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ULTRAPRECISION MACHINING OF 3 DIMENSIONAL MICRO STRUCTURES BY APPLYING ELLIPTICAL VIBRATION CUTTING

Research Project

Project/Area Number 12450061
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionKOBE UNIVERSITY

Principal Investigator

MORIWAKI Toshimichi  Kobe University, Mechanical Engineering, Professor, 工学部, 教授 (00031104)

Co-Investigator(Kenkyū-buntansha) FUJII Yoshikazu  Kobe University, Mechanical Engineering, Associate Professor, 工学部, 助教授 (80238534)
SHIBASAKA Toshiro  Kobe University, Mechanical Engineering, Associate Professor, 工学部, 助教授 (80094530)
SHAMOTO Eiji  Kobe University, Mechanical Engineering, Associate Professor, 工学部, 助教授 (20216146)
HINO Rei  Kobe University, Mechanical Engineering, Research Associate, 工学部, 助手 (80273762)
Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥14,100,000 (Direct Cost: ¥14,100,000)
Fiscal Year 2001: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 2000: ¥11,500,000 (Direct Cost: ¥11,500,000)
KeywordsElliptical vibration cutting / Ultraprecision cutting / Diamond tool / Micro machining / Chip formation / Surface roughness / Shape accuracy / 3 dimensional structure
Research Abstract

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;
1. Development of vibration control system A new control system to stabilize elliptical vibration during cutting process is developed, and it is confirmed that the amplitudes in the two directions and their phase shift are kept to desired values.
2. Analysis of finished surfaces Cutting experiments were carried out by employing the developed vibration device, and the finished surfaces were analyzed in terms of machining accuracy and roughness.
3. Machining of 3 dimensional micro structures Hardened steel dies for 3 dimensional micro parts such as flesnel lenses, micro pick up lenses and back light panels for LCD's were machined by the elliptical vibration cutting, and ultraprecise micro machining was successfully achieved, which has been impossible by the conventional machining methods.

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (47 results)

All Other

All Publications (47 results)

