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強誘電体薄膜の物性制御と次世代メモリデバイスへの応用

Research Project

Project/Area Number 12134204
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionOsaka University

Principal Investigator

奥山 雅則  大阪大学, 基礎工学研究科, 教授 (60029569)

Co-Investigator(Kenkyū-buntansha) 石橋 善弘  愛知淑徳大学, ビジネス学部, 教授 (00023052)
藤村 紀文  大阪府立大学, 工学研究科, 教授 (50199361)
長 康雄  東北大学, 電気通信研究所, 教授 (40179966)
安田 直彦  岐阜大学, 工学部, 教授 (90021625)
清水 勝  兵庫県立大学, 工学研究科, 助教授 (30154305)
Project Period (FY) 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥17,400,000 (Direct Cost: ¥17,400,000)
Fiscal Year 2004: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 2003: ¥5,600,000 (Direct Cost: ¥5,600,000)
Fiscal Year 2002: ¥5,100,000 (Direct Cost: ¥5,100,000)
Fiscal Year 2001: ¥5,200,000 (Direct Cost: ¥5,200,000)
Keywords希土類ドープ / MIFS-FET / リラクサ強誘電体 / ドメイン構造観察 / ケミカル・プロセッシング / MFIS(MFS)構造 / 走査型非線形誘電率顕微鏡 / 強誘電体・半導体接合 / MFIS-FET / ケミカルプロセッシング / マルテンサイト型合金 / 低温プロセス / 2次相転移点 / PZT / 低温プロセッシング / モルフォトロピック相境界 / 濃度相境界 / 化学溶液プロセス / 新強誘電体探索 / 成長初期過程 / ペロブスカイト酸化物トラシジスタ
Research Abstract

今日、高度化されまた今後も拡大化の続く情報化社会を支えるのがまさにコンピュータと通信機器であるが、特に記憶を司るメモリデバイスが非常に重要である。この半導体メモリの中で電源を切っても忘れない不揮発性メモリとして強誘電体メモリ(FeRAM)があり、その研究開発が進められている。しかし、強誘電体薄膜を信頼性の高いメモリデバイスに応用するには、多くの問題点が存在する。高集積化に伴う超微細化によって数十nmの厚さの強誘電体薄膜における分極反転の反復による強誘電性の劣化、分極履歴のシフト、分極の時間的劣化、絶縁性の劣化などである。これらの問題点は、微細な強誘電体薄膜の特性評価をし、薄膜作製法の改良と最適化で克服されようと多くの努力が払われているが、表面的改良ではなく、強誘電体ならびにその薄膜に起こる現象を根本的に理解し、種々の物性や素子特性を根本的に解明、制御する必要がある。
本領域研究では薄膜での強誘電性の基本的要因を明確にし、これらを薄膜特有の現象や物性と絡み合わせながら、実験的に起こる様々な問題点を解決し、次世代強誘電体メモリデバイスの実用化をはかるべく、基礎的な性質を検討してきた。そこで、これらの成果を取りまとめ、平成12年度から15年度までの本領域の研究成果を広く公開するために、以下のような公開シンポジウムを開催した。さらに、成果を取りまとめ、英文単行本にまとめSpringerより出版した。
公開シンポジウム
「強誘電体薄膜の物性制御と次世代メモリデバイスへの応用」成果報告会(公開)
日時 平成16年12月10、11日
場所 大阪大学中之島センター
出席者 専門家など30名
講演件数 14および研究評価
英文単行本
題目 「Ferroelectric Thin Films-Basic Properties and Device Physics for Memory Applications-」
総ページ数 258

Report

(5 results)
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (64 results)

All 2005 2004 Other

All Journal Article (13 results) Book (1 results) Publications (50 results)

  • [Journal Article] Conductivity of Lattice-Mismatched Epitaxial BaTiO_3 Films Exhibiting Abrupt Step-like Temperature Dependence2005

    • Author(s)
      S.Miyauchi, Y.Watanabe
    • Journal Title

      J.Korean Phys.Soc. 46・1

      Pages: 250-253

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Preparation of (Pb, Sr)TiO_3 Films by Sol-Gel Technique2005

