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A Study of the Particle Transport and Surface Reactions in Microstructures on Substrates during Plasma Processing

Research Project

Project/Area Number 14380209
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field プラズマ理工学
Research InstitutionKyoto University

Principal Investigator

ONO Kouichi  Kyoto University, Graduate School of Engineering, Professor, 工学研究科, 教授 (30311731)

Co-Investigator(Kenkyū-buntansha) SETSUHARA Yuichi  Osaka University, Joining and Welding Research Institute, Professor, 接合科学研究所, 教授 (80236108)
TAKAHASHI Kazuo  Kyoto University, Graduate School of Engineering, Assistant Professor, 工学研究科, 助手 (50335189)
Project Period (FY) 2002 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥15,000,000 (Direct Cost: ¥15,000,000)
Fiscal Year 2004: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 2003: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2002: ¥9,900,000 (Direct Cost: ¥9,900,000)
KeywordsPlasma Processing / Microstructure / Particle Transport / Surface Reaction / Feature Profile Evolution / High-Density Plasma / Etching / Chemical Vapor Deposition
Research Abstract

An understanding of the particle transport and surface reactions in microstructures on substrates are indispensable for the control of advanced plasma processing for the fabrication of sub-0.1 μm devices. We have developed an atomic scale model of the particle transport and surface reactions, to simulate the feature profile evolution for nanometer-scale control of the profile and critical dimensions during plasma etching. The model is a phenomenological one at an intermediate scale between molecular dynamics simulation and continuum models. The model takes into account the transport of ions and neutrals in microstructures, multilayer surface reactions through ion-enhanced etching, and the resulting feature profile evolution, where the transport is analyzed by a particle simulation based on successively injected single-particle trajectories with three velocity components. To incorporate an atomistic picture into the model, the substrates are taken to consist of a large number of small c … More ells or lattices in the entire computational domain of interest, and the evolving interfaces are modeled by using the cell removal method ; the substrate atoms are allocated in the respective square lattices of atomic scale. Moreover, the Monte Carlo calculation is employed for the trajectory of incident energetic ions that penetrate into substrates. The present model has a prominent feature to phenomenologically simulate the multilayer surface reaction, the surface roughness, and also the feature profile evolution during etching. The etching of planar Si substrates with chlorine chemistries was simulated for a test of validity of the present model, showing the structure of surface reaction layers, the distribution of Cl atoms therein, and the surface roughness that depend on incident neutral-to-ion flux ratio and ion energy. The etch yield as a function of neutral-to-ion flux ratio for different ion energies gave a similar tendency to the known experimental data, indicating that the present model properly reflects synergistic effects between neutral reactants and energetic ions in the ion-enhanced etching.
The feature profile evolution during etching was then simulated for sub-0.1 μm line-and-space patterns of Si, taking into account also the effects of chemical etching, passivation layer formation (surface oxidation and inhibitor deposition), and surface charging. The numerical results exhibited the reactive ion etching (RIE) lag that occurs depending on neutral-to-ion flux ratio and ion energy, being compared with the experiments of etching and plasma and surface diagnostics. The degree of RIE lag was found to be more significant at higher flux ratios and higher energies, being associated with the difference in surface chlorination at the feature bottom ; in effect, for narrow pattern features of the order of sub-0.1 μm, the bottom surfaces tend to intrinsically starve for neutral reactants owing to severe effects of the geometrical shadowing. Moreover, based on these results, we developed the fabrication processes for advanced gate etch processes of new gate dielectric and electrode materials. Less

Report

(4 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (23 results)

All 2005 2004 2003 2002 Other

All Journal Article (15 results) Book (2 results) Publications (6 results)

  • [Journal Article] Plasma Etching of High-k and Metal Gate Materials2005

    • Author(s)
      K.Ono
    • Journal Title

      Proc.8th International Symposium on Sputtering & Plasma Processes, ISSP-2005, Kanazawa, Japan, 2005, Paper PP2-5 (in press)

      Pages: 1-6

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] An Atomic Scale Model of Multilayer Surface Reactions and the Feature Profile Evolution during Plasma Etching2005

    • Author(s)
      Y.Osano, K.Ono
    • Journal Title

      Jpn.J.Appl.Phys. Vol.44(submitted)

    • NAID

      10016959476

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Plasma Etching of High-k and Metal Gate Materials2005

    • Author(s)
      K.Ono
    • Journal Title

      Proc.8th International Symposium on Sputtering & Plasma Processes, ISSP-2005, Kanazawa, Japan (Vacuum Society of Japan, 2005) PP2-5 [in press]

      Pages: 1-6

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] An Atomic Scale Model of Multilayer Surface Reactions and the Feature Profile Evolution during Plasma Etching2005

    • Author(s)
      Y.Osano, K.Ono
    • Journal Title

      Jpn.J.Appl.Phys. Vol.44 [submitted]

    • NAID

      10016959476

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 半導体シミュレーションとTCAD2004

    • Author(s)
      斧 高一
    • Journal Title

      プラズマ・核融合学会誌 Vol.80 No.11

      Pages: 909-918

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 誘導結合型フルオロカーボンプラズマを用いた高誘電率HfO_2薄膜のエッチング2004

