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Reaction Dynamics of Atomic Hydrogen with H-terminated Si Surfaces

Research Project

Project/Area Number 14350022
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionKyusyu Institute of Technology

Principal Investigator

NAMIKI Akira  Kyushu Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授 (40126941)

Co-Investigator(Kenkyū-buntansha) INANAGA Shoji  Kyushu Institute of Technology, Faculty of Engineering, Associate Researcher, 工学部, 助手 (30093959)
TSURUMAKI Hiroshi  Kyushu Institute of Technology, Faculty of Engineering, Associate Researcher, 工学部, 助手 (20315162)
Project Period (FY) 2002 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥10,900,000 (Direct Cost: ¥10,900,000)
Fiscal Year 2004: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 2003: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 2002: ¥6,900,000 (Direct Cost: ¥6,900,000)
Keywordsatomic hydrogen / Si surface / abstraction / desorption dynamics / シリコン表面 / 水素引き抜き / 反応ダイナミックス / 水素引き抜き反応 / 表面反応ダイナミックス
Research Abstract

Our Aim of the research is to investigate the dynamics of H-induced abstraction of surface D adatoms on the Si(100) surfaces. There are two kinds of abtraction paths : one is direct abstraction (ABS) and the other is adsorption-induced-desorption(AID) of surfaced adatams. From experiments w e clarified following things :
(1)Angular distribution of molecules desorbed along ABS and AID reaction pathways.
The angular distributions of desorption yields show a maximum at the normal direction for both paths. Results were well explained by the simulation employing LEPS potential. This has been prepared to be submitted to a journal as a paper.
(2)D_2 desorptions along the AID channel were studied by means of a chopped H-beam technique. The width of the chopped-H beam was 1.5 s and duration was 3 s. The HD desorption along the ABS channel showed a quick response to the incident H pulse, suggesting the abstraction reaction is direct. On the other hand, D_2 desorption along the AID pathway showed no … More t only a similar quick path but also a delayed path. The fast desorption channel was understood as due to molecular emissions that occur when locally formed 1x1 dihydride phases collap into the original 3x1 dihydride phases. A paper was published (J.Chem.Phys.121,3221(2004))
(3)D_2 desorptions along the AID channel were studied by employing further shortned H-beam. The width of the chopped-H beam was 0.5 s and duration was 10 s. The HD desorption along the ABS channel showed a quick response to the incident H pulse, suggesting abstraction reaction is direct. On the other hand, D_2 desorption along the AID pathway showed multi components chracterized with 0.05,0.8 and 30 s lifetimes. The fastest desorption channel was understood as due to molecular emissions that occur when locally formed 1x1 dihydride phases collap into the original 3x1 dihydride phases. The second fastest path was understood as due to molecular emission when 3x1 dihydride phases are formed during H irradiation. The third component was attributed to the molecular emission channel when the excess 3x1 dihydride phases are destroyed. Apaper has been submitted to Surf face Science. Less

Report

(4 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (14 results)

All 2005 2004 Other

All Journal Article (8 results) Publications (6 results)

  • [Journal Article] Coverage dependent desorption dynamics of deuterium on Si(100) surfaces : Interpretation with a diffusion-promoted desorption mode 12005

    • Author(s)
      T.Matsuno, T.Niida, H.Tsurumaki, A.Namiki
    • Journal Title

      The Journal of Chemical Physics 122

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Coverage dependent desorption dynamics of deuterium on Si(100) surfaces : Interpretation with a diffusion-promoted desorption model2005

    • Author(s)
      T.Matsuno, T.Niida, H.Tsurumaki, A.Namiki
    • Journal Title

      J.Chem.Phys. 122

    • NAID

      120002440718

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Coverage dependent desorption dynamics of deuterium on SI(100) surfaces : Interpretation with a diffusion-promoted desorption model2005

    • Author(s)
      T.Matsuno, T.Niida, H.Tsurumaki, A.Namiki
    • Journal Title

      Journal of Chemical Physics 122

    • NAID

      120002440718

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Isotope effects on H and D coadsorptions on Si surfaces2004

    • Author(s)
      F.Rahman, N.Ohnish, F.Khanom, S.Inanaga, A.Namiki
    • Journal Title

      Japanese Journal Applied Physics 43

      Pages: 726-729

    • NAID

      10012040743

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Modulated hydrogen beam study of adsorption-induced desorption of deuterium from Si(100)-3x1:D surfaces2004

    • Author(s)
      F.Rahman, M.Kuroda, T.Kiyonaga, F.Khanom, H.Tsurumaki, S.Inanaga, A.Namiki
    • Journal Title

      The Journal of Chemical Physics 121

      Pages: 3221-3227

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Isotope effects on H and D coadsorptions on Si surfaces2004

    • Author(s)
      F.Rahman, N.Ohnish, F.Khanom, S.Inanaga, A.Namiki
    • Journal Title

      Jpn.J.Appl.Phys. 43

      Pages: 726-729

    • NAID

      10012040743

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Modulated hydrogen beam study of adsorption-induced desorption of deuterium from Si(100)-3x1:D surfaces2004

    • Author(s)
      F.Rahman, M.Kuroda, T.Kiyonaga, F.Khanom, H.Tsurumaki, S.Inanaga, A.Namiki
    • Journal Title

      J.Chem.Phys. 121

      Pages: 3221-3227

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Modulated hydrogen beam study of adsorption-induced desorption of deuterium from Si(100)-3x1:D surfaces2004

    • Author(s)
      F.Rahman, M.Kuroda, T.Kiyonaga, F.Khanom, A.Namiki, et al.
    • Journal Title

      Journal of Chemical Physics 121

      Pages: 3221-3227

    • Related Report
      2004 Annual Research Report
  • [Publications] Faridur RAHAMAN, et al.: "Isotope Effects on H and D Coadsorptions on Si Surfaces"Japanese Journal Applied Physics. 42・2. 726-729 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] F.Rahman, et al.: "Oxygen atom-induced D_2 and D_2O desorption on D/Si(111) surfaces"Applied Surface Science. 220. 1-6 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Shibataka, et al.: "D_2 reactions on Si(100) surfaces : Adsorption and desorption dynamics"Physical Raview. B68. 113307-1-113307-2 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Sagara, T.Kuga, et al.: "Translational Heating of D2 Molecules Thermally Desorbed from Si(100) and Ge(100) Surfaces"Phys. Rev. Letter. 89・8. 86101-1-86101-4 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] F.Khanom, A.Aoki, et al.: "Dabstraction by H on Si(111) surfaces"Surface Science. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Tsurumaki, et al.: "Adsorption and desorption of deuterium on partially oxidized Si(100) surfaces"Physical Review B. (in press). (2003)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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