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Laser precision micro-processing system for IT device

Research Project

Project/Area Number 13650280
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionOsaka University

Principal Investigator

MIYAMOTO Isamu  Osaka University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (90029273)

Co-Investigator(Kenkyū-buntansha) TAKENO Shozui  Mitsubishi Electric Co., Production Technology Center (researcher), 生産技術センター, 研究員
SANO Tomokazu  Osaka University, Institute of Laser Engineering, Assistant Professor, 大学院・工学研究科, 助手 (30314371)
OHMURA Etsuji  Osaka University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (90144435)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 2002: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2001: ¥1,900,000 (Direct Cost: ¥1,900,000)
Keywordslaser ablation / ultrafast laser / printed circuit board / second harmonic generation / computer simulation / theoretical analysis / molecular dynamics / laser optics / レーザ加工 / 精密微細加工 / 電子デバイス / モニタリング / シミュレーション / 非線形光学
Research Abstract

Purpose of this study is to develop an innovative system for precision micro-processing with short pulse laser or short wavelength laser for further development of IT devices. The investigated results are reported here on the following subjects; (1) molecular dynamics analysis of laser ablation, (2) analysis on resin removal in laser drilling of printed circuit board, and (3) analysis of conversion efficiency and beam profile in second harmonic generation. Main results obtained are summarized as follows: (1) Applying the modified molecular dynamics method that Ohmura who is one of the members has developed, ablation phenomena of aluminum with picosecond pulse laser irradiation whose intensity is Gaussian distribution was analyzed. As a result, it was revealed that there are two types in ablation process. One is explosive ablation, which occurs by ultrashort pulse irradiation. The other is calm ablation, which occurs by relatively long pulse irradiation. Scattering angle and scattering velocity of ablation particles, their size and number, energy per ablation atom and ablation energy depend on the ablation types deeply. (2) About laser drilling of printed circuit board, one-dimensional non-steady heat conduction problem of two-layers composed of resin and metal was analyzed with the finite element method (FEM), considering resinous evaporation. Validity of analysis method was verified by comparing with experimental results. (3) Temperature dependence of conversion efficiency and output-beam profile were examined theoretically by solving the coupling problem composed of heat conduction equation and complex amplitude equations. The latter equations were derived by Ohmura, considering laser absorption in the crystal. Effect of temperature control was also investigated quantitatively, supposing KH2PO4 (KDP) which is a negative uniaxial crystal.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (87 results)

All Other

All Publications (87 results)

