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A high spatial resolution observation and its quantification of an oxygen radical

Research Project

Project/Area Number 14580524
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field プラズマ理工学
Research InstitutionMusashi Institute of Technology

Principal Investigator

ONO Shigeru  Musashi Institute of Technology, Electrical Engineering, Professor, 工学部, 教授 (80097170)

Co-Investigator(Kenkyū-buntansha) TEII Shinriki  Musashi Institute of Technology, Electrical Engineering, Professor, 工学部, 教授 (70061512)
Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥2,800,000 (Direct Cost: ¥2,800,000)
Fiscal Year 2003: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2002: ¥1,700,000 (Direct Cost: ¥1,700,000)
KeywordsPlatinum / Oxygen radical / Gas temperature / Recombination / Plasma / Positive column / Catalytic action / Dissociative recombination
Research Abstract

Study for measuring the oxygen radical density in the plasma by proper accuracy and high spatial resolution in the Heisei 14 to 15 fiscal year has been done. The outline is as follows.
(1) Establishment of the quantitive measuring method of an oxygen radical density
Since heat up of a platinum wire was based on the surface recombination of an oxygen radical, the oxygen radical density was deduced from the temperature of the platinum wire. As a result of comparing this result with the result of the measurement by a mass spectrometer, good agreement was obtained and it became. clear that an oxygen radical density could be measured from the temperature of the platinum wire.
(2) Investigation about the effect of gas temperature on measurement
When measuring the oxygen radical of lower density comparatively, the temperature changes of the platinum wire are small and effect of-the gas temperature of the surroundings of the platinum wire may be unable to ignore them. In order to solve this, as a result of also measuring gas temperature simultaneously and considering the effect, it became clear that, effect is small in many cases.
(3) Establishment of a lower density oxygen radical density measurement method
By maintaining the platinum wire at the temperature zone where it applies an electric current to a platinum wire, and a catalytic action occurs actively, the sensitivity lowering at the time of lower density was able to be prevented.
(4) The test of high spatial resolution measurement
With this method devised so far, the spatial distribution observation of the oxygen radical density in the plasma was tried. In the lower density region, it became clear that the about double figures radical density of lower density could also be measured conventionally, and the spatial distribution in a glass discharge tube has been measured.

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] 原木信之, 中野宰延洲, 小野茂, 堤井信力: "白金細線による酸素-窒素混合ガスプラズマ中の酸素ラジカル密度測定"電気学会論文誌. 123-A,8. 1075-1080 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 高山史奈子, 小野 茂, 堤井信力: "大気圧コロナトーチによるプラスチックの表面改質"電気学会論文誌. 122-A,8. 722-728 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 菅沼祐太, 植垣孝幸, 志村和哉, 小野 茂, 堤井信力: "マイクロ波H_2Oプラズマを用いたポリエチレンの分解処理"電気学会論文誌. A122-A. 454-460 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Haraki, S.Ono, S.Teii: "Oxygen radical density measurement using Pt thin wire in glow discharge positive column plasma"Proceedings of Sixteen European Conference on Atomic & Molecular Physics of Ionized Gases. 131-132 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Haraki, S.Ono, S.Teii: "Measurement of the oxygen atom density in plasma using platinum thin wire"Proceedings of the 20^<th> Symposium on Plasma Processing. 61-62 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Haraki, S.Ono, S.Teii: "Oxygen radical density measurement in O2-N2 mixture gas plasma by means of thin platinum wire probe"Proceedings of Third Asia-Pacific International Symposium on the Basic and Application of Plasma Technology. 341-344 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Haraki, S.Nakano, S.Ono, S.Teii: "Oxygen radical density measurement in oxygen-nitrogen mixture gas plasma by platinum thin wire."IEEJ Transaction on fundamentals and materials. 123-A,(11). 1075-1080 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Takayama, S.Ono, S.Teii: "Surface Treatment of Plastics by an Atmospheric Pressure Corona Torch"IEEJ Transaction on fundamentals and materials. 122-A,(8). 722-728 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Suganuma, T.Uegaki, K.Shimura, S.Ono, S.Teii: "Study of polyethylene disposal by means of H_20 microwave plasma."IEEJ Transaction on fundamentals and materials. 122-A,(5). 454-460 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Haraki, S.Ono, S.Teii: "Oxygen radical density measurement using Pt thin wire in glow discharge positive column plasma"Proceedings of Sixteen European Conference on Atomic & Molecular Physics of Ionized Gases. 131-132 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Haraki, S.Ono, S.Teii: "Measurement of the oxygen atom density in plasma using platinum thin wire"Proceedings of the 20^<th> Symposium on plasma Processing. 61-62 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Haraki, S.Ono, S.Teii: "Oxygen radical density measurement in O2-N2 mixture gas plasma by means of thin platinum wire probe"Proceedings of Third Asia-Pacific International Symposium on the Basic and Application of Plasma Technology. 341-344 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 原木, 中野, 小野, 堤井: "白金細線による酸素-窒素混合ガスプラズマ中の酸素ラジカル密度測定"電気学会 論文誌A. 123巻、11号. 1075-1080 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Teii, H.Yoshioka, S.Ono, S.Teii: "Argon dilution effects on diamond deposition in electron cyclotron resonance plasma : a double probe study"Thin Solid Films. 437. 63-67 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] N.Haraki, S.Ono, S.Teii: "Oxygen radical density measurement using electrically heated Pt thin wire in glow discharge positive column plasma"Proceedings of 16^<th> International Symposium on Plasma Chemistry. Po2.47. 114 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] N.Haraki, S.Ono, S.Teii: "Oxygen Radical Density Measurement in O_2-N_2 mixture gas plasma by means of thin platinum wire probe"Proceedings of The 3^<rd> Asia-Pacific International Symposium on the Basic and Application of Plasma Technology. P35. 341-345 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Yamazaki, T.Otsuki, S.Ono, S.Teii: "Decomposition of waste plastic by microwave H_2O plasma"Proceedings of The 3^<rd> Asia-Pacific International Symposium on the Basic and Application of Plasma Technology. P9. 217-220 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.S.Wong, S.Ono, S.Teii: "Density Measurement of N_2(A^3Σ_u^+) by Continuum Spectrum Absorption Spectroscopy in the Plasma"Proceedings of the 21^<st> Symposium on Plasma Processing. P1-26. 122-123 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 小野 茂, 他: "マイクロ波応用技術"財団法人 産業創造研究所(校正済み、出版予定). 250 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 菅沼祐太: "マイクロ波H_2Oプラズマを用いたポリエチレンの分解処理"電気学会論文誌A. 122-A, 5. 454-460 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Haraki: "Oxygen radical density measurement using Pt thin wire in glow discharge positive column plasma"Conference Proceedings of ESCAMPIG16 & ICRP5. 2. 131-132 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Ono: "Surface treatment of plastic film by using an atmospheric pressure corona torch"Proceedings of HAKONE VIII. 2. 431-435 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 高山史奈子: "大気圧コロナトーチによるプラスチックの表面改質"電気学会論文誌A. 122-A, 8. 722-728 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 原木信之: "自金細線を用いたプラズマ中酸素原子密底センサーの開発"平成14年電気学会 基礎・材料・共通部門大会講演論文集. 85-90 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Haraki: "Measurement of the oxygen atom density in plasma using platinum thin wire"Proc. of the 20^<th> Symposium on Plasma Processing. 61-62 (2003)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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