Formation of High energy White Synchrotron Microbeam and its Application to Micro-Imaging of Electronic Devices
| Project/Area Number |
14550012
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied materials science/Crystal engineering
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| Research Institution | Kyushu Institute Of Technology |
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Principal Investigator |
CHIKAURA Yoshinori Kyushu Institute Of Technology, Graduate School of Engineering, Department of Applied Science for Integrated System Engineering, Professor, 工学研究科, 教授 (40016168)
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| Co-Investigator(Kenkyū-buntansha) |
SUZUKI Yoshifumi Kyushu Institute Of Technology, Graduate School of Engineering, Department of Applied Science for Integrated System Engineering, Associate Professor, 工学研究科, 助教授 (10206550)
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| Project Period (FY) |
2002 – 2003
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| Project Status |
Completed (Fiscal Year 2003)
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| Budget Amount *help |
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2003: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2002: ¥3,000,000 (Direct Cost: ¥3,000,000)
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| Keywords | X-ray topography / Microbeam / Syncrotoron radiation / X-ray scattering topography / Synchrotoron radiation / X-ray imaging / X線散乱トポグラフィ |
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| Research Abstract |
Microbeam techniques are becoming increasingly important with the recent development of third-generation synchrotron light sources. The present microbeam with microhole among various type of microbeam such as those by KB mirror or two-dimensional asymmetric crystal-reflection has unique characteristics ; high energy, white spectrum and being parallel. In the present research project 5 micrometers diameter microbeam has been successfully attained and applied to the observation of micro-imaging of individual defects such dislocation microdefects in electronic devices.
The observation of a Germanium single crystal clearly revealed dislocations with better contrast and resolution than in a conventional white beam topograph. The present research has shown advantages of a high energy white and parallel microbeam in materials-imaging by X-ray scattering topography. Besides the imaging system equipped with an energy sensitive multi-channel detecting system has provided a function of local spectroscopy simultaneously.
Besides It has been found that focusing effect at the microhole provides approximately 3 micrometer in beam diameter to enable us to attain one micrometer resolution in the present scanning type micro-imaging of devices which takes advantages of high energy white and parallel micro beam, otherwise impossible.
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Report
(3 results)
Research Products
(20 results)
