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High-power electrostatic levitation linear motor for ultra-clean and vacuum environment

Research Project

Project/Area Number 12355011
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionThe University of Tokyo

Principal Investigator

HIGUCHI Toshiro  Graduate School of Engineering, Professor, 大学院・工学系研究科, 教授 (10111569)

Co-Investigator(Kenkyū-buntansha) KIYOHARA Masakatsu  TOTO LTD., General laboratory, Group leader (Researcher), 総合研究所, グループリーダ(研究職)
YAMAMOTO Akio  Graduate School of Engineering, Lecturer, 大学院・工学系研究科, 講師 (40313035)
Project Period (FY) 2000 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥42,950,000 (Direct Cost: ¥37,100,000、Indirect Cost: ¥5,850,000)
Fiscal Year 2002: ¥7,930,000 (Direct Cost: ¥6,100,000、Indirect Cost: ¥1,830,000)
Fiscal Year 2001: ¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000)
Fiscal Year 2000: ¥17,600,000 (Direct Cost: ¥17,600,000)
KeywordsElectrostatic Motor / Linear Motor / Non-contact levitation / Electrostatic Levitation / Levitation Motor / Vacuum / Actuator / Electron Beam / クリーンルーム / シリコンウェハ
Research Abstract

In this research, we have developed high-power electrostatic linear levitation motor for vacuum condition. Since electrostatic motor does not emit magnetic field it is suitable for EB applications, such as electron microscope and EB lithography system, which are some of the most important applications using vacuum condition.
In the first step of the research, we have developed electrostatic linear motor stage specialized for vacuum use, with which characteristics of non-levitation electrostatic motor in vacuum condition was investigated. The developed stage generates almost the same thrust force in vacuum as in the normal condition. We have developed new electrostatic linear encoder which is embedded into the electrostatic motor. Using the developed linear encoder, we perform positioning control in vacuum condition.
Next, we have studied electrostatic levitation motor, in which high-power electrostatic motor technology and electrostatic levitation technology are combined. We proposed several principles for levitation motor and revealed their characteristics theoretically. To verify the proposed principles, we have developed two-DOF prototype, which has one degree of freedom for thrust direction and one for levitating direction. The developed prototype demonstrated levitated driving motion in vacuum condition. The slider was levitated under the stator with a gap of 200μm and moved with a speed of 20mm/s in the thrust direction. Also, we performed positioning control with keeping levitated state. These results verify the proposed principles of electrostatic levitation motor.

Report

(4 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (27 results)

All Other

All Publications (27 results)

