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Studies on Environmentally Friendly Photocrosslinkable Polymers

Research Project

Project/Area Number 13450382
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 高分子合成
Research InstitutionOsaka Prefecture University

Principal Investigator

SHIRAI Masamitsu  Osaka Prefecture University, Department of Applied Chemistry, Professor, 工学研究科, 教授 (00081331)

Co-Investigator(Kenkyū-buntansha) OKAMURA Haruyuki  Osaka Prefecture University, Department of Applied Chemistry, Research Associate, 工学研究科, 助手 (10316010)
SUYAMA Kannji  Osaka Prefecture University, Department of Applied Chemistry, Assistant Professor, 工学研究科, 講師 (90305649)
角岡 正弘  大阪府立大学, 工学研究科, 教授 (50081328)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥14,400,000 (Direct Cost: ¥14,400,000)
Fiscal Year 2003: ¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 2002: ¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 2001: ¥8,600,000 (Direct Cost: ¥8,600,000)
KeywordsPhotoacid Generator / Photobase Generator / Photocrossliking / Thermal degradation / Redissolution / Epoxy resin / Photocuring / Rework / 感光性高分子 / エポキシ / フォトレジスト / 光架橋高分子 / 高分子の熱分解 / ネガ型フォトレジスト
Research Abstract

1)New photoacid generators which are sensitive to 366nm light were synthesized from sulfonic acid anhydride and oximes or N-hydroxyimide and characterized. In the molecular design fluorenone or thioxantone derivatives were used as chromophores for 36nm light. The photoacid generators obtained were thermally stable and highly photosensitive to 366nm light.
2)We have synthesized a novel crosslinker which has three epoxy moieties and thermally degradable carboxylic acid ester moieties in a molecule. On irradiation at 254nm, the thin films obtained from the mixture of the triepoxy crosslinker, polyvinylphenol and photoacid generator became insoluble in solvents due to the formation of networks. The crosslinked materials became soluble in solvent when baked at relatively higher temperatures (-160 ℃). It was found that this system could be applied for 366nm or 436nm light if the photoacid generators were properly selected. We have also synthesized a novel monomer which has an epoxy moiety and thermally degradable sulfonic acid ester moieties in a molecule. The polymer was obtained by the polymerization of the monomer. On irradiation at 254nm, the thin films obtained from the polymer and photoacid generator became insoluble in solvents due to the formation of networks. The crosslinked materials became soluble in water when baked at relatively higher temperatures.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] M.Shirai: "Photo-Cross-Linkable Polymers Having Degradable Properties on Heating"Chemistry of Materials. 15. 4075-4081 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.Iwashima: "Synthesis of i- and g-Line Sensitive Photoacid Generators and Their Application to Photopolymer Systems"Journal of Photopolymer Science and Technology. 16. 91-96 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Suyama: "Photo- and Thermochemical Behavior of Quaternary Ammonium Thiocyanates and Their Use as Crosslinkers"Journal of Photopolymer Science and Technology. 16. 83-86 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Okamura: "Evaluation of Quantum Yields for Decomposition of i-Line Sensitive Photoacid Generators"Journal of Photopolymer Science and Technology. 16. 701-706 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 白井 正充: "再可溶化型光架橋・硬化樹脂"色材協会誌. 76. 301-306 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Shirai(分担執筆): "Polymers for Microelectronics and Nanolectronics (ACS Symposium Series 874)"American Chemical Society, Washington DC. 12 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Shirai, et al.: "Photo-Cross-Linkable Polymers Having Degradable Properties on Heating"Chem.Mater. 15. 4075-4081 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.Iwashima, et al.: "Synthesis of i-and g-Line Sensitive Photoacid Generators and Their Application to Photopolymer Systems"J.Photopolym.Sci.Technol.. 16. 91-96 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Suyama, et al.: "Photo-and Thermochemical Behavior of Quaternary Ammonium Thiocyanates and Their Use as Crosslinkers"J.Photopolym.Sci.Technol.. 16. 83-86 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Okamura, et al.: "Evaluation of Quantum Yields for Decomposition of i-Line Sensitive Photoacid Generators"J.Photopolym.Sci.Technol.. 16. 83-86 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Shirai: "Photo-Cross-Linkable Polymers Having Degradable Properties on Heating"Chemistry of Materials. 15. 4075-4081 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] C.Iwashima: "Synthesis of i- and g-Line Sensitive Photoacid Generators and Their Application to Photopolymer Systems"Journal of Photopolymer Science and Technology. 16. 91-96 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Suyama: "Photo- and Thermochemical Behavior of Quaternary Ammonium Thiocyanates and Their Use as Crosslinkers"Journal of Photopolymer Science and Technology. 16. 83-86 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Okamura: "Evaluation of Quantum Yields for Decomposition of i-Line Sensitive Photoacid Generators"Journal of Photopolymer Science and Technology. 16. 701-706 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 白井正充: "再可溶化型光架橋・硬化樹脂"色材協会誌. 76. 301-306 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 白井正充: "光酸・塩基発生剤の開発とその新規フォトポリマー設計における活用"日本写真学会誌. 66. 355-366 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Shirai(分担執筆): "Polymers for Microelectronics and Nanolectronics (ACS Symposium Series 874)"American Chemical Society, Washington DC. 12 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Masamitsu Shirai: "Photocrosslinkable Polymers with Thermally Degradable Properties"Chem.Mater.. 14・1. 334-340 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Masamitsu Shirai: "Photocrosslinkable Polymers with Redissolution Properties"Chem.Lett.. 940-941 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 白井正充: "再可溶化できる光架橋型高分子"未来材料. 2・9. 20-25 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Masamitsu Shirai: "Development of Novel Photosensitive Polymer Systems Using Photoacid and Photobase Generators"J.Photopolym.Sci.Technol.. 15・5. 715-730 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Masamitsu Shirai: "Thermally Degradable Photocrosslinking Polymers"Polym.Mater.Sci.Eng.. 87. 384-386 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Shiri他: "Photocrosslinkable Polymers with Thermally Degradable Propcrty"Chem.Mater. 14・1. 334-340 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 白井正充: "再溶解能を有する光架橋性ポリマー"高分子加工. 50・7. 290-297 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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