Production and Characterization of a Wined Beam of Neutral Free Radicals for Control of Surface Fundamental Processes
| Project/Area Number |
12640396
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
物理学一般
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| Research Institution | Kanazawa Institute of Technology |
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Principal Investigator |
HAYASHI Kenji Kanazawa Institute of Technology, Engineering, Associate Professor, 工学部, 助教授 (30281455)
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| Project Period (FY) |
2000 – 2001
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| Project Status |
Completed (Fiscal Year 2001)
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| Budget Amount *help |
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2001: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2000: ¥2,800,000 (Direct Cost: ¥2,800,000)
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| Keywords | Neutral Free Radical / Control of Surface Fundamental Processes / Negative Ion Beam / Laser Photo-Excitation / Ab Initio Molecular Orbital Theory / Chemical Physics / Molecular Design / Semiconductor Device Processing |
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| Research Abstract |
In order to further develop quantum functional devices and nano-electromechanical systems it has become indispensable in recent years to ingeniously utilize selective surface reactions of neutral free radicals for the device processing. The problem encountered in the experimental study of a chemical reaction between a neutral free radical and a well-characterized material surface is how to sufficiently supply only the desired neutral free radical species with the desired kinetic energy onto the surface. In order to overcome this difficulty the investigator has proposed several experimental approaches to produce steady-flux refined beams of neutral free radicals (RBNR). Two of these approaches are the method of photo-deionization of negative ion beams (PDINIB) and the method of photo-dissociation of energetic compound beams (PDECB).
We have been developing a trial surface-processing apparatus utilizing RBNR produced by the PDINIB method. When we apply RBNR to thin film growth, a steady-f
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lux beam obtained using a CW laser is more useful than a pulsed beam. However, the power of an available CW laser is generally much weaker than the peak power of a pulsed laser. Thus, how to enhance the photo-neutralization efficiency has been the key point to realize a practical steady-flux PDINIB apparatus. We succeeded in improvement of the photo-neutralization efficiency in our trial apparatus up to 49 %, which we determined using sensitive measurement techniques method developed in this study.
Molecular design techniques based on post-SCF ab initio molecular orbital theory were employed to further extend applicability of the PDECB method. We found that use of a beam of dialkyl group-III nitrene biradicaloid produced by the PDECB method is advantageous to the low-temperature thin-film growth of stoichiometric group-III nitride. The theoretical results indicated that (CH_3)_2GaN_3 is a promising PDECB source material in that this molecule possesses the nature of unimolecular metastable dye. Less
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Report
(3 results)
Research Products
(26 results)
