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Characterization of insulator surfaces after ultra-precision machining by STM/STS with high-frequency pulses

Research Project

Project/Area Number 13450056
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionOsaka University

Principal Investigator

ENDO Katsuyoshi  ENDO,Katsuyoshi, 大学院・工学研究科, 教授 (90152008)

Co-Investigator(Kenkyū-buntansha) INOUE Haruyuki  INOUE,Haruyuki, 大学院・工学研究科, 助手 (30304009)
OSHIKANE Yasushi  OSHIKANE,Yasushi, 大学院・工学研究科, 助手 (40263206)
KATAOKA Toshihiko  KATAOKA,Toshihiko, 大学院・工学研究科, 教授 (50029328)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥15,200,000 (Direct Cost: ¥15,200,000)
Fiscal Year 2003: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 2002: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 2001: ¥11,700,000 (Direct Cost: ¥11,700,000)
Keywordsscanning tunneling microscope / scanning tunneling spectroscopy / insulator / ultra-precision machining / surface characterization / high-frequency pulse / surface morphology / surface defect
Research Abstract

The purpose of this study is to develop a scanning tunneling microscopy (STM)/ scanning tunneling spectroscopy (STS) system operated by high-frequency pulses in order to observe either atomic distributions or electronic structures of insulator surfaces. Furthermore, we aim at evaluating insulator surfaces after ultra-precision machining processes, and optimizing the condition of the machining process. In order to observe insulator surfaces with STM, we have to apply bias voltages high enough for electrons to tunnel into the conduction band of the insulator surface, and the voltage has to be applied as alternating short pulses (< 1 msec) to avoid the electrification and the destruction of the insulator surface. In addition, we have to develop the feedback circuit of which the source is not a displacement current originated from a stray capacitance but tunneling current between. a probe and a sample. Tunneling current spectroscopy is also necessary to elucidate defect states of insulator … More surfaces.
We have developed the RC circuit in which tunneling current can be detected without being hindered by displacement current induced by a rectangular short voltage pulse. The prototype of STM system operated by high-frequency pulses has been constructed in which high-frequency rectangular voltage pulses (frequency : more than 10 kHz, amplitude: up to ±10V) can be applied to the tunneling junction. After the output of the detecting circuit of tunneling current is rectified by a diode, the signal has been controlled by a feedback loop. We have succeeded in obtaining atomic images of highly oriented pyrolytic graphite (HOPG) surfaces by the constructed system. However, atomically resolved images have not been obtained yet of either an intrinsic Si surface or a Si wafer covered with native oxides. In order to observe atomic images of these surfaces, the ratio of signal to noise of a current amplifier must be improved at a high-frequency (>100 kHz) region. At the same time, we have to achieve the higher cut-off frequency of the feedback system. We have designed a new feedback control system for high-frequency STM. The new system equips a current amplifier operated at the high-frequency region, and a lock-in amplifier in order to amplify the component of tunneling current at the specific frequency of applied rectangular pulses. This system does not need a rectifying circuit by a diode, which enhances the ratio of signal to noise. We have confirmed that the cut-off frequency of the new feedback control system is 1.0 kHz. It is expected that insulator surfaces can now be resolved in an atomic scale. Less

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (28 results)

All Other

All Publications (28 results)