  • [Publications] 野口 暁: "プリント基板のレーザ穴あけにおける樹脂除去の解析"精密工学会誌. 69-4. 536-541 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 野村和史: "ガウシアンビーム照射による第二高調波変換効率の理論的解析"精密工学会誌. 69-3. 390-395 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 大村悦二: "非線形光学結晶によるレーザ光吸収の第二高調波発生効率への影響"精密工学会誌. 69-2. 252-257 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hiroaki Nishiyama: "Thermo-and Photo-Sensitive GeO_2-B_2O_3-SiO_2 Thin Glass Films"Japan Journal Applied Physics. 42-2A. 559-563 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kazufumi Nomura: "Theoretical Study on SHG Conversion Efficiency for Gaussian Beam and Control of Its Decline"Proc. of ICALEO2002. Vol.94. 903-912 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Etsuji Ohmura: "Laser-Absorption Dependence of SHG Conversion Efficiency by Nonlinear Optical Crystal"Proc. of ICALEO2002. Vol.94. 1631-1640 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Junji Nishii: "Thermally Stabilized Photoinduced Bragg Grating"Applied Physics Letters. 81-13. 2364-2366 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 大村悦二: "ピコ秒パルスレーザアブレーションにおける微粒子の飛散-超短パルスレーザによる材料加工現象第4報-"溶接学会論文集. 20-3. 355-362 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Etsuji Ohmura: "Temperature Dependence of SHG by Nonlinear Optical Crystal"Proc. of 2002 Japan-USA Symp. on Flexible Automation (2002 JUSFA). 781-786 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Satoru Noguchi: "Analysis on Resin Removal in Laser Drilling of Printed Circuit Board"Proc. of SPIE. Vol.4830. 46-51 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Makoto Murai: "Electron Emission at an Early Stage of Femtosecond Pulsed Laser Ablation"Proc. of SPIE. Vol.4830. 467-470 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Tomohiro Okamoto: "Femtosecond Laser Ablation of Cr-SiO_2 Binary Mask"Proc. of SPIE. Vol.4830. 510-514 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Seo-Jeong Park: "Microwelding of Ultra Thin Metal Foil Using Yb-Fiber Laser"Proc. of SPIE. Vol.4830. 52-56 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Etsuji Ohmura: "Molecular Dynamics Analysis of Picosecond Pulse Laser Ablation"Proc. of SPIE. Vol.4830. 462-466 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kazufumi Nomura: "Theoretical Analysis of SHG Conversion Efficiency of Nonlinear Optical Crystal with Gaussian Beam Irradiation"Proc. of SPIE. Vol.4830. 330-335 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Etsuji Ohmura: "Influence of Laser Absorption by Nonlinear Optical Crystal on SHG Efficiency"Proc. of SPIE. Vol.4830. 307-312 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Etsuji Ohmura: "Scattering of Particles Ablated by Ultrashort-Pulse Laser"Proc. of ICALEO2001. Vol.90. 1658-1665 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Isamu Miyamoto: "High Speed Drilling of Thin Silicon Wafer by UV Laser"Proc. of ICALEO2001. Vol.90. 1612-1619 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 大村悦二: "レーザアブレーションにおける蒸発粒子の飛散"精密工学会誌. 67-11. 1884-1890 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 大村悦二: "Siのレーザ加工の三次元分子動力学シミュレーション-超短パルスレーザによる材料加工現象(第3報)-"溶接学会論文集. 19-4. 649-655 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 福本一郎: "ピコ秒パルスレーザアブレーションプロセスの分子動力学解析-超短パルスレーザによる材料加工現象(第2報)-"溶接学会論文集. 19-4. 641-648 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Etsuji Ohmura: "Simulation of the Ablation Process by Molecular Dynamics"Proc. of 1st Int. WLT-Conf. on Lasers in Manufacturing. 105-111 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Etsuji Ohmura: "Molecular Dynamics Analysis of Ultrafast Laser Ablation"Proc. of 2nd euspen Int. Conf.. 50-53 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Etsuji Ohmura: "Temperature Dependence of SHG Conversion Efficiency of Nonlinear Optical Crystal"Proc. of SPIE. Vol.4426. 489-492 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Etsuji Ohmura: "Scattering of Evaporation Particles in Ultrashort-Pulse Laser Ablation"Proc. of SPIE. Vol.4426. 66-69 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 福本一郎: "ガウシャンビーム照射によるレーザ衝撃現象の分子動力学解析"精密工学会誌. 67-6. 916-921 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S. Noguchi et al.: "Analysis on Resin Removal in Laser Drilling of Printed Circuit Board"J. Japan Soc. Prec. Eng.. 69-4. 536-541 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Nomura et al.: "Theoretical Analysis of SHG Conversion Efficiency Due to Gaussian Beam Irradiation"J. Japan Soc. Prec. Eng.. 69-3. 