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DEVELOPMENT OF NOVEL THIN FILM VARISTORS BY CHEMICAL SOLUTION DEPOSITION

Research Project

Project/Area Number 13450270
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionNAGOYA UNIVERSITY

Principal Investigator

HIRANO Shin-ichi  NAGOYA UNIVERSITY, School of Eng., Dept.of Applied Chemistry, Professor, 工学研究科, 教授 (30016828)

Co-Investigator(Kenkyū-buntansha) SAKAMOTO Wataru  NAGOYA UNIVERSITY, Center for Integrated Research in Science and Engineering, Assoc.Professor, 理工科学総合研究センター, 助教授 (50273264)
KIKUTA Koichi  NAGOYA UNIVERSITY, School of Eng., Dept.of Applied Chemistry, Assoc.Professor, 工学研究科, 助教授 (00214742)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 2002: ¥1,300,000 (Direct Cost: ¥1,300,000)
KeywordsVaristor / SrTiO_3 / Chemical Solution Deposition / LaNiO_3 / Stacked Structure / バリスタ特性 / 積層構造膜 / 金属-有機化合物前駆体
Research Abstract

This work focused on the low temperature processing of novel thin film varistors by chemical solution deposition method. Fabrication of SrTiO_3/Nb:SrTiO_3/SrTiO_3 layered films with insulator/semiconductor/insulator structure could successfully synthesized by considering the starting materials, chemical additives, and heating procedures. The typical non-linear V-I character was successfully observed for the prepared thin film varistors. ESCA analysis revealed that the interlayer diffusion of the metal elements such as La, Ni, Nb was negligiblly small even after heat treatment at 700℃. Non-linear coefficient and varistor voltage for the thin film with 500 nm thickness were confirmed to be 4.5 and 38kV/cm^<-1>, respectively. The orientation of perovskite LaNiO_3 electrode films on the substrate found to be controlled by the concentration of precursor solutions. These results can be applied for processing and development of the novel varistor integrated with IC system.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (11 results)

All Other

All Publications (11 results)

  • [Publications] K.Ueno, W.Sakamoto, T.Yogo, S.Hirano: "Synthesis of Conductive LaNiO_3 Thin Films through Chemical Solution Deposition of Matal-Organics"Ceramic Transactions. 112. 305-310 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Ueno, W.Sakamoto, T.Yogo, S.Hirano: "Synthesis of Conductive LaNiO3 Thin Films by Chemical Solution Deposition"Japanese Journal of Applied Physics. 40(10). 6049-6054 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Ueno, W.Sakamoto, T.Yogo, S.Hirano: "Processing of Novel Strontium Titanium-Based Thin Film Varistors by Chemical Solution Deposition"Journal of The American Ceramic Society. 86(1). 99-104 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Ueno, W.Sakamoto, T.Yogo, S.Hirano: "Synthesis of Conductive LaNiO_3 Thin Films through Chemical Solution Deposition of Matal-Organics"Ceramic Transactions. 112. 305-310 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Ueno, W.Sakamoto, T.Yogo, S.Hirano: "Synthesis of Conductive LaNiO_3 Thin Films by Chemical Solution Deposition"Japanese Journal of Applied Physics. 40(10). 6049-6054 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Ueno, W.Sakamoto, T.Yogo, S.Hirano: "Processing of Novel Strontium Titanium-Based Thin Film Varistors by Chemical Solution Deposition"Journal of The American Ceramic Society. 86(1). 99-104 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Ueno, W.Sakamoto, T.Yogo, S.Hirano: "Processing of Movel Strontium Titanate-Based Thin-Film Varistors by Chemical Solution Deposition"J. Am. Ceram. Soc.. 86[1]. 99-104 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] W.Sakamoto, M.Mizuno, Y.Horie, T.Yogo, S.Hirano: "Chemical Solution Processing and Characterization of Highly Oriented (Ba, Ln) Nb206 [Ln : La, Gd, Dy] Thin Films"Jpn, J. Appl. Phys.. 41[1]. 6647-6652 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Hayashi, D.Togawa, M.Yamada, W.Sakamoto, S.Hirano: "Preparation and Properties of Bi_<4-x>La_xTi_3O_<12> Ferroelectric Thin Films Using Excimer UV Irradiation"Jpn. J. Appl. Phys.. 41[1]. 6814-6819 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K. Ueno, W. Sakamoto, T. Yogo, S. Hirano: "Synthesis of Conductive LaNiO_3 Thin Films through Chemical Solution Deposition of Metal-Organics"Ceramic Transactions. 112. 305-310 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K. Ueno, W. Sakamoto, T. Yogo, S. Hirano: "Synthesis of Conductive LaNiO_3 Thin Films by Chemical Solution Deposition"Japanese Journal of Applied Physics. 40・10. 6049-6054 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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