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Measurement of carbon plasma plume for optimization of the process carbonaceous functional materials

Research Project

Project/Area Number 13680560
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field プラズマ理工学
Research InstitutionKumamoto University

Principal Investigator

IKEGAMI Tomoaki  Kumamoto University, Graduate School of Science and Technology, Associate Professor, 大学院・自然科学研究科, 助教授 (20136518)

Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 2002: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 2001: ¥1,300,000 (Direct Cost: ¥1,300,000)
KeywordsPulsed Laser Ablation / Laser Induced Fluorescence / C_2 molecule / carbon nanotube / 2D-LIF / ドップラー幅 / DLC
Research Abstract

Carbon plasma plumes are produced by ablating a graphite target using KrF excimer laser (λ=248 nm) and Nd:YAG laser (λ=532 nm) in vacuum. Relative densities and their profiles of C_2 molecules, C atoms and C^+ were measured using 2D-LIF, spectral absorption method and ion probe method. Experimental results are summarized as follows.
1) C atoms and ions ejected from a graphite by KrF laser ablation are in highly electronically excited states. Number of ions increases with increase of laser fluence and they play radiative recombination within 100 ns after ablation.
2) Emission from plasma plume produced by Nd:YAG laser from C, C^+. The number of C, C^+, C_2 increase with laser fluence.
3) Temperature of C_2 molecules in KrF plasma plume is about 2,870 K at 300 ns after ablation, which is higher than that of Nd:YAG plasma plume. Production of C, C^+, C_2 by Nd:YAG fundamental laser results from heating and evaporation of a graphite target.
Optical measurement of plasma plume under carbon nanotubes formation condition, where a graphite composite rod containing Ni was ablated by Nd:YAG laser (λ=532 nm) in 500 Torr Ar gas. Many atomic emission lines of Ar, Ni were observed with emission from C, C_2, C^+, C^<2+>. Most of emission from carbonaceous species extinguish at 400 ns after ablation, however, Ni atomic emission lasts for long time and it indicates existence of excited Ni atoms. Laser Mie scattering images showed that carbon particulates are formed near the target at about several hundreds μs after ablation and drift at initial velocity of 7 m/s and diffuse forming swirls few tens ms.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (9 results)

All Other

All Publications (9 results)

  • [Publications] T.Ikegami, S.Ishibashi, Y.Yamagata, K.Ebihara, R.K.Thareja, J.Narayan: "Spatial Distribution of Carbon Species in Laser Ablation of Graphite Target"J.Vacuum Science & Technology A. 19・4. 1304-1307 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 青木振一, 大島多美子, 池上知顯, 蛯原健治: "アンモニア雰囲気ガスを用いたパルスレーザプロセスによるCNx薄膜の作製"電気学会論文誌A. 122・4. 398-403 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 池上知顕, 一野克憲, 内山 誠, 蛯原健治: "真空中のレーザアブレーションにより生成されたカーボンプラズマプルームの計測"電気学会論文誌C. 123・2. 234-240 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Ikegami, S. Ishibashi, Y. Yamagata, K. Ebihara, R.K. Thareja, J. Narayan: "Spatial Distribution of Carbon Species in Laser Ablation of Graphite Target"Journal of Vacuum Science and Technology A. Vol. 19, No. 4. 1304-1307 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S. Aoqui, T. Ohshima, T. Ikegami, K. Ebihara: "Preparation of the Carbon Nitride Thin Films using NH_3 Ambient Gas by Pulsed Laser Process"Trans. IEE Japan. Vol. 122-A, No. 4. 398-403 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Ikegami, K. Ichino, M. Uchiyama, K. Ebihara: "Diagnostics of the Carbon Plasma Plume Produced by Laser Ablation of Graphite in Vacuum"IEEJ Trans. EIS. Vol. 123, No. 2. 234-240 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 池上知顕, 一野克憲, 内山 誠, 蛯原健治: "真空中のレーザアブレーションにより生成されたカーボンプラズマプルームの計測"電気学会論文誌C. 123巻2号. 234-240 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Ikegami, S.Ishibashi, Y.Yamagata, K.Ebihara, R.K.Thareja, J.Narayan: "Spatial Distribution of Carbon Species in Laser Ablation of Graphite Target"Journal of Vacuum Science and Technology A. Vol.9, No.4. 1304-1307 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Ikegami, T.Ohshima, M.Nakao, S.Aoqui, K.Ebihara: "Impression of High Voltage Pulses on Substrate in Pulsed Laser Deposition"Journal of Vacuum Science and Technology A. Vol.19, No.6. 2737-2740 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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