  • [Publications] H.YASUI, A.YAMAMOTO, T.HIGUCHI: "Electrostatic Levitation of 300-mm Silicon Wafer"Proc.2000 International Symposium on Mechatronics and Intelligent Mechanical System for 21 Century (ISIM 2000). 51-54 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 保井秀彦, 山本晃生, 樋口俊郎: "真空用静電リニアモータの駆動特性"計測自動制御学会SI2001講演論文集. 51-52 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 保井秀彦, 山本晃生, 樋口俊郎: "静電浮上モータの浮上制御方法の検討"2002年精密工学会春季大会学術講演会講演論文集. 109 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.YASUI, A.YAMAMOTO, T.HIGUCHI: "Development of High-Power Electrostatic Linear Motor for Vacuum Environment"Proc.8^<th> International Conference on new Actuator (ACTUATOR 2002). 652-655 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.YASUI, A.YAMAMOTO, T.HIGUCHI: "Non-Contact Levitation Control System for Electrostatic Motor"Proc.8^<th> International Symposium on Magnetic Bearings. 175-180 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 保井秀彦, 山本晃生, 西嶋隆, 樋口俊郎: "真空環境用静電リニアモータの開発"精密工学会誌. 69-5. 665-670 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidehiko YASUI, Akio YAMAMOTO, Toshiro HIGUCHI: "Electrostatic Levitation of 300-mm Silicon Water"Proc.ISIM 2000. 51-54 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidehiko YASUI, Akio YAMAMOTO, Toshiro HIGUCHI: "Driving characteristics of Electrostatic Linear Motor for Vacuum Condition (in Japanese)"Proc.SICE SI2002. 51-52 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidehiko YASUI, Akio YAMAMOTO, Toshiro HIGUCHI: "Study on Levitation Control Method for Electrostatic Levitation Motor (in Japanese)"Proc.Spring Annual Meeting of Japan Society of Precision Engineering. 109 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidehiko YASUI, Akio YAMAMOTO, Toshiro HIGUCHI: "Development of High-Power Electrostatic Linear Motor for Vacuum Environment"Proc.8th International Conference on new Actnator (ACTUATOR 2002). 652-655 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidehiko YASUI, Akio YAMAMOTO, Toshiro HIGUCHI: "Non-contact Levitation Control System for Electrostatic Motor"Proc.8th International Symposium on Magnetic Bearings. 175-180 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidehiko YASUI, Akio YAMAMOTO, Toshiro HIGUCHI: "Development of Electrostatic Linear Synchronous Motor for Vacuum Environment (in Japanese)"Journal of Japna Society of Precision Engineering. 69 No.5. 665-670 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.YASUI, A.YAMAMOTO, T.HIGUCHI: "Development of High-Power Electrostatic Linear Motor for Vacuum Environment"Proc. 8^<th> International Conference on new Actuator(ACTUATOR2002). 652-655 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.YASUI, A.YAMAMOTO, T.HIGUCHI: "Non-Contact Levitation Control System for Electrostatic Motor"Proc. 8^<th> International Symposium on Magnetic Bearings. 175-180 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] A.YAMAMOTO, H.YASUI, N.SHIMIZU, T.HIGUCHI: "Development of Electrostatic Levitation Motor for Vacuum Condition"Proc. 2003 IEEE International Symposium on Industrial Electronics. (発表予定). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] A.YAMAMOTO, H.YASUI, T.NISHIJIMA, T.HIGUCHI: "Electrostatic Linear Servo Motor with Built-in Position Sensor for Vacuum Environment"Proc. 2003 IEEE International Symposium on Industrial Electronics. (発表予定). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 保井秀彦, 山本晃生, 西嶋隆, 樋口俊郎: "真空環境用静電リニアモータの開発"精密工学会誌. (掲載決定済み). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 山本晃生, 保井秀彦, 清水直茂, 樋口俊郎: "真空環境用静電浮上リニアモータ(第一報)"2003年精密工学会春季大会学術講演会講演論文集. (発表予定).

    • Related Report
      2002 Annual Research Report
  • [Publications] 保井秀彦, 山本晃生, 樋口俊郎: "真空用静電リニアモータの駆動特性"計測自動制御学会SI2001講演論文集. 51-52 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 保井秀彦, 山本晃生, 樋口俊郎: "真空環境用静電リニアモータの開発"2O02年精密工学会春季大会学術講演会講演論文集 (発表予定). (未定). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 保井秀彦, 山本晃生, 樋口俊郎: "真空環境用静電リニアモータの位置決め制御"2002年精密工学会春季大会学術講演会講演論文集 (発表予定). (未定). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 保井秀彦, 山本晃生, 樋口俊郎: "静電浮上モータの浮上制御方法の検討"2002年精密工学会春季大会学術講演会講演論文集 (発表予定). (未定). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.YASUI, A.YAMAM0T0, T.HIGUCHI: "Development of High-Power Electrostatic Linear Motor for Vacuum environment"Proceedings of ACTUATOR 2002(発表予定). (未定). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 山下典理男, 保井秀彦, 山本晃生, 樋口俊郎: "400mmシリコンウェハの非接触静電浮上"精密工学会2002年度学生会員卒業研究発表講演会講演集 (発表予定). (未定). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Hidehiko YASUI,Akio YAMAMOTO,Toshiro HIGUCHI: "Electrostatic Levitation of 300-mm Silicon Wafer"Proceedings of the 2000 International Symposium on Mechatronics and Intelligent Mechanical System for 21 Century (ISIM2000). 51-54 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 山本晃生,新野俊樹,樋口俊郎: "高出力静電モータによる精密位置決め"2001年度精密工学会春季大会学術講演会講演論文集. (発表予定)(未定). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 山本晃生,新野俊樹,樋口俊郎: "高出力静電リニアモータのサーボ制御"第12回「電磁力関連のダイナミックス」シンポジウム. 565-568 (2000)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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