    • Author(s)
      T.Fujii, M.Adachi
    • Journal Title

      Jpn.J.Appl.Phys. 44・1B

      Pages: 692-694

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Hydrothermally Deposited PbTiO3 Epitaxial Thin Film2005

    • Author(s)
      T.Morita, Y.Cho
    • Journal Title

      Journal of Korean Physical Society 46・1

      Pages: 10-14

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Ferroelectricity and Local Currents in Epitaxial 5- and 9nm-Thick Pb(Zr,Ti)O_3 Ultrathin Films by Scanning Probe Microscopy2005

    • Author(s)
      H.Fujisawa, M.Shimizu, H.Niu, H.Nonomura, K.Honda
    • Journal Title

      Appl.Phys.Lett. 85・1

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Domain Wall Structure in Pb(Zn_<1/3>Nb_<2/3>)O_3-PbTiO_3 Mixed Crystals by Atomic Force2004

    • Author(s)
      M.Iwata, K.Katsuraya, S.Tachizaki, J.Hlinka, I.Suzuki, M.Maeda.
    • Journal Title

      Japanese Journal of Applied Physics 43・9B

      Pages: 6812-6820

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication and Properties of Ge-Doped (Bi, Nd)_4Ti_3O_<12> Thin Films by Chemical Solution Deposition2004

    • Author(s)
      W.Sakamoto, Y.Mizutani, N.Iizawa, T.Yogo, T.Hayashi, S.Hirano
    • Journal Title

      Japanese Journal of Applied Physics 43・9B

      Pages: 6599-6603

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Crystal Growth of Relaxor Ferroelectric Solid Solution Single Crystals near a Morphotropic Phase Boundary with High Curie Temperature and Some Properties2004

    • Author(s)
      N.Yasuda, Y.Itoh, H.Ohwa, Y.Yamashita, M.Iwata, Y.Ishibashi
    • Journal Title

      Transactions of the Materials Research Society of Japan 29・4

      Pages: 1359-1364

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Spontaneous polarization change with Zr/(Zr+Ti) ratios in perfectly polar-axis-orientated epitaxial tetragonal Pb(Zr,Ti)O_3 films2004

    • Author(s)
      H.Morioka, S.Yokoyama, T.Oikawa, H.Funakubo, K.Saito
    • Journal Title

      Appl.Phys.Lett. 85・16

      Pages: 3516-3518

    • Related Report
      2004 Annual Research Report
  • [Journal Article] On the Theoretical Models of Ferroelectric Thin Films and Graded Ferroelectrics2004

    • Author(s)
      Y.Ishibashi
    • Journal Title

      Transactions of the Materials Research Society of Japan 29・4

      Pages: 1055-1058

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Analysis of nitrogen plasma generated by a pulsed plasma system near atmospheric pressure2004

    • Author(s)
      Hayakawa R., Yoshimura T., Ashida A., Fujimura N., Kitahata H., Yuasa M.
    • Journal Title

      Journal of Applied Physics 96

      Pages: 6094-6096

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Transparent magnetic semiconductors based on ZnO2004

    • Author(s)
      H.Saeki, H.Matsui, T.Kawai, H.Tabata
    • Journal Title

      Journal of Physics : Condensed Matter 16・48

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Structural and multiferroic properties of BiFeO_3 thin films at room temperature2004

    • Author(s)
      Yun Kwi Young, M.Noda, M.Okuyama, H.Saeki, H.Tabata, K.Saito
    • Journal Title

      Journal of Applied Physics 96・6

      Pages: 3399-3403

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Enhancement of piezoelectric properties of low-temperature-fabricated Pb(Mg_<1/2>Nb_<2/3>)O_3-PbZrO_3-PbTiO_3 ceramics with LiBiO_3 sintering aid by Host-annealin2004

    • Author(s)
      T.Hayashi, T.Hasegawa, Y.Akiyama
    • Journal Title

      Japanese Journal of Applied Physics 43・9B

      Pages: 6683-6688

    • Related Report
      2004 Annual Research Report
  • [Book] Ferroelectric Thin Films --Basic Properties and Device Physics for Memory Applications--2005