390-395 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura et al.: "Influence of Laser Absorption by Nonlinear Optical Crystal on SHG Efficiency"J. Japan Soc. Prec. Eng.. 69-2. 252-257 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H. Nishiyama et al.: "Thermo- and Photo-Sensitive GeO_2-B_2O_3-SiO_2 Thin Glass Films"Japan J. Appl. Phys.. 42-2A. 559-563 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Nomura et al.: "Theoretical Study on SHG Conversion Efficiency for Gaussian Beam and Control of Its Decline"Proc. ICALEO2002. 903-912 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura et al.: "Laser-Absorption Dependence of SHG Conversion Efficiency by Nonlinear Optical Crystal"Proc. ICALEO2002. 1631-1640 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] J. Nishii et al.: "Thermally Stabilized Photoinduced Bragg Grating"Appl. Phys. Lett.. 81-13. 2364-2366 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura et al.: "Scattering Simulation of Fine Particles in Picosecond-Pulse Laser Ablation -Materials Processing Phenomena by Ultrashort-pulse Laser (Report 4)-"Tran. Japan Welding Soc.. 20-3. 355-362 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura et al.: "Temperature Dependence of SHG by Nonlinear Optical Crystal"Proc. of 2002 Japan-USA Symp. on Flexible Automation (2002 JUSFA). 781-786 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S. Noguchi et al.: "Analysis on Resin Removal in Laser Drilling of Printed Circuit Board"Proc. SPIE. 4830. 46-51 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M. Murai et al.: "Electron Emission at an Early Stage of Femtosecond Pulsed Laser Ablation"Proc. SPIE. 4830. 467-470 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Okamoto et al.: "Femtosecond Laser Ablation of Cr-SiO_2 Binary Mask"Proc. SPIE. 4830. 510-514 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S.-J. Park et al.: "Microwelding of Ultra Thin Metal Foil Using Yb-Fiber Laser"Proc. SPIE. 4830. 52-56 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura: "Molecular Dynamics Analysis of Picosecond Pulse Laser Ablation"Proc. SPIE. 4830. 462-466 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Nomura et al.: "Theoretical Analysis of SHG Conversion Efficiency of Nonlinear Optical Crystal with Gaussian Beam Irradiation"Proc. SPIE. 4830. 330-335 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura et al.: "Influence of Laser Absorption by Nonlinear Optical Crystal on SHG Efficiency"Proc. SPIE. 4830. 307-312 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura et al.: "Scattering of Particles Ablated by Ultrashort-Pulse Laser"Proc. of ICALEO2001. 90. 1658-1665 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] I. Miyamoto et al.: "High Speed Drilling of Thin Silicon Wafer by UV Laser"Proc. of ICALEO2001. 90. 1612-1619 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura et al.: "Scattering of Evaporation Particles in Laser Ablation"J. Japan Soc. Prec. Eng.. 67-11. 1884-1890 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura et al.: "Three Dimensional Molecular Dynamics Simulation on Laser Ablation of Monocrystalline Silicon -Materials Processing Phenomena by Ultrashort-pulse Laser (Report 3)-"Tran. Japan Welding Soc.. 19-4. 649-655 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] I. Fukumoto et al.: "Molecular Dynamics Analysis of Picosecond Pulse Laser Ablation Process -Materials Processing Phenomena by Ultrashort-pulse Laser (Report 2)-"Tran. Japan Welding Soc.. 19-4. 641-648 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E, Ohmura et al.: "Simulation of the Ablation Process by Molecular Dynamics"Proc. 1st Int. WLT-Conf. on Lasers in Manufacturing. 105-111 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura et all.: "Molecular Dynamics Analysis of Ultrafast Laser Ablation"Proc. 2nd euspen Int. Conf.. 50-53 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura et al.: "Temperature Dependence of SHG Conversion Efficiency of Nonlinear Optical Crystal"Proc. of SPIE. 4426. 489-492 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E. Ohmura et al.: "Scattering of Evaporation Particles in Ultrashort-Pulse Laser Ablation"Proc. of SPIE. 4426. 66-69 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] I. Fukumoto et al.: "Molecular Dynamics Analysis of Laser Shock Phenomena due to Gaussian Beam Irradiation"J. Japan Soc. Prec. Eng.. 67-6. 