al.: "Noncontact AFM imaging on a Si(111)2x1-Sb surface with occupied lonepair orbitals"Appl.Phys.A. Vol.72. S11-S14 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] R.Nishi et al.: "A noncontact atomic force microscope in air using a quartz resonator and the FM detection method"Appl.Phys.A. Vol.72. S93-S95 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Suehira et al.: "Artifact and Fact of Si(111)7x7 Surface Images Observed with a Low Temperature Noncontact Atomic Force Microscope (LTNC-AFM)"Jpn.J.Appl.Phys.. 40・3B. L292-L294 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Ashino et al.: "ATOMIC RESOLUTION NONCONTACT ATOMIC FORCE AND SCANNING TUNNELING MICROSCOPY OF TiO2[110]-[1x1] AND -[1x2]: SIMULTANEOUS IMAGING OF SURFACE STRUCTURE AND ELECTRONIC STATES"Phys.Rev.Lett.. 86・19. 4334-4337 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Suehira et al.: "Low-temperature noncontact atomic-force microscope with quick sample and cantilever exchange mechanism"Review of Scientific Instruments. 72・7. 2971-2976 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Morita, Y.Sugawara: "Microscopic contact charging and dissipation"Thin Solid Films. Vol.393. 310-318 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Fujisawa et al.: "Load dependence of sticking-domain distribution in two-dimensional atomic scale friction of NaF(100) surface"Tribology Letters. No.9. 69-72 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Komiyama et al.: "Molecular orbital interpretation of thymine/graphite nc-AFM images"SURFACE AND INTERFACE ANALYSIS. Vo.32. 53-56 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Morita, Y.Sugawara: "Mapping and Control of Atomic Force on Si(111)√<3>×√<3>-Ag Surface Using Noncontact Atomic Force Microscope"Ultramicroscopy. (in press). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Araragi et al.: "Atomic resolution imaging of Si(100)1x1:2H dihydride surface with noncontact atomic force microscopy (NC-AFM)"Appl.Surf.Sci.. (in press). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Uozumi et al.: "Observation of Si(100) surface with noncontact atomic force microscope at 5 K"Appl.Surf.Sci.. (in press). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Sugawara et al.: "Atom manipulation and image artifact on Si(111)7×7 surface using a low temperature noncontact atomic force microscope"Appl.Surf.Sci.. (in press). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Okamoto et al.: "The elimination of the 'artifact' in the electrostatic force measurement using a novel noncontact atomic force microscope/electrostatic force microscope"Appl.Surf.Sci.. (in press). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 森田清三, 菅原康弘: "21世紀の原子分子ナノテクノロジー"大阪大学低温センターだより. No.113. 5-9 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 森田清三, 菅原康弘: "走査プローブ顕微鏡によるナノテクノロジー"応用物理. 70・10. 1155-1164 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 菅原康弘, 森田清三: "ノーベル賞と分光学 IV.走査型トンネル顕微鏡と原子間力顕微鏡"分光研究. 50・3. 284-293 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 森田清三: "21世紀のナノテクノロジーへの期待"応用物理学会薄膜・表面物理分科会NEWS LETTER. No.113. 1-2 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 森田清三, 菅原康弘: "非接触原子間力顕微鏡で半導体の何がどこまで見えるか?"表面科学. 23・3(印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 森田清三: "ナノ構造を観察する-走査型プローブ顕微鏡"日本の科学者. 37・2. 60-67 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Ohtsu(Editor): "Optical and Electronic Process of Nano-Matters"KTK Scientific Publishers/Tokyo. 334(42) (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Yokoyama et.al.: "Optical beam deflection noncontact atomic force microscope with three-dimensional beam adjustment mechanism"Rev.Sci.Instrum.. 71・1. 128-132 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Yokoyama et.al.: "Atomic Resolution Imaging on Si(100)2x1 and Si(100)2x1 : H Surfaces with Noncontact Atomic Force Microscopy"Jpn.J.Appl.Phys.. 39・2A. L113-L115 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Uchihashi et.al.: "Identification of B-Form DNA in an Ultrahigh Vacuum by Noncontact-Mode Atomic Force Microscopy"Langmuir. 16・3. 1349-1353 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Morita et.al.: "Defects and their charge imaging on semiconductor surfaces by noncontact atomic force microscopy and spectroscopy"Journal of Crystal Growth. Vol.210. 408-415 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Morita et.al.: "Correlation of frequency shift discontinuity to atomic positions on a Si(111)7x7 surface by noncontact atomic force microscopy"Nanotechnology. Vol.11. 120-123 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Sugawara et.al.: "Noncontact AFM imaging on Al-adsorbed Si(111) surface with an empty orbital"Appl.Surf.Sci.. 157・4. 239-243 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Uchihashi et.al.: "High-resolution imaging of organic monolayers using noncontact AFM"Appl.Surf.Sci.. 157・4. 244-250 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] N.Suehira et.al.: "Development of low temperature ultrahigh vacuum noncontact atomic force microscope with PZT cantilever"Appl.Surf.Sci.. 157・4. 343-348 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] R.Nishi et.al.: "Phase change detection of attractive force gradient by using a quartz resonator in noncontact atomic force microscopy"Appl.Surf.Sci.. 157・4. 332-336 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Ashino et.al.: "Atomic-scale structure on a non-stoichiometric TiO_2(110) surface studied by noncontact AFM"Appl.Surf.Sci.. 157・4. 212-217 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Ashino et.al.: "Structures of an Oxygen-Deficient TiO_2(110) Surface Studied by Noncontact Atomic Force Microscopy"Jpn.J.Appl.Phys.. 39・6B. 3765-3768 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Uchihashi et.al.: "Carbon-Nanotube Tip for Highly-Reproducible Imaging of Deoxyribonucleic Acid Helical Turns by Noncontact Atomic Force Microscopy"Jpn.J.Appl.Phys.. 39・8B. L887-L889 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Ashino et.al.: "STM and atomic-resolution noncontact AFM of an oxygen-deficient TiO_2(110) surface"Phys.Rev.B. 61・20. 13955-13959 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Sugawara et.al.: "Noncontact AFM imaging on a Si(111)2x1-Sb surface with occupied lone-pair orbitals"Appl.Phys.A. Vol.71(In press). (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] R.Nishi et.al.: "A noncontact atomic force microscope in air using a quartz resonator and the FM detection method"Appl.Phys.A. Vol.71(In press). (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Morita and Y.Sugawara: "Microscopic Contact Charging and Dissipation"Thin Solid Films. (In press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 森田清三,菅原康弘: "ナノ力学に基づいた原子分子技術"生産と技術. 52・2. 9-14 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 森田清三,菅原康弘: "原子間力顕微鏡による帯電素過程の研究"静電気学会誌. 24・1. 8-14 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 森田清三,菅原康弘: "非接触原子間力顕微鏡と原子分子のナノ力学"学術月報. 53・12. 1319-1324 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 森田清三 編著 他: "走査型プローブ顕微鏡-基礎と未来予測-"丸善株式会社. 181 (2000)

    • Related Report
      2000 Annual Research Report

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Published: 2001-04-01   Modified: 2018-03-28  

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