  • [Publications] Katsuyoshi Endo et al.: "Atomic Structure of Si(001)-c(4x4) Formed by Heating Process after Wet Cleaning and Its First-Principles Study"Japanese Journal of Applied Physics. 42・7B. 4646-4649 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Katsuyoshi Endo et al.: "Visible Light Irradiation Effects on Atomic-Scale Observations of Hydrogenated Amorphous Silicon Films by Scanning Tunneling Microscopy"2003 International Conference on SOLID STATE DEVICES AND MATERIALS. 500-501 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Katsuyoshi Endo et al.: "Scanning tunneling microscopy observations of intrinsic hydrogenated amorphous silicon surface under visible light irradiation"7th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures. 256 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 遠藤 勝義 他: "単色光照射による水素化アモルファスシリコン表面の原子像観察"第50回応用物理学会関係連合講演会講演予稿集. 727 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 遠藤 勝義 他: "SREM/STMによるSi表面の観察"精密工学会2003年度関西地方定期学術講演会講演論文集. 45-16 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 遠藤 勝義 他: "高周波パルスSTM(Scanning Tunneling Microscopy)の開発-高周波パルスSTM装置-"精密工学会2003年度関西地方定期学術講演会講演論文集. 47-48 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 遠藤 勝義 他: "光照射を利用した水素化アモルファスシリコン表面の走査型トンネル顕微鏡観察"精密工学会2003年度関西地方定期学術講演会講演論文集. 49-50 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Katsuyoshi Endo, Kenta Arima, Kikuji Hirose, Toshihiko Kataoka, Yuzo Mori: "Atomic image of hydrogen-terminated Si(001) surfaces after wet cleaning and its first-principles study"Journal of Applied physics. 91,7. 4065-4072 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Katsuyoshi Endo, Tomoya Ono, Kenta Arima, Yuji Uesugi, Kikuji Hirose, Yuzo Mori: "Atomic Structure of Si(001)-c(4x4) Formed by Heating Process after Wet Cleaning and Its First-Principles Study"Jpn.J.Appl.Phys.. vol.42, no.7B. 4646-4649 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kenta Anima, Hiroaki Kakiuchi, Manabu Ikeda, Katsuyoshi Endo, Mizuho Morita, Yuzo Mori: "Visible Light Irradiation Effects on Atomic-Scale Observations of Hydrogenated Amorphous Silicon Films by Scanning Tunneling Microscopy"Extended Abstracts of the 2003 Int. Conf. on SOLID STATE DEVICES AND MATERIALS. 500-501 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kenta Arima, Hiroaki Kakiuchi, Manabu Ikeda, Katsuyoshi Endo, Mizuho Morita, Yuzo Mori: "Scanning tunneling microscopy observations of intrinsic hydrogenated amorphous silicon surface under visible light irradiation"Program and Abstracts of the 7th Int. Conf on Atomically Controlled Surfaces, Interfaces and Nanostructures. 256 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Katsuyoshi Endo et al.: "Atomic Structure of Si(001)-c(4x4) Formed by Heating Process after Wet Cleaning and Its First-Principles Study"Japanese Journal of Applied Physics. 42・7B. 4646-4649 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Katsuyoshi Endo et al.: "Visible Light Irradiation Effects on Atomic-Scale Observations of Hydrogenated Amorphous Silicon Films by Scanning Tunneling Microscopy"2003 International Conference on SOLID STATE DEVICES AND MATERIALS. 500-501 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Katsuyoshi Endo et al.: "Scanning tunneling microscopy observations of intrinsic hydrogenated amorphous silicon surface under visible light irradiation"7th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures. 256 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 遠藤勝義 他: "単色光照射による水素化アモルファスシリコン表面の原子像観察"第50回応用物理学会関係連合講演会 講演予稿集. 727 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 遠藤勝義 他: "SREM/STMによるSi表面の観察"精密機械工学会2003年度関西地方定期学術講演会講演論文集. 45-16 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 遠藤勝義 他: "高周波パルスSTM(Scanning Tunneling Microscopy)の開発-高周波パルスSTM装置-"精密工学会2003年度関西地方定期学術講演会講演論文集. 47-48 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 遠藤勝義 他: "光照射を利用した水素化アモルファスシリコン表面の走査型トンネル顕微鏡観察"精密工学会2003年度関西地方定期公演会講演論文集. 49-50 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Katsuyoshi Endo et al.: "Atomic image of hydrogen-terminated Si(001) surfaces after wet cleaning and its first-principles study"Journal of Applied physics. 91・7. 4065-4072 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Katsuyoshi Endo et al.: "Atomic Structure of the Si(001)c(4x4) Formed by the Heating-up Process after Wet Cleaning and its First-Principles Study"Asia-Pacific Surface & Interface Analysis Conference. 60 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 遠藤勝義 他: "高周波パルスSTM(Scanning Tunneling Microscopy)の開発"2002年度精密工学会関西支部地方定期学術講演会講演論文集(2002). 81-82 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 有馬健太, 遠藤勝義 他: "走査型トンネル顕微鏡による水素化アモルファスシリコン表面の構造"2002年度精密工学会関西支部地方定期学術講演会講演論文集(2002). 83-84 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Katsuyoshi Endo et al.: "Atomic image of hydrogen-terminated Si(001) surfaces after wet cleaning and its first-principles study"Journal of Applied physics. 91・6(inpress). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 遠藤勝義: "走査型プローブ顕微鏡の新展開"2001年度精密工学界秋季大会学術講演界講演論文集. 272-273 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 遠藤勝義 他: "STMによる湿式洗浄Si(001)表面の昇温過程の観察"2001年度精密工学界秋季大会学術講演界講演論文集. 286 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 有馬健太, 遠藤勝義 他: "走査型トンネル顕微鏡による水素化アモルファスシリコン表面の構造解析"2001年度精密工学界秋季大会学術講演界講演論文集. 287 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 遠藤勝義 他: "STMによる水素終端化Si(001)表面の昇温過程の観察"2002年度精密工学界春季大会学術講演界講演論文集. (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 遠藤勝義 他: "カ-ボンナノチューブを探針にしたSTM/SREMによるSi表面の観察"2002年度精密工学界春季大会学術講演界講演論文集. (2002)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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