916-921 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 福本一郎, 大村悦二: "ガウシャンビーム照射によるレーザ衝撃現象の分子動力学解析"精密工学会誌. 67-6. 916-921 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] 福本一郎, 大村悦二, 宮本勇: "ピコ秒パルスレーザアブレーションプロセスの分子動力学解析-超短パスルレーザによる材料加工現象(第2報)"溶接学会論文集. 19-4. 641-648 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] 大村悦二, 石坂有里, 福本一郎, 宮本勇: "Siのレーザ加工の三次元分子動力学シミュレーション-超短パルスレーザによる材料加工現象(第3報)"溶接学会論文集. 19-4. 649-655 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] 大村悦二, 福本一郎, 宮本勇: "レーザアブレーションにおける蒸発粒子の飛散"精密工学会誌. 67-11. 1884-1890 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] E.Ohmura, I.Fukumoto, I.Miyamoto: "Molecular Dynamics Analysis of Ultrafast Laser Ablation"Proceedings of 2nd euspen International Conference. 50-53 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] E.Ohmura, I.Fukumoto, I.Miyamoto: "Scattering of Evaporation Particles in Ultrashort-Pulse Laser Ablation"Proceeding of SPIE. Vol.4426. 66-69 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] E.Ohmura, T.Taniguchi, I.Miyamoto: "Temperature Dependence of SHG Conversion Effi-ciency of Nonlinear Optical Crystal"Proceedings of SPIE. Vol.4426. 489-492 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] E.Ohmura, I.Fukumoto, I.Miyamoto: "Simulation of the Ablation Process by Molecular Dynamics"Proceedings of 1st International WLT-Conference on Lasers in Manufacturing. 105-111 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] I.Miyamoto, S.Asada, T.Sano, E.Ohmura: "High Speed Drilling of Thin Silicon Wafer by UV Laser"ICALEO 2001 Congress Proceedings, Laser Institute of America. Vol.90. 1612-1619 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] E.Ohmura, I.Fukumoto, I.Miyamoto: "Scattering of Particles Ablated by Ultrashort-Pulse Laser"ICALEO 2001 Congress Proceedings, Laser Institute of America. Vol.90. 1658-1665 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] 大村悦二, 福本一郎, 宮本勇: "ピコ秒パルスレーザアブレーションにおける微粒子の飛散-超短パルスレーザによる材料加工現象(第4報)-"溶接学会論文集. 20-3. 649-655 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] E.Ohmura, K.Nomura, I.Miyamoto: "Influence of Laser Absorption by Nonlinear Optical Crystal on SHG Efficiency"Proceedings of SPIE. Vol.4830. 307-312 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Nomura, E.Ohmura, I.Miyamoto: "Theoretical Analysis of SHG Conversion Efficiency of Nonlinear Optical Crystal with Gaussian Beam Irradiation"Proceedings of SPIE. Vol.4830. 330-335 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] E.Ohmura, I.Fukumoto, I.Miyamoto: "Molecular Dynamics Analysis of Picosecond Pulse Laser Ablation"Proceedings of SPIE. Vol.4830. 462-466 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S-J.Park, E.Ohmura, I.Miyamoto: "Microwelding of Ultra Thin Metal Foil Using Yb-Fiber Laser"Proceedings of SPIE. Vol.4830. 52-56 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Okamoto, Y.Morishige, E.Ohmura, T.Sano, I.Miyamoto: "Femtosecond Laser Ablation of Cr-SiO2 Binary Mask"Proceedings of SPIE. Vol.4830. 510-514 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Murai, T.Sano, E.Ohmura, I.Miyamoto: "Electron Emission at an Early Stage of Femtosecond Pulsed Laser Ablation"Proceedings of SPIE. Vol.4830. 462-466 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Noguchi, E.Ohmura, I.Miyamoto: "Analysis on Resin Removal in Laser Drilling of Printed Circuit Board"Proceedings of SPIE. Vol.4830. 46-51 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] E.Ohmura, K.Nomura, I.Miyamoto: "Temperature Dependence of SHG by Nonlinear Optical Crystal"Proceedings of 2002 Japan-USA Symposium on Flexible Automation. 781-786 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] J.Nishii, K.Kintaka, H.Nishiyama, T.sano, E.Ohmura, I.Miyamoto: "Thermally Stabilized Photoinduced Bragg Grating"Applied Physics Letters. 81-13. 2364-2366 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] E.Ohmura, K.Nomura, I.Miyamoto: "Laser-Absorption Dependence of SHG Conversion Efficiency by Nonlinear Optical Crystal"ICALEO 2001 Congress Proceedings, Laser Institute of America. (in press). (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Nomura, E.Ohmura, I.Miyamoto: "Theoretical Study on SHG Conversion Efficiency for Gaussian Beam and Control of Its Decline"ICALEO 2001 Congress Proceedings, Laser Institute of America. (in press). (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 野村和史, 大村悦二, 宮本勇: "非線形光学結晶によるレーザ光吸収の第二高調波発生効率への影響"精密工学会誌. 69-2. 252-257 (2003)