    • Author(s)
      M.Okuyama, Y.Ishibashi (Eds.)
    • Total Pages
      258
    • Publisher
      Springer
    • Related Report
      2004 Annual Research Report
  • [Publications] Y.Ishibashi: "Phenomenology of Elastic Properties in Martensite Alloys"J.Phys.Soc.. 72. 1675-2682 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Iwata: "Domain observation in PZN-PT mixed crystals by scanning probe microscope"Jpn.J.Appl.Phys.. 42. 5403-5406 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Cho: "Terabit inch^<-2> ferroelectric data storage using scanning nonlinear dielectric microscopy nanodomain engineering system"Nanotechnology. 14. 637-642 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Hayashi: "Processing and Properties of Rare Earth Ion-Doped Bismuth Titanate Thin Films by Chemical Solution Deposition method"Jpn.J.Appl.Phys.. 42. 5222-5226 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] W.Sakamoto: "Properties of Highly Oriented Rare-Earth-Ion Substituted BaNb_2O_6 Thin Films Synthesized by Chemical Solution Deposition"Jpn.J.Appl.Phys. 42(9B). 2513-5917 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Watanabe: "Photoresponse of Zenner tunneling junction of Pb(Ti,Zr)O_3/SrTiO_3 at low temperature"J.Appl.Phys.. 94(11). 7187-7192 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Tabata: "Control of the Oedered-Disordered State of B-site Ions in Ferroelectric Relaxor Superlattices"J.Kor.Phys.Soc.. 42. 1199-1202 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Fujii: "Ferroelectric Properties of Lead Strontium Titanate Thin Films by RF Magnetron Sputtering"J.Korean.Phys.Soc.. 42. S1178-S1181 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Shimizu: "Ferroelectric Properties of Pb(Zr,Ti)O_3 Thin Films prepared by Low-Temperature MOCVD Using PbTiO_3 Seeds"J.Eur.Ceram.Soc.. 24. 1625-1628 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Funakubo: "Effect of starting materials on deposition behavior, crystal structure and electrical properties of MOCVD-PZT films"Key Engineering Materials. 248. 57-60 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] N.Fujimura: "Ferromagnetic and Ferroelectric Behaviors of A Site Substituted YMnO3 Based Epitaxial Thin Films"Jpn.J.Appl.Phys.. 93. 6993-6995 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Okuyama: "Growth and Ferroelectric Property of Natural-Superlattice-Structured Bi_4Ti_3O_<12>-SrBi_4Ti_4O_<15> Thin Films (Invited)"Annual Meeting & Exposition of The American Ceram.Soc.. 105. 169(S19-81) (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Ishibashi: "Theory of the Morphotropic Phase Boundary"Ferroelectrics. 267. 1471-1474 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Watanabe, A.Masuda: "Nano-scale theory of Ferroelectric surface predicting skin-deep quan-tized 2D electron gas"Ferroelectrics. 267. 379-384 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Iwata, et al.: "Domain Observation in Pb(Zn_<1/3>Nb_<2/3>)O_3-PbTiO_3 Mixed Crystals"Jpn. J. Appl. Phys.. 41. 7007-7010 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Shimuta, O.Nakagawara, T.Makino, S.Arai, H.Tabata, T.Kawai: "Enhancement of remanent polarization in epitaxial BaTiO_3/SrTiO_3 superlattice with asymmetric structure"J. Appl. Phys.. 91. 2290-2294 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Yasuda, et al.: "Dielectric and piezoelectric properties of lead indium niobate-lead titanate single crystal with high Curie temperature near morphotropic phase boundary"Ferroelectrics. 270. 1433 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] W.Sakamoto, M.Mizuno, Y.Horie, T.Yogo, S.Hirano: "Chemical Solution Processing and Characterization of Highly Oriented (Ba, Ln)Nb_2O_6[Ln : La, Gd, Dy] Thin Films"Jpn. J. Appl. Phys.. 41. 6647-6652 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Hayashi, D.Togawa, M.Yamada, W.Sakamoto, S.Hirano: "Preparation and Properties of Bi_<4-x>La_xTi_3O_<12> Ferroelectric Thin Films Using Excimer UV Irradiation"Jpn. J. Appl. Phys.. 41. 