| Project/Area Number |
13555025
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | KYOTO UNIVERSITY |
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Principal Investigator |
KOMAI Kenjiro Kyoto University, Faculty of Engineering, Professor, 工学研究科, 教授 (70025948)
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| Co-Investigator(Kenkyū-buntansha) |
TANI Shuichi Mitsubishi Electric Corp., Researcher, 先端技術総合研究所, マネージャー(研究職)
TANAKA Kazuto Kyoto University, Faculty of Engineering, Research Associate, 工学研究科, 助手 (50303855)
MINOSHIMA Kohji Kyoto University, Faculty of Engineering, Associate Professor, 工学研究科, 助教授 (50174107)
TSUGAI Masahiro Mitsubishi Electric Corp., Researcher, 先端技術総合研究所, マネージャー(研究職)
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| Project Period (FY) |
2001 – 2002
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| Project Status |
Completed (Fiscal Year 2002)
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| Budget Amount *help |
¥13,800,000 (Direct Cost: ¥13,800,000)
Fiscal Year 2002: ¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2001: ¥10,100,000 (Direct Cost: ¥10,100,000)
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| Keywords | Micro material / Thin film / Mechanical properties / Tensile test / Strain measurement / Poly-Si thin film / Fatigue / Elastic modulus / 疲労試験 |
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| Research Abstract |
In order to develop a reliable micro machine and MEMS in a service operation, much care must be taken into micro mechanical evaluation, i.e., mechanical properties of μm-sized microelements including fatigue behavior. However, the evaluation method has not been well established yet. In this study, the testing system of a thin microelement has been developed to evaluate the mechanical properties; the tensile strength, elastic modulus, fatigue strength and so on, and the evaluation methods for thin microelement are established. The system consists of a micromechanical tensile testing machine actuated by a PZT driven positioning stage, a micro manipulation system, a non-contact strain measurement system with a help of a double field of view microscope. The system is basically designed for poly-Si thin microelement with 3.5μm thick and 10μm wide. When conducting the uni-axial tensile test, the most important and difficult thing is to establish the method of gripping the specimen. In this study, a gripping method with glue is developed and successfully applied to the uni-axial tensile test without any slipping at the grip. Moreover the testing system is installed on an AFM stage and in situ observation of specimen surface is successfully done. The testing machine and a control program are improved to conduct the fatigue tests of thin microelement not only in laboratory air but also in water.
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