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  • [Publications] 大村悦二, 野村和史, 宮本勇: "ガウシアンビーム照射による第二高調波変換効率の理論的解析"精密工学会誌. 69-3(発行予定). (2003)

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  • [Publications] H.Nishiyama, K.Kintaka, J.Nishii, T.sano, E.Ohmura, I.Miyamoto: "Thermo-and Photo-Sensitive GeO2-B2O3-SiO2 Thin Glass Films"Japan Journal Applied Physics. 42(1)-2A. 559-563 (2003)

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  • [Publications] 野口 暁, 大村悦二, 宮本 勇: "プリント基板のレーザ穴あけにおける樹脂除去の解析"精密工学会誌. 69(掲載予定). (2003)

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  • [Publications] 福本一郎, 大村悦二: "ガウシャンビーム照射によるレーザ衝撃現象の分子動力学解析"精密工学会誌. 67-6. 916-921 (2001)

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  • [Publications] 福本一郎, 木村悦二, 宮本勇: "ピコ秒パルスレーザアブレーションプロセスの分子動力学解析-超短パルスレーザによる材料加工現象(第2報)-"溶接学会論文集. 19-4. 641-648 (2001)

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  • [Publications] 木村悦二, 石坂有里, 福本一郎, 宮本勇: "Siのレーザ加工の三次元分子動力学シミュレーション-超短パルスレーザによる材料加工現象(第3報)-"溶接学会論文集. 19-4. 649-655 (2001)

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  • [Publications] 福本一郎, 木村悦二, 宮本勇: "レーザアブレーションにおける蒸発粒子の飛散"精密工学会誌. 67-11. 1884-1890 (2001)

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  • [Publications] E.Ohmura, I.Fukumoto, I.Miyamoto: "Molecular Dynamics Analysis of Ultorafast Laser Ablation"Proceedings of 2nd euspen International Conference. 50-53 (2001)

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  • [Publications] E.Ohmura, I.Fukumoto, I.Miyamoto: "Scattering of Evaporation Particles in Ultrashort-Pulse Laser Ablation"Proceeding of SPIE. (in press). (2001)

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  • [Publications] E.Ohmura, T.Tanigucdi, I.Miyamoto: "Temperature Dependence of SHG Conversion Effi-ciency of Nonlinear Optical Crystal"Proceeding of SPIE. (in press). (2001)

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  • [Publications] E.Ohmura, I.Fukumoto, I.Miyamoto: "Simulation of the Ablation Process by Molecular Dynamics"Proceedings of Laser2001. (in press). (2001)

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  • [Publications] E.Ohmura, I.Fukumoto, I.Miyamoto: "Scattering of Particles Ablated by Ultrashort-Pulse Laser"ICALEO2001 Congress Proceedings, Laser Institute of America. Vol.90. 1658-1665 (2001)

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Published: 2001-04-01   Modified: 2016-04-21  

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