|Budget Amount *help
¥4,400,000 (Direct Cost: ¥4,400,000)
Fiscal Year 2002: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 2001: ¥3,000,000 (Direct Cost: ¥3,000,000)
Recently, a development of noble high-brightness and wavelength-tunable X-ray source has been attracting renewed attention in many research fields. Although one of the ideal X-ray sources is synchrotron radiation facility, this type of the X-ray sources is not adequate for our experiments since the machine time is very limited. In this regard, the development of the compact high-brightness and wavelength-tunable X-ray source for conventional use is required. The present research, therefore, aims at developing a noble high-brightness and wavelength-tunable nano-film-rotor-type X-ray source by optimizing the basic construction, i.e., the incident angle of electrons, the take-off angle of X-ray, the materials of film on the anode, the thickness of the film, using the Monte Carlo (MC) simulation of X-ray generation under electron bombardment.
As results of the present research are summarized as follows:
1. development of the MC code which can be reproduce the absolute intensity of the X-ray
spectrum excited by the electron impact with high accuracy.
2. optimizing the W/Cu type anode using the developed MC simulation
These results confirmed that the present MC code is applicable to the optimization of the basic construction of the X-ray source and the optimization can be achieved by reducing the thickness of the film on the rotor. In addition, the developed MC code is confirmed to be applicable to the quantitative electron probe microanalysis of the very thin layer using low energy electrons.
Further application of the MC simulation was performed.
3. designing the chemical vapor deposition scanning electron microscope (CVD-SEM)
4. derivation of effective energy loss functions (EELFs) and the database construction of EELFs
In (3), it is confirmed that the MC code, which has been, conventionaly used as a tool to analyze the experimental data, is very effective for simulation-based-designing of the noble experimental apparatus. In (4), the derivation and the database construction of the EELFS, which are very effective to understand quantitatively the experimental spectrum obtained by the surface electron spectroscopies (X-ray photoelectron spectroscopy and Auger electron spectroscopy), were performed. Less