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Nondestructive evaluation of thin layers and films by a Brillouin scattering spectroscopy

Research Project

Project/Area Number 13650469
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Measurement engineering
Research InstitutionDOSHISHA UNIVERSITY

Principal Investigator

MATSUKAWA Mami  Doshisha University, Department of Electronics, Associate Professor, 工学部, 助教授 (60288602)

Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2002: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2001: ¥2,300,000 (Direct Cost: ¥2,300,000)
KeywordsBrillouin scattering / Layer / Film / Adhesive layer / Birefringence / Surface wave / ブリュアン散乱 / 異方性薄膜 / 高分子接着層 / ブリュアン光散乱 / 金属薄膜 / SiC薄膜
Research Abstract

The purpose of this project is to achieve the nondestructive evaluation of elastic properties in thin metal layers and polymer films by a Brillouin scattering spectroscopy, which cannot have been performed by the conventional ultrasonic techniques. By introducing new measurement apparatus and precise temperature control, we could succeed in long time and continuous measurement of sample velocity, under different physical conditions such as temperature and stress.
A continuous measurement of longitudinal wave velocity in thin polymer films (thickness several microns) could be performed by using the 90A optical geometry and tensile test apparatus. The ultra-drawing process in a film was clearly observed as an increase of velocity and showed the appearance of anisotropy. By changing the polarization of incident laser light, we also succeeded in the continuous and nondestructive measurement of birefringence in a film. This method was also applied to the evaluation of adhesive polymer layer under the tensile stress.
As for Sic nano layers on the Si wafer, the very weak Brillouin scattering peaks owing to the surface Rayleigh waves could be observed. Although the thickness of the layer was much smaller than the wavelength of the light, the Rayleigh wave velocity clearly depended on the crystalline structure of Sic layer, showing the similar behavior with the velocity of bulk Sic. The scattering peaks of Surface wave were also clearly observed from the one dimensionally aligned ZnO layer on glass plate, showing the anisotoropy of the layer.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (17 results)

All Other

All Publications (17 results)

  • [Publications] Yoshida, Hisa, Mataukawa, Otani, Ohtori: "Effects of tensile stress on the hypersonic wave velocities in polymer films"Acoust.Sci.& Tech.. 22. 375-377 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yoshida, Hisa, Mataukawa, Otani, Ohtori: "Effects of tensile stress on the hypersonic properties of thin polymer films"Jpn.J.Appl.Phys.. 40. 3511-3515 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 村田, 松川, 大谷, 松本, 木内: "ブリユアン光散乱法を用いたSiC薄膜の非破壊評価"電子情報通信学会技術研究報告. US2001-23. 81-87 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 徳田, 谷利, 松川, 渡辺, 大谷: "レーザ誘起表面波の伝搬過程の測定と解析"電子情報通信学会技術研究報告. US2001-83. 15-20 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Murata, Matsukawa, Matsumoto, Sugimoto, Goto, Kiuchi, Ohtori: "Nondestructive evaluation of SiC layer by Brillouin scattering method"Jpn.J.Appl.Phys.. 41. 3374-3375 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hisa, Matsukawa, Otani, Huey, Briggs, Ohtori: "Birefringence measurement of thin polymer films under tensile stress by a Brillouin scattering method"Jpn.J.Appl.Phys.. (Accepted).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yoshida, Hisa, matsukawa, Otani and Ohtori: "Effects of tensile stress on the hypersonic wave velocities in polymer films"Acoust. Sci. & Tech.. Vol.22. 375-977 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yoshida, Hisa, Matsukawa, Otani and Ohtori: "Effects of tensile stress on the hypersonic properties of thin polymer films"Jpn. J. Appl. Phys.. Vol. 40. 3511-3515 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Murata, Matsukawa, Otani, Matsumoto and Kiuchi: "Nondestructive evaluation of SiC layer by Brillouin scattering method, (In Japanese)"Technical report of IEICE. US2001-23. 81-87 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Tokuda, Tanikaga, Matsukawa, Watanabe and Otani: "Measurement of laser induced surface waves on the cylindrical surface, (In Japanese)"Technical report of IEICE. US2001-83. 15-20 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Murata, Matsukawa, Matsumoto, Sugimoto, Goto, Kiuchi and Ohtori: "Nondestructive evaluation of SiC layer by Brillouin scattering method"Jpn. J. Appl. Phys.. Vol. 41. 3374-3375 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hisa, Matsukawa, Otani, Huey, Briggs and Ohtori: "Birefringence measurement of thin polymer films under tensile stress by a Brillouin scattering method"Jpn. J. Appl. Phys.. (Accepted).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Murata, Matsukawa, et al.: "Nondestructive Evaluation of SiC layer by Brillouin Scattering Method"Japanese Journal of Applied Physics. Vol.41 No.5B. 3374-3375 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Matsukawa, et al.: "Stress Effect on the Wave Velocities in Polymer Films and Layers"Proceedings of 6^<th> congress of French Acoustics. 590-593 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Hisa, Matsukawa, et al.: "Birefringence measurement of thin polymer films under the tensile stress by a Brillouin scattering method"Japanese Journal of Applied Physics. (掲載決定).

    • Related Report
      2002 Annual Research Report
  • [Publications] 村田哲志: "ブリユアン光散乱法を用いたSiC薄膜の非破壊評価"電子情報通信学会技術研究報告. US2001-23. 81-87 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Mami Matsukawa: "Real-time evaluation of stress effect on the hypersonic wave velocities in polymer films"Proceedings of 17th international conference of acoustics. 332-333 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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