真空中静電浮上位置決めテーブルの開発

• Project/Area Number: 13750191
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Dynamics/Control
• Research Institution: The University of Tokyo
• Principal Investigator: 新野 俊樹 東大, 生産技術研究所, 助教授 (70291929)
• Project Period (FY): 2001
• Project Status: Completed (Fiscal Year 2001)
• Budget Amount: ¥1,200,000 (Direct Cost: ¥1,200,000); Fiscal Year 2001: ¥1,200,000 (Direct Cost: ¥1,200,000)