| Project/Area Number |
12792007
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| Research Category |
Grant-in-Aid for University and Society Collaboration
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| Allocation Type | Single-year Grants |
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| Research Field |
電子デバイス・機器工学
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| Research Institution | JAIST (Japan Advanced Institute of Science and Technology) |
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Principal Investigator |
MATSUMURA Hideki School of Materials Science, Professor, 材料科学研究科, 教授 (90111682)
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| Co-Investigator(Kenkyū-buntansha) |
IZUMI Akira School of Materials Science, Assistant Engineer, 材料科学研究科, 助手 (30223043)
NITTA Koh-hei School of Materials Science, Assistant Professor, 材料科学研究科, 助教授 (70260560)
TERANO Minoru School of Materials Science, Professor, 材料科学研究科, 教授 (90251975)
KIDA Ken-ichiro Ishikawa Seisakusyo, LTD, システム機器開発部, 研究員
MASUDA Atsushi School of Materials Science, Assistant Engineer, 材料科学研究科, 助手 (30283154)
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| Project Period (FY) |
2000 – 2002
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| Project Status |
Completed (Fiscal Year 2002)
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| Budget Amount *help |
¥55,300,000 (Direct Cost: ¥55,300,000)
Fiscal Year 2002: ¥28,100,000 (Direct Cost: ¥28,100,000)
Fiscal Year 2001: ¥27,200,000 (Direct Cost: ¥27,200,000)
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| Keywords | in-print method / patterning / lithography / thin film transistor / liquid crystal display |
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| Research Abstract |
The present research is concerned with a new technology for patterning process in fabricating thin film transistors (TFTs) used in liquid crystal display. Photolithography is conventionally used for this patterning process. However, a novel method are presented in this research projects, in which patterns are formed by press of a mold having 凹凸 patterns onto organic soft films laminated on substrates. By this method, low-cost pattern printing is attempted for TFT fabrication.
Actually, by using soft organic films such as polyethylene and polysthylene, TFTs with characteristics equivalent to those fabricated by the conventional photolithography can be successfully fabricated. Additionally, during this research, a new method, in which micron-size silicon integrated circuits are attached onto substrate just like a printing ink instead of making TFT, is proposed, and its feasibility is also successfully confirmed.
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