  • [Publications] Toshimichi Moriwaki: "Resent Development in Ultraprecision Machining and Machine Tool Technology"Euspen, International seminar on precision engineering and micro technology. 161-170 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Eiji Shamoto: "Ultraprecision 6-Axis Table Driven by Means of Walking Drive"Annals of the CIRP. Vol.49/1. 299-302 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "高速切削における切削熱の移動に関する研究"2000年度精密工学会秋季大会学術講演会講演論文集. 102 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "超音波楕円振動切削加工に関する研究-振動制御システムの開発と加工への適用"日本機械学会[No.00-5]第2回生産加工・工作機械部門講演会講演論文集. 185-186 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "静圧テーブルの運動誤差解析と高精度化(第1報)-伝達関数を利用した誤差解析と修正研磨法の提案"精密工学会誌. Vol.66,No.12. 1974-1980 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "畳込み積分を利用した工作機械の熱変形推定"日本機械学会第1回FA部門講演会. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "Walking Driveに基づくXYΘテーブルの開発(第1報) -既定変位パターン駆動方式の提案と検証"精密工学会誌. 67・6. 954-959 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "Walking Driveによる精密送り機構の開発(第3報) -デュアルモード超精密高速位置決めシステムの開発"精密工学会誌. 67・7. 1125-1129 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "Walking Driveに基づくXYΘテーブルの開発(第2報) -駆動方式の比較検討と小型鉛直面内XYΘテーブルの開発"精密工学会誌. 67・8. 1259-1265 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "Walking Driveを用いた送り装置の高精度化に関する研究 -オープンループ特性の改善"日本機械学会[No.01-20]第3回生産加工・工作機械部門講演会講演論文集. 17-18 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "Walking Driveを用いた超精密XYΘテーブルの開発(第3報) -平面内3軸同時測定および駆動方法の提案"2002年度精密工学会春季大会学術講演会講演論文集. (発表予定). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "機械式円振動発生機構を利用した楕円振動切削加工機の開発"2001年度精密工学会秋季大会学術講演会講演論文集. 511 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 朴 天弘: "静圧テーブルの運動誤差解析と高精度化(第2報)-伝達関数を利用した解析法と修正研磨法の実験的検証"精密工学会誌. 67・6. 903-909 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Toshimichi Moriwaki: "Development of Ultraprecision 5-Axis Machine Tool Equipped with Elliptical Vibration Cutting Device"10th International Conference on Precision Engineering. 589-593 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Eiji SHAMOTO: "Analysis and Improvement of Motion Accuracy of Hydrostatic Feed Table"Annals of the CIRP. 50・1. 285-290 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "楕円振動切削加工法(第4報) -工具振動システムの開発と超精密切削への応用"精密工学会誌. 67・11. 1871-1877 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Eiji Shamoto: "Development of Ultrasonic Elliptical Vibration Controller for Elliptical Vibration Cutting"Annals of the CIRP. 51・1(発表予定). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 社本 英二: "傾斜型楕円振動切削加工法の提案"2001年度精密工学会秋季大会学術講演会講演論文集. 353 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Toshimichi Moriwaki and Eiji Shamoto: "Resent Development in Ultraprecision Machining and Machine Tool Technology Eiji Shamoto, Hirokazu Murase and Toshimichi Moriwaki, Ultraprecision 6-Axis Table Driven by Means of Walking Drive"Euspen, International seminar on precision engineering and micro technology, pp.161-170, 2000 Annals of the CIRP. Vol. 49/1. 299-302 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Eiji SHAMOTO: "Chun-Hong PARK and Toshimichi MORIWAKI, Analysis and Improvement of Motion Accuracy of Hydrostatic Feed Table (1st Report) - Analysis of Motion Error by Utilizing Transfer Function and Proposal of corrective Lapping"JSPE. Vol. 66, No. 12. 1974-1980 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Chun-Hong PARK, Eiji SHAMOTO and Toshimichi MORIWAKI: "Analysis and Improvement of Motion Accuracy of Hydrostatic Feed Table (1st Report) - Experimental Verification of Analytical Model and Corrective Lapping Algorithm Based on Transfer Function"JSPE. Vol. 67, No. 6. 903-909 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Eiji SHAMOTO, Yuichi MURASE and Toshimichi MORIWAKI: "Development of XYθ Table Driven by Means of Walking Drive (1st Report) - Proposal of Driving method with Predetermined Displacement Patterns"JSPE. Vol. 67, No. 6. 954-959 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Eiji SHAMOTO, Heungchul SHIN and Toshimichi MORIWAKI: "Development of Precision Feed Mechanism by Applying principle of Walking Drive (3rd Report) - Development of Dual-Mode Ultraprecision High-Speed Positioning System"JSPE. Vol. 67, No. 7. 