| Project/Area Number |
13555232
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
工業分析化学
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| Research Institution | KYOTO UNIVERSITY |
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Principal Investigator |
KAWAI Jun Kyoto Univ., Dept.of Mater.Sci.Eng., Professor, 工学研究科, 教授 (60191996)
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| Co-Investigator(Kenkyū-buntansha) |
TAKENAKA Hisataka NTT-AT, Researcher, 研究員
TANABE Teruo Kyoto Univ., Dept.of Mater.Sci.Eng., Associate Professor, 工学研究科, 助教授 (90026237)
EKTESSABI Ali Kyoto Univ., IIC, Professor, 国際融合創造センター, 教授 (50232939)
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| Project Period (FY) |
2001 – 2003
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| Project Status |
Completed (Fiscal Year 2003)
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| Budget Amount *help |
¥13,100,000 (Direct Cost: ¥13,100,000)
Fiscal Year 2003: ¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 2002: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 2001: ¥6,200,000 (Direct Cost: ¥6,200,000)
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| Keywords | X-ray traveling wave / X-ray reflection / refraction / surface analysis |
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| Research Abstract |
We have found in the present research that the measurement of the white X-ray reflectivity for multilayer samples is a powerful tool to characterize multilayers (under patent application), and that the X-ray reflectivity exhibits pseudo-symmetric pattern for X-ray wave guide phenomena. This surface analysis method is based on the physical phenomena that X-rays higher energy than the critical energy will reflect, while X-rays lower energy than the critical energy will refract at the interface. Similar surface analysis methods exist but they have a problem of the saturation of the X-ray detector Because the incident direct strong X-rays impinge on the detector window. In the present research, we have avoided the saturation and consequently the present method is highly effective for the practical use as a surface analysis method. We have developed a computer program to analyze the experimental data, and the source code of it has been open in the Web page, and it can be freely downloaded. When the X-ray reflectivity is measured at the off-equiangular reflection, the energy spectrum tends to shift to the lower energy side, which has been successfully reproduced theoretically. Therefore the surface can be characterized by the measurement of an energy spectrum with the change of the angle of incidence. We have also made a portable X-ray analyzer using an electric battery, and succeeded to analyze ppm level elements on the analyte surface. The reason why the pseudo-symmetric pattern is observable is an open problem ; the pseudo-symmetric pattern resembles the so-called Yoneda wing, which is closely related to the surface roughness. Therefore the pseudo-symmetric pattern may have an information on the surface roughness. In summary, we have developed a surface analysis method by comparing the measurement of X-ray reflectivity and theoretical calculation, using surface traveling X-ray waves guided through the surface and interfaces.
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