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Methodological Development of Large Cluster Ion Generation by Swift-Heavy-Ion-Induced Electronic Sputtering

Research Project

Project/Area Number 13558061
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Nuclear engineering
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

IMANISHI Nobutsugu  KYOTO UNIVERSITY, GRADUATE SCHOOL OF ENGINEERING, PROFESSOR, 工学研究科, 教授 (10027138)

Co-Investigator(Kenkyū-buntansha) IMAI Makoto  KYOTO UNIVERSITY, GRADUATE SCHOOL OF ENGINEERING, INSTRUCT., 工学研究科, 助手 (60263117)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥11,100,000 (Direct Cost: ¥11,100,000)
Fiscal Year 2003: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2002: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 2001: ¥8,100,000 (Direct Cost: ¥8,100,000)
Keywordssputtering / cluster ions / heavy ion irradiation / electronic sputtering / nanotechnology / nanoscale processing / emission energy distribution / laser irradiation
Research Abstract

We previously found that large cluster ions are emitted with extraordinarily high sputtering yields in an electronic-collision-dominant velocity range. Energy distribution of these cluster ions is very narrow compared to those emitted through the linear collision cascade process in a nuclear-collision-dominant velocity range. The aim of the present study is to develop energy selected pico-to nano-ampere beams of cluster ion with any size and chemical species by applying the observed phenomena.
1) The ion yield of the group Vth element emitted from III-V semiconductive chemical compounds strongly depends on the electronic stopping power because multiplicity of holes produced in the valence band plays an important role in the surface ionization process of outgoing atoms.
2) It has been found first that cluster ions are produced from the III-V semiconductive chemical compounds by swift heavy ion bombardment.
3) Emission yields of cluster ions containing the group Vth elements show an incident energy dependence different from those composed of the group IIIth elements only. This is because the group Vth atoms have high ionization potentials and the ionization efficiency depends so much on the multiplicity of holes which increases with increasing electronic stopping power, as shown in the group Vth ions.
4) Yields of cluster ions emitted from the semiconductive chemical compounds show a power law dependence on size whose exponent is independent of incident energy.
5) Beam of cluster ions can be produced by using insulating and semiconductive materials.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (28 results)

All Other

All Publications (28 results)