6814 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Cho, et al.: "Tbit/inch^2 Ferroelectric Data Storage Based on Scanning Nonliner Dielectric Microscopy"Appl. Phys. Lett.. 81. 4401-4403 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Karaki, K.Tsu, T.Fujii, M.Adachi: "Field Dependence of Dielectric Properties of (Pb, Sr)TiO_3 Thin Films"Ferroelectrics. 271. 303-308 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Shimizu, H.Fujisawa, H.Niu, K.Honda: "Growth of Ferroelectric PbZr_xTi_<1-x>O_3 Thin Films by Metalorganic Chemical Vapor Deposition"J. Cryst. Growth. 237-239. 448 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Funakubo, K.Tokita, T.Oikawa, M.Aratani, K.Saito: "Comparison of Crystal Structure and Electrical Properties of Tetragonal and Rhombohedral Pb(Zr, Ti)O_3 Films Prepared by Low Temperature by Pulsed-Metalorganic Chemical Vapor Deposition"J. Appl. Phys.. 92. 5448-5452 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] O.Ito, N.Fujimura, K.Kakuno, T.Ito: "Retention Property Analysis of Epitaxially Growth YMnO_3/Y_2O_3/Si Capacitor"Ferroelectrics. 271. 87-92 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Takahashi, K.Kodama, M.Noda, P.Hedblom, A.Grishin, M.Okuyama: "Oxygen Annealing Effect of Photoelectron Spectra in SrBi_2Ta_2O_9 Film"Jpn. J. Appl. Phys.. 41. 6797-6802 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Ishibashi: "On Elastic Anomaly at the Hexagonal-Orthorhombic Transition in Hexagonal Ba-TiO_3 and Ice"J.Phys.Soc.Jpn.. 70. 307-308 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Iwata, N.Tomisato, H.Orihara, H.Ohwa, N.Yasuda, N.Arai, Y.Ishibashi: "Raman Scattering in the Pb(Zn_<1/3>Nb_<2/3>)-PbTiO_3 Mixed Crystal System II"Jpn.J.Appl.Phys.. 40. 5819-5822 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Yasuoka, H.Ohwa, S.Kume, Y.Hosono, Y.Yamashita, S.Ishino, H.Terauchi, M.Iwata, Y.Ishibashi: "Crystal growth and dielectric properties of solid solutions of Pb(Yb_<1/2>Nb_<1/2>)O_3-PbTiO_3 with a High Curie Temperature near a Morphotropic Phase Boundary"Jpn.J.Appl.Phys.. 40. 5664-5667 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Cho, K.Ohara, A.Koike, H.Odagawa: "New Functions of Scanning Nonlinear Dielectric Microscopy-Higher-Order Measurement and Vertical Resolution -"Jpn.J.Appl.Phys.. 41. 3544-3548 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Hayashi, D.Togawa: "Preparation and Properties of SrBi_2Ta_2O_9 Ferroelectric Thin Films Using Excimer UV Irradiation and Seed Layer"Jpn.J.Appl.Phys.. 41. 5585-5589 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Miyasaki, W.Sakamoto, T.Yogo, S.Hirano: "Chemical Solution Processing of Barium Titanate Films"Ceramic Transactions. 112. 261-266 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Fujii, M.Arata, S.Miyaji, M.Adachi: "Preparation of Pb(Zr_<0.9>Ti_<0.1>)O_3 Films by Sol-Gel Technique Using Thin Ti Buffer Layer"Ext.Abstr.FeRAM2001, Nov.19-21. 82-83 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Fujisawa, K.Kita, M.Shimizu, H.Niu: "Low Temperature fabrication of Ir/Pb(ZrTi)O_3/Ir Capacitors Solely by Metalorganic Chemical Vapor Deposition"Jpn.J.Appl.Phys.. 40. 5551 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Saito, T.Oikawa, I.Yamaji, T.Akai.H.Funakubo: "Domain Structures and Ferroelectric Properties of Epitaxial Pb(Zr, Ti)O_3 Thin Films"ICCGG-13/ICVGE-11, Aug. 3. 440 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Watanabe, A.Masuda: "Theoretical Stability of Polarization in Metal/Ferroelectric/Insulator/Semiconductor and Related Structure"Jpn.J.Appl.Phys.. 40. 3738-3740 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] D.Ito, N.Fujimura, K.Kato, T.Ito: "Retention property analyses of epitaxially grown YMnO_3/Y_2O_3/Si capacitor"Ferroelectrics. (in press).

