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Highly Adaptive and Parallel Processing Simulation of RF Plasma Production

Research Project

Project/Area Number 14380210
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field プラズマ理工学
Research InstitutionKyoto University

Principal Investigator

FUKUYAMA Atsushi  Kyoto University, Graduate School of Engineering, Professor, 工学研究科, 教授 (60116499)

Co-Investigator(Kenkyū-buntansha) MURAKAMI Sadayoshi  Kyoto University, Graduate School of Engineering, Associate Professor, 工学研究科, 助教授 (40249967)
Project Period (FY) 2002 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥8,600,000 (Direct Cost: ¥8,600,000)
Fiscal Year 2004: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2003: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2002: ¥6,500,000 (Direct Cost: ¥6,500,000)
KeywordsPlasma / RF Production / Simulation / Finite Element Method / Parallel Processing
Research Abstract

1.In order to investigate various phenomena in RF plasma production, we have developed an integrated simulation code PAF that describes time evolution of the plasma and the electromagnetic field with the finite element method.
2.We have improved the two-dimensional wave propagation and diffusive transport modules, TASK/WF+TF. In the wave analysis, Maxwell's equation is solved as a stationary boundary-value problem with potentials, and the diffusive transport equation is solved with the full implicit method. The matrix solver using the wave front method was parallelized with the MPI library.
3.The wave propagation module TASK/WF was extended to the three-dimensional configuration and the edge element method was introduced to suppress the spurious solutions and improve the accuracy. The wave excitation by various kinds of waveguides, helical antenna and coaxial antenna was studied and the results were compared with those of two-dimensional analysis.
4.The two-dimensional particle simulation module TASK/PF was newly developed with the finite element method using highly adaptive triangular elements. The module now includes the effects of atomic-molecular processes, such as elastic collision, ionization, excitation and charge exchange, and was applied to the electrostatic simulation of RF plasma production.
5.A new formulation of the gyrokinetic equations was derived by means of the Hamiltonian-Lie transformation. A new gyrokinetic particle simulation code was developed based on this formulation and applied to the analysis of the sheath formation in a magnetized plasma.
6.The PC cluster of 32 CPUs (Intel Xeon 2.2 GHz) was assembled by this research project and highly-parallelized codes confirmed its high performance of computation.

Report

(4 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (2 results)

All 2005 2003

All Journal Article (2 results)

  • [Journal Article] Hybrid Simulation of RF Plasma Production Using FEM2005

    • Author(s)
      A.Fukuyama
    • Journal Title

      Proc.of Plasma Science Symposium 2005 and the 22nd Symposium on Plasma Processing

      Pages: 101-102

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Simulation of RF Plasma Production by FEM2003

    • Author(s)
      H.Kobayashi, A.Fukuyama
    • Journal Title

      Proc.of the 20th Symposium on Plasma Processing

      Pages: 173-174

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary

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Published: 2002-04-01   Modified: 2016-04-21  

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