| Project/Area Number |
15310107
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Microdevices/Nanodevices
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| Research Institution | University of Hyogo (2004-2005)
Himeji Institute of Technology (2003) |
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Principal Investigator |
MAENAKA Kazusuke University of Hyogo, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (70173721)
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| Co-Investigator(Kenkyū-buntansha) |
TAKAYAMA Yoichiro University of Hyogo, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (90336826)
FUJITA Takayuki University of Hyogo, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (50336830)
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| Project Period (FY) |
2003 – 2005
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| Project Status |
Completed (Fiscal Year 2005)
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| Budget Amount *help |
¥12,000,000 (Direct Cost: ¥12,000,000)
Fiscal Year 2005: ¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 2004: ¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2003: ¥5,500,000 (Direct Cost: ¥5,500,000)
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| Keywords | Ring Laser Gyroscope / MEMS / Mirror / Anisotropic etching / Electroplating / Photo sensitive resin / lens / prism / ジャイロ / 角速度センサ / RLG / 周回光路 / (111)面 / マイクロレンズ / レーザ / SU-8 |
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| Research Abstract |
In this research project, we have established basic technologies for MEMS-based Ring Laser Gyroscope (MEMS RLG). At first, we newly suggested an optical closed-loop by (111) mirror which results from wet anisotropic etching of single crystalline silicon-wafer with (110) surface orientation. The optimum etching condition, effect of miss-alignment, etc. were investigated and we found that the (111) mirror have sufficient quality for an optical mirror at the optimum conditions. Other required optical elements such as lenses and prisms were realized by photo-sensitive epoxy resin and their optical characteristics were examined and confirmed that they are useful for optical-devices. Moreover, alignment and clumping structures for laser diode chip were also constructed by this resin. Then, we combine the mirror fabrication-process and epoxy-resin based process in batch manner, which enables mass production and low cost. In order to improve reflectance of the mirror, we developed direct gold-electroplating technique for silicon surface. This technique eliminates the complicated process to deposit a metal film to the each mirrors by sputtering or evaporation. Many numbers of techniques mentioned above are very useful not only for MEMS RLG but for many devices in optical MEMS field. Now, we have a plan of collaboration with some industries to develop the MEMS RLG which can be put on the market.
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