Development of nanostructure manipulator employing parallel mechanism
Grant-in-Aid for Scientific Research (C)
|Allocation Type||Single-year Grants|
Intelligent mechanics/Mechanical systems
|Research Institution||Toyota Technological Institute|
FURUTANI Katsuhi Toyota Technological Institute, Faculty of Engineering, Assistant Professor, 工学部, 助教授 (00238685)
|Project Period (FY)
2001 – 2002
Completed(Fiscal Year 2002)
|Budget Amount *help
¥4,100,000 (Direct Cost : ¥4,100,000)
Fiscal Year 2002 : ¥1,700,000 (Direct Cost : ¥1,700,000)
Fiscal Year 2001 : ¥2,400,000 (Direct Cost : ¥2,400,000)
|Keywords||parallel mechanism / piezoelectric element / nanotechnology / coarse and fine motion / attitude control / linear drive mechanism / calibration / nanometer cutting|
In these years, an atomic force microscope (AFM) has been used for the observation and evaluation of the phenomena in nanometer cutting. This study is aiming at developing an AFM employing Stewart-platform type parallel mechanism and using it as a machine tool for nanometer cutting. The following has been carried out in this study.
1. System design and assembly
The stage with an isotropic structure was designed. The movable range of the prototype is 20 μm in the x- and y- directions and 100 μm in the z- direction. The resonant frequency of the prototype is approximately 85 Hz in all directions. The stage motion was controlled by the displacement feedback control of the link length.
2. Calibration of stage motion
The stage motion was calibrated with 4th-order polynomials. The standard deviation of motion error was 0.1 μm after the calibration. The motion was evaluated by using force curves, which acts between water molecules and the probe.
3. Experiment about nanometer cutting
This stage was applied to a positioning device of the nanometer-cutting machine. Pockets could be machined on acrylic resin with a vibration of the probe tip. The anisotropic stiffness of a strip cantilever causes machining error because of its torsion and buckling.
4. Mobile device for coarse and fine motion
A device with one-degree of freedom was made and the influence of the load and inclination angle was evaluated. The conditions for vertical motion was obtained.
An L-shaped structure of Seal mechanism is proposed to reduce the interference among the axes. Positioning accuracies in the x and y directions are smaller than the resolution of the displacement sensor. It performed as well as the inchworm mechanism though the device has a smaller number of the controlled actuators.
Research Products (3results)