1125-1129 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Toshimichi Moriwaki. Eiii Shamoto, Katsutoshi Tanaka, Makoto Matsuo and Michio Osada: "Development of Ultraprecision 5-Axis Machine Tool Equipped with Elliptical Vibration Cutting Device"10th International Conference on Precision Engineering. 589-593 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Eiji SHAMOTO, Chun-Hong PARK and Toshimichi MORIWAKI: "Analysis and Improvement of Motion Accuracy of Hydrostatic Feed Table"Annals of the CIRP. Vol. 50/1. 285-290 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Eiji SHAMOTO, Hidetaka MATSUO, Rei HINO and Toshimichi MORIWAKI: "Development of XYθ Table Driven by Means of Walking Drive (2nd Report) - Comparison of Driving Methods and Development of Compact Vertical XYθ Table"JSPE. Vol. 67, No. 8. 1259-1265 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Eiji SHAMOTO, Norikazu SUZUKI, Toshimichi MORIWAKI and Yoshikazu NAOI: "Elliptical Vibration Cutting (4th Report) - Development of Tool Vibration Control System and Its Application to Ultraprecision Cutting"JSPE. Vol. 67, No. 11. 1871-1877 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Eiji Shamoto, Norikazu Suzuki, Yoshikazu Naoi and Toshimichi Moriwaki: "Development of Ultrasonic Elliptical Vibration Controller for Elliptical Vibration Cutting"Annals of the CIRP. Vol. 51/1, (to be published). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 朴 天弘: "静圧テーブルの運動誤差解析と高精度化(第2報)-伝達関数を利用した解析法と修正研磨法の実験的検証"精密工学会誌. 67・6. 903-909 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Toshimichi Moriwaki: "Development of Ultraprecision 5-Axis Machine Tool Equipped with Elliptical Vibration Cutting Device"10th International Conference on Precision Engineering. 589-593 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Eiji SHAMOTO: "Analysis and Improvement of Motion Accuracy of Hydrostatic Feed Table"Annals of the CIRP. 50・1. 285-290 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 社本 英二: "楕円振動切削加工法(第4報)-工具振動システムの開発と超精密切削への応用"精密工学会誌. 67・11. 1871-1877 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Eiji Shamoto: "Development of Ultrasonic Elliptical Vibration Controller for Elliptical Vibration Cutting"Annals of the CIRP. 51・1(発表予定). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 社本 英二: "傾斜型楕円振動切削加工法の提案"2001年度精密工学会秋季大会学術講演会講演論文集. 353 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 社本 英二: "Walking Driveに基づくXYθテーブルの開発(第1報)-既定変位パターン駆動方式の提案と検証"精密工学会誌. 67・6. 954-959 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 社本 英二: "Walking Driveによる精密送り機構の開発(第3報)-デュアルモード超精密高速位置決めシステムの開発"精密工学会誌. 67・7. 1125-1129 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 社本 英二: "Walking Driveに基づくXYθテーブルの開発(第2報)-駆動方式の比較検討と小型鉛直面内XYθテーブルの開発"精密工学会誌. 67・8. 1259-1265 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 社本 英二: "Walking Driveを用いた送り装置の高精度化に関する研究-オープンループ特性の改善-"日本機械学会[No.01-20]第3回生産加工・工作機械部門講演会講演論文集. 17-18 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 社本 英二: "Walking Driveを用いた超精密XYθテーブルの開発(第3報)-平面内3軸同時測定および駆動方法の提案"2002年度精密工学会春季大会学術講演会講演論文集. (発表予定). (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 社本 英二: "機械式円振動発生機構を利用した楕円振動切削加工機の開発"2001年度精密工学会秋季大会学術講演会講演論文集. 511 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Toshimichi Moriwaki: "Resent Development in Ultraprecision Machining and Machine Tool Technology"Euspen,International seminar on precision engineering and micro technology. 161-170 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Eiji Shamoto : "Ultraprecision 6-Axis Table Driven by Means of Walking Drive"Annals of the CIRP. Vol.49/1. 299-302 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 社本英二: "高速切削における切削熱の移動に関する研究"2000年度精密工学会秋季大会学術講演会講演論文集. 102 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 社本英二: "超音波構円振動切削加工に関する研究-振動制御システムの開発と加工への適用"日本機械学会[No.00-5]第2回生産加工・工作機械部門講演会講演論文集. 185-186 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 社本英二: "静圧テーブルの運動誤差解析と高精度化(第1報)-伝達関数を利用した誤差解析と修正研磨法の提案"精密工学会誌. Vol.66,No.12. 1974-1980 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 社本英二: "畳込み積分を利用した工作機械の熱変形推定"日本機械学会第1回FA部門講演会. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Toshimichi Moriwaki: "Development of Ultraprecision 5-Axis Machine Tool Equipped with Elliptical Vibration Cutting Device"10th International Conference on Precision Engineering. (to be published). (2001)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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