    • Author(s)
      高橋和生, 斧 高一, 節原裕一
    • Journal Title

      表面技術 Vol.55 No.12

      Pages: 793-799

    • NAID

      10014096314

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Numerical Simulation and Technology Computer-Aided Design of Plasma Processing for the Fabrication of Semiconductor Micro-electronic Devices2004

    • Author(s)
      K.Ono
    • Journal Title

      J.Plasma Fusion Res.[in Japanese] Vol.80, No.11

      Pages: 909-918

    • NAID

      110003827635

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Etching of High Dielectric Constant HfO_2 Thin Films in Inductively Coupled Fluorocarbon Plasmas2004

    • Author(s)
      K.Takahashi, K.Ono, Y.Setsuhara
    • Journal Title

      J.Surface Finishing Soc.Jpn.[in Japanese] Vol.55, No.12

      Pages: 793-799

    • NAID

      10014096314

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] A model of multilayer surface reactions and simulation of the feature profile evolution during etching of silicon in chlorine plasmas2004

    • Author(s)
      Y.Osano, K.Ono
    • Journal Title

      Abstracts of the 51st International Symposium of the American Vacuum Society, Anaheim, California, November, 2004

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Selective etching of HfO_2 high-κ gate materials over Si in C_4F_8/Ar/H_2 plasmas2004

    • Author(s)
      K.Takahashi, K.Ono
    • Journal Title

      Proceedings of the 4th International Symposium on Dry Process, DPS-2004,Tokyo, Japan, November 2004

      Pages: 369-274

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 半導体プラズマプロセスシミュレーションとTCAD2004

    • Author(s)
      斧 高一
    • Journal Title

      プラズマ・核融合学会誌 Vol.80 No.11

      Pages: 909-918

    • NAID

      110003827635

    • Related Report
      2004 Annual Research Report
  • [Journal Article] A Numerical Analysis of RF Discharges and Particle Transport in the Sheath and Microstructures on the Substrate2003

    • Author(s)
      Y.Osano, T.Nomura, K.Miki, K.Ono
    • Journal Title

      Proc.16th International Symposium on Plasma Chemistry, ISPC-16, Taormina, Italy, 2003, Paper Po3.46/ISPC-478

      Pages: 1-6

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] A Numerical Analysis of RF Discharges and Particle Transport in the Sheath and Microstructures on the Substrate2003

    • Author(s)
      Y.Osano, T.Nomura, K.Miki, K.Ono
    • Journal Title

      Proc.16th International Symposium on Plasma Chemistry, ISPC-16, Taormina, Italy Po3.46/ISPC-478

      Pages: 1-6

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Profile Simulation Model for Nanometer-Scale Control of Critical Dimensions and Etched Profiles2002

    • Author(s)
      A.Sano, K.Ono, K.Takahashi, Y.Setsuhara
    • Journal Title

      Proc.2nd International Symposium on Dry Process, DPS-2004, Tokyo, Japan 2002

      Pages: 177-182

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Profile Simulation Model for Nanometer-Scale Control of Critical Dimensions and Etched Profiles2002

    • Author(s)
      A.Sano, K.Ono, K.Takahashi, Y.Setsuhara
    • Journal Title

      Proc.2nd International Symposium on Dry Process, DPS-2004, Tokyo (IEEJ, Tokyo, 2002)

      Pages: 177-182

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Book] エッチング、「新改訂・表面科学の基礎と応用」第3編、第1章、第3節、第6項(日本表面科学会編)2004

    • Author(s)
      斧 高一
    • Publisher
      エヌ・ティー・エス社
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Book] Surface Science : Fundamentals and Applications [in Japanese](edited by The Surface Science Society of Japan)2004

    • Author(s)
      K.Ono
    • Publisher
      NTS, Tokyo
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] Y.Osano, T.Nomura, K.MIki, K.Ono: "A numerical analysis of rf discharges and particle transport in the sheath and microstructures on the substrate"Proceedings of the 16th International Symposium on Plasma Chemistry, ISPC-16,Taormina, Italy, July 2003. Paper Po3.46 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Takahashi, K.Ono, Y.Setsuhara: "Performance of inductively coupled fluorocarbon plasmas in etching of HfO_2 thin films as a high-k gate insulating material"Proceedings of the 3rd International Symposium on Dry Process, DPS-2003,Tokyo, Japan, October,2003. 247-252 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 斧 高一: "高誘電体材料/電極材料エッチング技術(印刷中)"Electronic Journal 別冊「2004半導体テクノロジー大全」. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 斧 高一: "「新訂版・表面科学の基礎と応用」,日本表面科学会編,第3編、第1章、第3節、第6項(エッチング)"エヌ・ティー・エス社. 11 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] A.Sano, K.Ono, K.Takahashi, Y.Setsuhara: "Profile Simulation Model for Nanometer-Scale Control of Critical Dimensions and Etched Profiles"Proceedings of the 2nd International Symposium on Dry Process, DPS-2002, Tokyo, Japan, October 10-11, 2002. 177-182 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Kousaka, K.Ono: "Fine Structure of the Electromagnetic Fields Formed by Backward Surface Waves in an Azimuthally Symmetric Surface Wave-Excited Plasma Source"Plasma Sources Science and Technology. Vol.12(印刷中). (2003)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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