SEM-SPM system based on the next generation multimodal microscopy
| Project/Area Number |
13650031
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
表面界面物性
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| Research Institution | Kogakuin University |
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Principal Investigator |
OHO Eisaku Kogakuin University, Faculty of Engineering, Prof., 工学部, 教授 (40194633)
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| Project Period (FY) |
2001 – 2002
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| Project Status |
Completed (Fiscal Year 2002)
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| Budget Amount *help |
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2002: ¥400,000 (Direct Cost: ¥400,000)
Fiscal Year 2001: ¥2,900,000 (Direct Cost: ¥2,900,000)
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| Keywords | digital image processing / AFM / SPM / SEM / image enhancement / multimodal microscopy / variable pressure / 画像処理 / マルチモーダル / ディジタル走査 |
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| Research Abstract |
In multimodal microscopy, that is, an useful combination between SEM, SPM (scanning probe microscope) and VM(video microscope)), this technology will be actively applied in the near future in order to improve the performance and usability of the hybrid SEM system. The system might be difficult to use practically, because it is a combination between two microscopes with greatly different characteristics.
In the field of SEM, we can find several techniques for obtaining height information. Surface topography measurements using digital image processing roughly fall into one of three categories, i.e., multiple detectors, focusing, and stereometric methods. By using multiple detectors, detected intensities (either BSE or SE signal) may be related to the surface slope of the area being scanned by the incident beam. The profile is obtained by numerical integration of the slopes in the direction of the scan line. In the reconstruction process of surface topographies, the noise in the digitized detector signals accumulates in an unpredictable way during the course of the integration, thereby leading to artifacts that heavily distort the resulting surface. In order to settle this problem, used least-square-techniques which are a sort of smoothing techniques of an image. This type of system is suitable for specimens with protrusions, or depressions with less steep slopes such as compact disks. In order to improve the accuracy of the surface topography, in multiple detectors system, setting suitable parameters and use of digital image processing techniques are performed. As a result, its accuracy is similar to that of AFM in low magnification observation.
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Report
(3 results)
Research Products
(1 results)