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Takahashi, H.Sugiyama, T.Nakaiso, K.Kodama.M.Noda, M.Okuyama: "Analysis and Improvement of Retention Time of Memorized State of Metal-Ferroelectric-Insulator-Semiconductor Structure for Ferroelectric Gate FET Memory"Jpn.J.Appl.Phys.. 40. 2923-2927 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Hotta, E.Rokuta, H.Tabata, H.Kobayashi, T.Kawai: "Optimization of electronic-band alignments at ferroelectric (ZnxCd1-x)S/Si(100) interfaces"Appl.Phys.Lett.. 78. 3283-3285 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Joseph,H.Tabata,T.Kawai: "Ferroelectric behavior of epitaxial BiVO thin films on Si(100) formed by pulsed laser deposition"J.Appl.Phys.. 88. 1193 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Joseph,H.Tabata,T.Kawai: "Any candidates of ferroelectric material for transistor type FeRAM?"Appl.Phys.A. (in press). (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Ishibashi: "Theory of nonlinear response"Ferroelectrics. 236. 71-79 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Watanabe,M.Okano,A.Masuda: "Surface conduction on insulating BaTiO3 crystal suggesting an intrinsic surface electron layer"Phys.Rev.Lett.. 86. 332 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Hirano,T.Yogo,W.Sakamoto,H.Yamaguchi: "Chemical processing of PbTiO3/Organic Hybrid and Pb(Zr,Ti)O3 Thick Films"Technology and Applications. 107-114 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Hayashi,A.Tanimura,H.Shinozaki,K.Sasaki: "Preparation of Ba(ZrxTi1-x)O3 Particles by Vapor Phase Hydrolysis of Precursors Formed Through Alkoxide-Hydroxide Route"Transactions of the Materials Res.Soc.Jpn.. 25. 1131-1134 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Cho,S.Kazuta,K.Ohara,H.Odagawa: "Quantitative measurement of liner and nonlinear dielectric characteristic using scanning nonlinear dielectric microscopy"Jpn.J.Appl.Phys.. 39. 3086-3089 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Futakuchi,K.Nakano,M.Adachi: "Low-temperature preparation of lead-based ferroelectric thick films by screen-printing"Jpn.J.Appl.Phys.. 39. 5548-5551 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] N.Yasuda,H.Ohwa,M.Kume,Y.Yamashita: "Piezoelectric properties of a high Curie temperature Pb(In1/2Nb1/2)O3-PbTiO3 binary system single crystal near a morphotropic phase boundary"Jpn.J.Appl.Phys.. 39. L66-L68 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Iwata,Y.Ishibashi: "Theory of morphotropic phase boundary in solid solution systems of perovskite-type oxide ferroelectrics : Engineered Domain Configurations"Jpn.J.Appl.Phys.. 39. 5156 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Sugiyama,T.Nakaiso,Y.Adachi,M.Noda,M.Okuyama: "An Improvement in C-V Characteristics of Metal-Ferroelectric-Insulator Semiconductor Structure for Ferroelectric Gate FET Memory Using a Silicon Nitride Buffer Layer"Jpn.J.Appl.Phys.. 39. 2131-2135 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Shimizu,S.Nakashima,K.Kaibara,H.Fujisawa,H.Niu: "Effects of film thickness and grain size on the electrical properties of Pb(Zr,Ti)O3 thin films prepared by MOCVD"Ferroelectrics. 241. 183-190 (2000)

    • Related Report
      2000 Annual Research Report

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Published: 2001-04-01   Modified: 2018-03-28  

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