Development of X-Ray Multilayer Aspheric Mirrors by Replication Technology and Nano-Structure Analysis
| Project/Area Number |
15360075
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Chubu University |
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Principal Investigator |
NAMBA Yoshiharu Chubu University, Dept.of Mech.Engg., Professor, 工学部, 教授 (40029129)
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| Co-Investigator(Kenkyū-buntansha) |
OHNISHI Naoyuki Chubu University, Dept.of Mech.Engg., Professor, 工学部, 教授 (60201977)
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| Project Period (FY) |
2003 – 2005
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| Project Status |
Completed (Fiscal Year 2005)
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| Budget Amount *help |
¥15,300,000 (Direct Cost: ¥15,300,000)
Fiscal Year 2005: ¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 2004: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 2003: ¥9,200,000 (Direct Cost: ¥9,200,000)
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| Keywords | Aspheric molding die / Replicated mirror / Pt / C multilayer / Separation / Transmission electron microscopy / Atomic force microscopy / X-ray optics / Single point diamond turning / 超高圧透過型電子顕微鏡 / 斜入射X線望遠鏡 / X線多層膜の設計 / 無電解ニッケル非球面金型 |
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| Research Abstract |
After depositing Pt/C multilayer on a glass cylinder, we glued aluminum foil on it and cured in a vacuum chamber with an infrared heater. Pt/C multilayer mirrors on aluminum foils were separated from the glass cylinder and were used in a hard X-ray telescope as replicated thin foil mirrors. The telescope was lunched several times in U.S.A.by balloons for observing hard X-ray objects in a space.
The float-polished electroless nickel plane was coated with Pt/C multilayer and glued with a flat grass plate using epoxy resin, and we could separate the Pt/C multilayer from the electroless nickel plane perfectly. The surface roughness was 0.14nm rms on the electroless nickel plane and 0.16nm rms on the Pt/C multilayer mirror, respectively.
The high resolution transmission electron microscopy (TEM) sectional observation of Pt/C multilayer coated on a silicon wafer cleared that C layer showed an amorphous structure and Pt layer showed an oriented polycrystalline nano structure which causes the surface roughness at the interface between two layers. The interface roughness is increased with the decrease of layer spacing less than 3nm in the Pt/C multilayer.
By adding an intermediate Ti layer between the electroless nickel aspheric die and the first Pt layer, we could separate the Pt/C multilayer from the electroless nickel die and obtain Pt/C multilayer replicated internal mirrors for hard X-ray application.
This technology was used in making a gold plated aspheric inner mirror of 6 mm in diameter and we obtained aspheric X-ray replicated collecting mirrors of 72nm in shape accuracy and 1nm Ra in surface roughness. Then we made a soft X-ray microscope of less than 50nm in image resolution.
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Report
(4 results)
Research Products
(59 results)
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[Journal Article] Compact soft x-ray transmission microscopy with sub-50 nm spatial resolution2006
Author(s)
K.W.Kim, Y.Kwon, K.Y.Nam, J.H.Lim, K.G.Kim, K.S.Chon, B.H.Kim, D.E.Kim, J.G.Kim, B.N.Ahn, H.J.Shin, S.Rah, K.H.Kim, J.S.Chae, D.G.Gweon, D.W.Kang, S.H.Kang, J.Y.Min, K.Choi, S.E.Yoon, E.A.Kim, Y.Namba, K.H.Yoon
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Journal Title
Description
「研究成果報告書概要(欧文)」より
Related Report
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[Journal Article] Upgraded hard x-ray telescope with multilayer supermirror for the InFOCuS balloon experiment2004
Author(s)
R.Shibata, Y.Ogasaka, K.Tamura, A.Furuzawa, Y.Tawara, K.Yamashita, R.Takahashi, M.Sakashita, T.Miyazawa, K.Shimoda, C.Sakai, N.Yamada, M.Naitou, T.Futamura, P.J.Serlemitsos, Y.Soong, K.-W.Chan, T.Okajima, J.Tueller, H.A.Krimm, S.D.Barthelmy, S.M.Owens, H.Kunieda, Y.Namba
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Journal Title
Proc.SPIE 5488
Pages: 313-324
Description
「研究成果報告書概要(欧文)」より
Related Report
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