半導体製造技術を理解するIC作製実験の開発

• Project/Area Number: 12914011
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: 物理
• Research Institution: 早稲田大
• Principal Investigator: 落合 澄 早稲田大, 技術職員
• Project Period (FY): 2000
• Project Status: Completed (Fiscal Year 2000)
• Budget Amount: ¥220,000 (Direct Cost: ¥220,000); Fiscal Year 2000: ¥220,000 (Direct Cost: ¥220,000)