Project/Area Number |
13450017
|
Research Category |
Grant-in-Aid for Scientific Research (B)
|
Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
表面界面物性
|
Research Institution | Tohoku University |
Principal Investigator |
YAMANAKA Kazushi Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (00292227)
|
Co-Investigator(Kenkyū-buntansha) |
CHO Hideo Aoyama Gakuin University, College of Science and Engineering, Assistant Professor, 理工学部, 助手 (60296382)
MIHARA Tsuyoshi Tohoku University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (20174112)
|
Project Period (FY) |
2001 – 2003
|
Project Status |
Completed (Fiscal Year 2003)
|
Budget Amount *help |
¥16,200,000 (Direct Cost: ¥16,200,000)
Fiscal Year 2003: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 2002: ¥6,500,000 (Direct Cost: ¥6,500,000)
Fiscal Year 2001: ¥8,000,000 (Direct Cost: ¥8,000,000)
|
Keywords | Ultrasonic atomic force microscope / Resonance spectra / Carbon fiber reinforced plastic / Dislocations in layered crystal / Long distance displacement / Atomic layer manipulation / Elastic anisotropy / Equivalent effective elasticity / 内部原子 / 原子間力顕微鏡 / グラファイト / 2硫化モリブデン / 転位 / 非線形 / 振動 / 理論解析 / 刃状転位 / 共振周波数 / 真空 / Q値制御 / 余剰原子面 / 高減衰試料 |
Research Abstract |
Observation and manipulation of subsurface atomic layers is a key technology to establish the reliability of materials and devices in the micro electromechanical systems (MEMS) and in the nanotechnology. In this research project, we developed and applied the ultrasonic atomic force microscopy (UAFM) to establish observation and manipulation of subsurface atomic layers. In UAFM, subsurface defects located at the depth of 10 nm or more can be observed with the lateral resolution of 5 nm. A subsurface gap accompanied by an edge dislocation in layered crystals is imaged as a low-contact-stiffness area. We applied UAFM to highly oriented pyrolytic graphite (HOPG) and MoS2 and observed subsurface edge dislocations. We found that the resonance frequency is significantly lower than that of the defect-free-model. Under the load higher than 100 nN where the contact radius is larger than 5 nm, the resonance frequency approached that of the defect-free-model, but it is lower under the lower load. Through observation of the dislocation behavior in HOPG under different loads, we found that the dislocation moved laterally by 40 nm us the load increased by 285 nN, and ii returned to the original position as the load decreased. To explain this result, we proposed a model for the lateral motion of the dislocation. This finding of the large lateral motion confirms the manipulation of subsurface atomic layers. A nonlinear vibration analysis of the contact represented by a stiffening or softening spring was developed that models the opening-closure behavior of the subsurface gap between subsurface atomic layers. These methods were verified by comparing the observed and calculated loud dependence of the resonance frequency and the shape of resonance spectra, both on a defect area and defect-free area.
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