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Study on Laser Trapping Probe for Measuring Fine Machined 3-D Form with High Aspect Ratio

Research Project

Project/Area Number 13450057
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionOsaka University

Principal Investigator

TAKAYA Yasuhiro  Osaka university, Department of Mechanical Engineering and Systems, Associate Professor, 大学院・工学研究科, 助教授 (70243178)

Co-Investigator(Kenkyū-buntansha) TAKAHASHI Satoru  Osaka university, Department of Mechanical Engineering and Systems, Research Associate, 大学院・工学研究科, 助手 (30283724)
MIYOSHI Takashi  Osaka university, Department of Mechanical Engineering and Systems, Professor, 大学院・工学研究科, 教授 (00002048)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥12,300,000 (Direct Cost: ¥12,300,000)
Fiscal Year 2002: ¥4,800,000 (Direct Cost: ¥4,800,000)
Fiscal Year 2001: ¥7,500,000 (Direct Cost: ¥7,500,000)
KeywordsMicropart / Nano-CMM / Micro-probe / Laser trapping / Optical fiber / Silica particle / Vibro-probe / Radiation pressure / 大気中トラップ
Research Abstract

We propose a new probing technique for the nano-CMM (Coordinate Measuring Machine) which makes it possible to measure a fine machined 3D form with high aspect ratio. The micro-particle optically trapped at the tip of sharpened optical fiber with the diameter of micrometer order and the length of millimeter order is used as the laser trapping probe.
Fundamental studies to establish such a micro-probe technique are carried out based on Finite Difference Time Domain (FDTD) simulations of radiation field at the tip of sharpened optical fiber. Moreover, in order to check basic properties for the micro-probe, the forced vibration technique of a micro-particle is developed.
Main results of this study are summarized as follows ;
(1) The simulation system based on FDTD method is developed. This system makes it possible to analyse radiation pressure for a small dielectric particle illuminated by the infrared laser light traveling in the optical fiber of which tip is sharpened in the cone shape with … More the tip radius of less than 1 μm.
(2) The simulation results make it clear that the force of 0.52 pN/mW is exerted on a silica particle of 5 μm in diameter illuminated by the infrared laser light coming out from the sharpened optical fiber with cone angle of 36 degree. It is possible to sustain a small dielectric particle at the tip of the optical fiber by radiation pressure in air.
(3) We propose the new forced vibration technique to investigate fundamental properties as a positional detection probe. The optical system with the modulated Laser Diode (LD) and the Acousto-Optic Deflector (AOD) device is developed. Using the modulated LD laser light, vibration is given to a particle by radiation pressure exerted on it. The AOD device is used for wiggling a particle in lateral direction.
(4) We measured a spring constant of the laser trapping probe, which is an important dynamical parameter as a probe for the nano-CMM, using the new forced vibration technique. Resonant frequency of 823 Hz to 870 Hz are obtained from fitting curves for amplitude and phase response with taking account of a spring-damper model. Then the spring constant of 1.4x10^<-5> N/m to 1.6x10^<-5> N/m is determined from the resonant frequency. Less

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (17 results)

All Other

All Publications (17 results)

  • [Publications] 上北将広, 三好隆志, 高谷裕浩, 高橋 哲: "レーザトラッピングによるナノCMMプローブに関する研究(第9報)-輪帯ビームプロファイルの検討"2001年度精密工学会秋季大会学術講演会講演論文集(大阪). 630-630 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 上北将広, 三好隆志, 高谷裕浩, 高橋 哲: "レーザトラッピングによるナノCMMプローブに関する研究(第10報)-強制振動型プローブの提案-"2002年度精密工学会春季大会学術講演会講演論文集(東京). 719-719 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 西川正俊, 三好隆志, 高谷裕浩, 高橋 哲: "強制振動型レーザトラッピングによる位置検出プローブの応答特性"精密工学会2002年度関西地方定期学術講演会講演論文(和歌山). 97-98 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Masatoshi NISHIKAWA, Yasuhiro TAKAYA, Satoru TAKAHASHI, Masahiro UEKITA, Takashi MIYOSHI: "Probing Technique for Microparts Using Optically Trapped Particle by Annular Beam"Proceedings of International Symposium on Photonics in Measurement (Aachen). 103-108 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yasuhiro TAKAYA, Masatoshi NISHIKAWA, Satoru TAKAHASHI, Takashi MIYOSHI: "The Microprobe For Nano-positional Detection Using Optically Forced Vibration Method"Proceedings of the 17th American Society for Precision Engineering Annual Meeting (ASPE'02)(St Louis). 367-373 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 西川正俊, 三好隆志, 高谷裕浩, 高橋 哲: "レーザトラッピングによるナノCMMプローブに関する研究(第11報)-横方向強制振動型プローブの応答特性-"2003年度精密工学会春季大会学術講演会講演論文集(東京). 465-465 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Masahiko UEKITA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI: "The Laser Trapping Probe for Nano-CMM(9th Report) -An Enhanced Annular Beam Profile"Proceedings of 2001 JSPE general meeting in autumn. 630 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Masahiro UEKITA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI: "The Laser Trapping Probe for Nano-CMM(10th Report) -Proposal of Forced Vibration Probe"Proceedings of 2002 JSPE general meeting in spring. 719 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Masatoshi NISHIKAWA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI: "Characteristics of optically trapped probe with forced oscillation"Proceedings of 2002 JSPE kansai branch meeting. 97-98 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Masatoshi NISHIKAWA, Yasuhiro TAKAYA, Satoru TAKAHASHI, Masahiro UEKITA, Takashi MIYOSHI: "Probing Technique for Microparts Using Optically Trapped Particle by Annular Beam"Proceedings of International Symposium on Photonics in Measurement. 103-108 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yasuhiro TAKAYA, Masatoshi NISHIKAWA. Satoru TAKAHASHI, Takashi MIYOSHI: "The Microprobe For Nano-positional Detection Using Optically Forced Vibration Method"Proceedings of the 17th American Society for Precision Engineering Annual Meeting (ASPE 02). 367-372 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Masatoshi NISHIKAWA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI: "Probing Technique for Micromachine Elements Using Optically Trapped Particle - Probe Particle Trapped by Wiggling Tweezer"Proceedings of 2003 JSPE general meeting in spring. 465 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 西川正俊, 三好隆志, 高谷裕浩, 高橋 哲: "強制振動型レーザトラッピングによる位置検出プローブの応答特性"精密工学会2002年度関西地方定期学術講演会講演論文. 97-98 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Masatoshi NISHIKAWA, Yasuhiro TAKAYA, Satoru TAKAHASHI, Masahiro UEKITA, Takashi MIYOSHI: "Probing Technique for Microparts Using Optically Trapped Particle by Annular Beam"Proceedings of International Symposium on Photonics in Measurement. 103-108 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 西川正俊, 三好隆志, 高谷裕浩, 高橋 哲: "レーザトラッピングによるナノCMMプローブに関する研究(第11報)-横方向強制振動型プローブの応答特性-"2003年度精密工学会春季大会学術講演会講演論文集. (発表予定). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 上北将広, 三好隆志, 高谷裕浩, 高橋 哲: "レーザトラッピングによるナノCMMプローブに関する研究(第9報)-輪帯ビームプロファイルの検討"2001年度精密工学界秋季大会学術講演界講演論文集. 大阪. 630-630 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 上北将広, 三好隆志, 高谷裕浩, 高橋 哲: "レーザトラッピングによるナノCMMプローブに関する研究(第10報)-強制振動型プローブの提案-"2002年度精密工学界春季大会学術講演界講演論文集. 東京(発表予定). (2002)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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