  • [Publications] 二宮 啓: "Material-Dependence of Electronic Sputtering Induced by MeV-Energy Heavy Ions"Vacuum. 73. 79-87 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 二宮 啓: "Cluster-Ion Emission from Semiconductive Chemical Compounds under MeV-Energy Heavy Ion Bombardment"Nuclear Instruments and Methods B. 209. 233-238 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 二宮 啓: "Material-Dependent Emission Mechanism of Secondary Atomic Ions from Solids under MeV-Energy Heavy Ion Bombardment"Nuclear Instruments and methods B. 193. 745-750 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 二宮 啓: "Secondary Ion Emission from Insulators and Semiconductors under MeV-Energy Heavy Ion Bombardment"Proc.of the 18^<th> Japan-Russia Int.Symp.on Interaction of Fast Charged Particles with Solids.Kyoto Japan, 2002. 141-145 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 二宮 啓: "Dependence of Heavy Ion Induced Secondary Ion Emission on Electric Conductivity in MeV Energy Range"Proceedings of Sixteenth International Conference on Application of Accelerators in Research and Industry. 543-547 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 〓 建明: "Mechanism of Secondary Ion Emission from an Al Sample under Mev Heavy Ion Bombardment"Proceedings of Sixteenth International Conference on Application of Accelerators in Research and Industry. 145-148 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Imanishi, S.Ninomiya: "Nuclear and Electronic Sputtering Induced by High Energy Heavy Ions (Review)"Journal of Nuclear and Radiochemical Sciences. (In press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Ninomiya, N.Imanishi: "Material-Dependence of Electronic Sputtering Induced by MeV-Energy Heavy Ions"Vacuum. 73. 79-87 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Ninomiya, N.Imanishi et al.: "Cluster-Ion Emission from Semiconductive Chemical Compounds under MeV-Energy Heavy Ion Bombardment"Nuclear Instruments and Methods B. 209. 233-238 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Ninomiya, N.Imanishi et al.: "Material-Dependent Emission Mechanism of Secondary Atomic Ions from Solids under MeV-Energy Heavy Ion Bombardment"Nuclear Instruments and Methods B. 193. 745-750 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Ninomiya, N.Imanishi et al.: "Secondary Ion Emission from Insulators and Semiconductors under MeV-Energy Heavy Ion Bombardments"Proc.of the 18^<th> Japan-Russia Int.Symp.on Interaction of Fast Charged Particles with Solids. 141-145 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Ninomiya, N.Imanishi et al.: "Dependence of Heavy Ion Induced Secondary Ion Emission on Electric Conductivity in MeV Energy Range"Proc.16^<th> Int.Conf.on Application of Accelerators in Research and Industry. 543-547 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] J.Xue, N.Imanishi et al.: "Mechanism of Secondary Ion Emission from an Al Sample under MeV Heavy Ion Bombardment"Proc.16^<th> Int.Conf.on Application of Accelerators in Research and Industry. 145-148 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 今西信嗣: "Nuclear and Electronic Sputtering Induced by High Energy Heavy Ions"Journal of Nuclear and Radiochemical Sciences. (In press). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 二宮 啓: "Material-Dependence of Electronic Sputtering Induced by MeV-Energy Heavy Ions"Vacuum. 73. 79-87 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 二宮 啓: "Cluster-Ion Emission from Semiconductive Chemical Compounds under MeV-Energy Heavy Ion Bombardment"Nuclear Instruments and Methods B. 209. 233-238 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 二宮 啓: "Secondary Ion Emission from A^<III>B^V Compounds Semiconductors under MeV-Energv Heavy Ion Bombardment"Annual Report of Quantum Science and Engineering Center. 5. 39-42 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 中田由彦: "Reflectron Time-of-Flight Mass Spectrometry for Secondary Ion Analysis"Annual Report of Quantum Science and Engineering Center. 5. 43-45 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 二宮 啓: "Material-Dependent Emission Mechanism of Secondary Atomic Ions from Solids under MeV-Energy Heavy Ion Bombardment"Nuclear Instruments and methods B. 193. 745-750 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 二宮 啓: "Cluster-Ion Emission from Semiconductive Chemical Compounds under MeV-Energy Heavy Jon Bombardment"Nuclear Instruments and methods B. (In press).

    • Related Report
      2002 Annual Research Report
  • [Publications] 二宮 啓: "Secondary Ion Emission from Insulators and Semiconductors under MeV-Energy Heavy Ion Bombardment"Proc. of the 18th Japan-Russia Int. Symp. on Interaction of Fast Charged Particles with Solids. Kyoto Japan, 2002. 141-145 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 二宮 啓: "Secondary Ion Emission from Semiconductive Materials under MeV-Energy Heavy Ion Bombardment"Annual Report of Quantum Science and Engineering Center 2002. 4. 1-3 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 今田 千景: "Cluster Ion Emission from GaSb and InSb by MeV Heavy Ion Bombardment"Annual Report of Quantum Science and Engineering Center 2002. 4. 4-6 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 永井雅史: "Secondaxy Ion Emission from SiO_2 Surface by Laser Irradiation"Annual Report of Quantum Science and Engineering Center 2002. 4. 7-9 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 二宮 啓: "Dependence of Heavy Ion Induced Secondary Ion Emission on Electric Conductivity in MeV Energy Range"Proceedings of Sixteenth International Conference on Application of Accelerators in Research and Industry. 543-547 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 〓 建明: "Mechanism of Secondary Ion Emission from an Al Sample under MeV Heavy Ion Bombardment"Proceedings of Sixteenth International Conference on Application of Accelerators in Research and Industry. 145-148 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 二宮 啓: "Material-Dependent Emission Mechanism of Secondary Atomic Ions from Solids under MeV Energy Heavy Ion Bombardment"Nuclear Instruments and Methods B. (in press).

    • Related Report
      2001 Annual Research Report
  • [Publications] 五味俊一: "Dependence of Electric Sputtering Process on Electric Conductivity"Annual Report of Quantum Science and Engineering Center, Kyoto University. 3. 11-14 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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