| Budget Amount *help |
¥96,590,000 (Direct Cost: ¥74,300,000、Indirect Cost: ¥22,290,000)
Fiscal Year 2006: ¥13,650,000 (Direct Cost: ¥10,500,000、Indirect Cost: ¥3,150,000)
Fiscal Year 2005: ¥14,950,000 (Direct Cost: ¥11,500,000、Indirect Cost: ¥3,450,000)
Fiscal Year 2004: ¥25,610,000 (Direct Cost: ¥19,700,000、Indirect Cost: ¥5,910,000)
Fiscal Year 2003: ¥24,440,000 (Direct Cost: ¥18,800,000、Indirect Cost: ¥5,640,000)
Fiscal Year 2002: ¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000)
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| Research Abstract |
The demand for fabrication of nano-devices has recently increased in the field of advanced science and engineering. In particular ; an ultraprecision machining with large work area has been required for producing functional elements with three-dimensional nano-structures. In order to meet such requirements, many studies related on the development of ultraprecision machine tool have been performed so far; while there have been only few academic literatures on such developments.
In this research project, therefore, an ultraprecision and ultrafine machining system for fabricating nano-devices was newly developed and then the performances were evaluated through a series of ultraprecision machining experiments. The machining system developed in this project was of a perfect non-contact structure which could be design to minimize various error factors within the machine structure.
The developed ultraprecision and ultrafine machining system based on a new design concept was constructed from the following fundamental structural modules :
(1)An novel X-Y-θ planar motion aerostatic table system,
(2)An air turbine-driven high speed aerostatic spindle system for nano-machining,
(3)A vertical nano-motion table system equipped with innovate gravity compensator,
(4)An effective thermal deformation control system with temperature control function of supply air,
(5)An in-process ultraprecision machining status monitoring system with micro-sensor, and
(6)A stable entire machine structure which was applied new materials to all of fundamental structural modules.
Finally, the results of actual nano-machining experiments confirmed that the developed ultraprecision and ultrafine machining system provides remarkable performances and then is suitable for nano-machining of nano-devices.
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